MProbe Thin-film measurement system: Spectroscopic Reflectance and Transmittance

The MProbe series is a thin-film measurement system that uses a fiber optics probe for reflection and fiber optics probe for transmittance. This approach yields a very compact and low-cost system. A careful design of the critical components and measurement optimization algorithms implemented in the software results in remarkably precise and robust instrument.

Small, precise, easy to use and affordable - it is a real workhorse in the R&D lab and in production.

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The MProbe is a complete thin-film measurement system. You'll be ready to start measurements right away - everything is included:spectrometer/ light source unit, fiber optics probe, sample stage, software and reference wafer. Our extensive materials library has 500+ materials, with easy import/creation of the new materials and support for a wide range of parametrized materials (from Cauchy to Cody-Lorentz) is included. One-click measurement combines data acquisition (reflection or transmittance spectrum) and data analysis. Everybody is a measurement expert with MProbe! Of course, we have all the sophisticated tools including sensitivity analysis, error-estimator, simulation, filmstack switching, global optimization, layers and materials linking, etc. for complicated applications development Reflectance and transmittance spectral data can also be used as a raw measurement (for example, as in spectrophotometer) or a for a wide range of other applications e.g. chemical concentration (we have a range of flow cells), filters and coating testing, etc. Check MProbe Accessories here. You can find more details in the following brochures: Download MProbe Measurement101 pdf ( Basics & Software) Download Mapping option brochure.pdf Download Application examples.pdf Download TFCompanion software brochure.pdf

MProbe brochures: Desktop configuration: MProbe brochure pdf In-situ configuration: MProbeInSitubrochure.pdf

Why use M-Probe

Applications

Flexible: select the best hardware configuration for your application (If you already have some components -purchase only what you need and assemble the system) Affordable: up to 50% savings as compared to other commercial instruments Precision: unmatched precision <0.01nm or 0.01% Materials database: extended database (500+ materials) is included Software: flexible, user friendly and powerful software; integrated control/data acquisition and data analysis; any filmstack: no limits on number of layers, support inhomogeneous and thick incoherent layers, surface roughness, multi-sample analysis, etc. Integration: import data from other instruments or integrate over network In situ ready: real-time monitoring or post-mortem analysis Technical support: application and technical support

Virtually any translucent or light absorbing film may be measured: SiO2, SiNx, DLC, Photoresist, Polymer, Polyamide, polySi, nanocrystalline Si, aSi, Si, Parylene,metal oxides,industrial coatings. 1nm - 1mm thickness range Thin-film solar cells: aSi, CIGS, CdT, TCO Semiconductor and dielectric materials (Photoresist, oxides, nitrides, OLED stack) Optical coatings (Anti-Reflection, Hardness coatings, Filters) Liquid Crystal displays (Cell Gaps, ITO, Polyamides) Magnetic media Laser mirrors Thin metal films

Basic Specification

What's in the box

Precision 0.1Å or 0.01% (greater of) s.d. of 100 thickness reading of 100nm SiO2/Si calibration sample Accuracy 0.2% or 10A (greater of) Filmstack dependent Stability 0.2A or 0.02% (greater of) 2 sigma over 20 days (100 measurements daily) on 100nm/Si calibration sample Spot size 3 mm standard, optional down to 3 µm   Sample size from 1 mm

Main unit (includes spectrometer(s), light source, electronics) Reflectance probe Sample table with reflectance probe holder TFCompanion -R software Advanced version (CD and USB dongle (license key) ) Calibration sample (Si or Al depending on the model) Test sample USB cable (connecting main unit to computer) Universal power adapter (110V/220V) Hardcopy of User Manual In addition, MProbe includes following Semiconsoft advantages: Library with over 500 materials and support for parameterized materials Free software updates Application support Hardware upgrade program

System configurations *:

Model	Wavelength range,nm	Spectrometer/Detector	Light Source	Comments
Vis (see brochure)	400-1100	Spectrometer F4,/Si CCD 3600pixels/ ADC-16 bit	Tungsten-Halogen	High-precision measurements Thickness: 15nm-20µm (50µm option)
UVVisSR (see brochure)	200-1100	Spectrometer F4/ Si CCD 3600pixels/16 bits ADC-16 bit	Deuterium/Tungsten-Halogen	Thickness: 1nm -20µm (50µm option)
HRVis	700-1000	Spectrometer F4/ Si CCD 3600 pixes/ADC 16 bit /resolution <0.25nm	Tungsten-Halogen	Thickness: 1um -400µm
NIR	900-1700	F2 Transmission InGaAs PDA 512 pixels,ADC - 16 bit	Tungsten-Halogen	Thickness 100nm-200µm
VisNIR	400-1700	Two spectrometer channels/detectors (F4 Si 3600 pixels CCD and F2 InGaAs 512 pixels PDA) /ADC - 16 bit	Tungsten-Halogen	Thickness 15nm-200µm
UVVis-NIR	200-1700	Two spectrometer channels/detectors (F4 Si 3600 pixels CCD and InGaAs 512) / ADC - 16 bit	Deuterium/Tungsten-Halogen	Thickness: 1nm-200µm
NIR Scan	900 -5000	FTIR spectrometer with MCT detector	Tungsten-Halogen (low CT)	Thickness 100nm - 800um
XT	1590-1650	F2 Transmission /InGaAs PDA 512 pixels,ADC - 16 bit	Tungsten-Halogen	Thickness 10µm - 1mm

* Typical configurations. Other ranges and congifurations are avaialble.