Semiconductor, Biotechnology, Magnetic media, Chemistry, Optical coatings, Polymers; Production and R&D

 

MProbe Thin-film measurement system: Spectroscopic Reflectance and Transmittance

The MProbe series is a thin-film measurement system that uses a fiber optics probe for reflection and fiber optics probe for transmittance. This approach yields a very compact and low-cost system. A careful design of the critical components and measurement optimization algorithms implemented in the software results in remarkably precise and robust instrument.

Small, precise, easy to use and affordable - it is a real workhorse in the R&D lab and in production.

MProbe Measured ranges Chart
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The MProbe is a complete thin-film measurement system.

You'll be ready to start measurements right away - everything is included:spectrometer/ light source unit, fiber optics probe, sample stage, software and reference wafer.

Our extensive materials library has 500+ materials, with easy import/creation of the new materials and support for a wide range of parametrized materials (from Cauchy to Cody-Lorentz) is included.

One-click measurement combines data acquisition (reflection or transmittance spectrum) and data analysis. Everybody is a measurement expert with MProbe!

Of course, we have all the sophisticated tools including sensitivity analysis, error-estimator, simulation, filmstack switching, global optimization, layers and materials linking, etc. for complicated applications development

Reflectance and transmittance spectral data can also be used as a raw measurement (for example, as in spectrophotometer) or a for a wide range of other applications e.g. chemical concentration (we have a range of flow cells), filters and coating testing, etc.

Check MProbe Accessories here.

You can find more details in the following brochures:

Download MProbe Measurement101 pdf ( Basics & Software)

Download Mapping option brochure.pdf

Download Application examples.pdf

Download TFCompanion software brochure.pdf

MProbe UVVis system

MProbe brochures:

Desktop configuration: MProbe brochure pdf

In-situ configuration: MProbeInSitubrochure.pdf

Why use M-Probe
Applications

Flexible: select the best hardware configuration for your application

(If you already have some components -purchase only what you need and assemble the system)

Affordable: up to 50% savings as compared to other commercial instruments

Precision: unmatched precision <0.01nm or 0.01%

Materials database: extended database (500+ materials) is included

Software: flexible, user friendly and powerful software; integrated control/data acquisition and data analysis; any filmstack: no limits on number of layers, support inhomogeneous and thick incoherent layers, surface roughness, multi-sample analysis, etc.

Integration: import data from other instruments or integrate over network

In situ ready: real-time monitoring or post-mortem analysis

Technical support: application and technical support

Virtually any translucent or light absorbing film may be measured: SiO2, SiNx, DLC, Photoresist, Polymer, Polyamide, polySi, nanocrystalline Si, aSi, Si, Parylene,metal oxides,industrial coatings.

1nm - 1mm thickness range

Thin-film solar cells: aSi, CIGS, CdT, TCO

Semiconductor and dielectric materials (Photoresist, oxides, nitrides, OLED stack)

Optical coatings (Anti-Reflection, Hardness coatings, Filters)

Liquid Crystal displays (Cell Gaps, ITO, Polyamides)

Magnetic media

Laser mirrors

Thin metal films

 

Basic Specification
What's in the box
Precision 0.1Å or 0.01% (greater of) s.d. of 100 thickness reading of 100nm SiO2/Si calibration sample
Accuracy 0.2% or 10A (greater of) Filmstack dependent
Stability 0.2A or 0.02% (greater of)

2 sigma over 20 days (100 measurements daily) on 100nm/Si calibration sample

Spot size 3 mm standard, optional down to 3 µm  
Sample size from 1 mm  
  • Main unit (includes spectrometer(s), light source, electronics)
  • Reflectance probe
  • Sample table with reflectance probe holder
  • TFCompanion -R software Advanced version (CD and USB dongle (license key) )
  • Calibration sample (Si or Al depending on the model)
  • Test sample
  • USB cable (connecting main unit to computer)
  • Universal power adapter (110V/220V)
  • Hardcopy of User Manual

In addition, MProbe includes following Semiconsoft advantages:

  • Library with over 500 materials and support for parameterized materials
  • Free software updates
  • Application support
  • Hardware upgrade program

System configurations *:

Model
Wavelength range,nm
Spectrometer/Detector
Light Source
Comments

Vis

(see brochure)

400-1100

Spectrometer F4,/Si CCD 3600pixels/ ADC-16 bit

Tungsten-Halogen

High-precision measurements

Thickness: 15nm-20µm (50µm option)

UVVisSR

(see brochure)

200-1100

Spectrometer F4/ Si CCD 3600pixels/16 bits ADC-16 bit

Deuterium/Tungsten-Halogen

Thickness: 1nm -20µm (50µm option)

HRVis

700-1000

Spectrometer F4/ Si CCD 3600 pixes/ADC 16 bit /resolution <0.25nm

Tungsten-Halogen

Thickness: 1um -400µm

NIR

900-1700

F2 Transmission InGaAs PDA 512 pixels,ADC - 16 bit

Tungsten-Halogen

Thickness 100nm-200µm

VisNIR

400-1700

Two spectrometer channels/detectors (F4 Si 3600 pixels CCD and F2 InGaAs 512 pixels PDA) /ADC - 16 bit

Tungsten-Halogen Thickness 15nm-200µm

UVVis-NIR

200-1700

Two spectrometer channels/detectors (F4 Si 3600 pixels CCD and InGaAs 512) / ADC - 16 bit

Deuterium/Tungsten-Halogen Thickness: 1nm-200µm
NIR Scan 900 -5000 FTIR spectrometer with MCT detector Tungsten-Halogen (low CT) Thickness 100nm - 800um
XT 1590-1650

F2 Transmission /InGaAs PDA 512 pixels,ADC - 16 bit

Tungsten-Halogen Thickness 10µm - 1mm

* Typical configurations. Other ranges and congifurations are avaialble.

 

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