Code

Accessory

Description

Comments

-TO

Transmittance Option

Integrates with Reflectance stage to enable combined Reflectance/Transmittance measurement.

Includes:

-transmittance table
-two collimators
-two fiber optic cables

$750 (Vis -NIR)
$950 (UV-Vis or UV-VISNIR)

Requires SS100 stage.

-LS20

Light source Option
(upgrade)

20W TH fiber coupled with a high-stability light source (instead of standard 5 W TH light source)

$510

Recommended for applications with low-reflectivity in Vis range and for inline metrology.

FL-VIS

Focusing lens VIS

Achromatic relay lens/objective 0.5x, attached to a reflectance probe holder. Effective measurement spot size <200um.

$450

Recommended for non-uniform samples, especially with thick layers.

FL-UV

Focusing lens UVVISNIR

Achromatic triplet lens (CaF2-FS-CaF2), 0.15x.
Effective measurement spot <80 um

$1150

- KM

Kinetic measurement

Software option supports continuous measurement with specified time intervals, real-time display of measured parameter and running statistics. Supports Integration with position sensor (sold separately).

$650

Recommended for insitu and inline measurement.

XYM-[size] mm

XY motorized stage

XY motorized mapping stage
(X, Y travel up to 300mm) with 5 um position precision. The stage is mounted on a solid stand to provide stability in lab or production environment. Samples of different size, thickness and geometry can be accommodated.

6"x 6" - $9500
8"x 8" - $11500
Inquire for more sizes
.

Includes:

-XY motorized stage
-mounting plate
-controller
-cables
-reflectance probe holder
-software upgrade (support for mapping)

-5W-Vis

Visible bulb assembly
(spare)

Tungsten- Halogen, 5W lamp assembly
(10000hrs lifetime)

$85

-20W-Vis

Visible bulb assembly
(spare)

Tungsten- Halogen, 20W lamp assembly
(2000hrs lifetime)

$95

-DeUV

Deuterium lamp assembly
(spare)

D2 30W (see-though) lamp assembly
(2000 hrs)

$850

-R400Vis

Reflectance backscattering probe Vis (400-2200nm)

Fiber bundle (6 illuminating fibers, 1 read fiber) with stainless ferrule and two SMA 905 connectors (to light source and spectrometer).
400um core fibers, Vis-NIR (low OH) fibers: armored and covered with flexible silicon tubing.

$550

-R400UV

Reflectance backscattering probe UV (190-1100nm)

Fiber bundle (UV-solarization resistant fibers) with stainless ferrule and two SMA 905 connectors.
Fibers are 400um core : armored and covered with flexible silicon tubing.

$650

-R400SMA
VIS

Reflectance backscattering probe Vis (400-2200nm)
SMA terminated common leg.

same as -R400Vis, only common leg is terminated with SMA connector

$510

Used for face-down samples measurement
Require face-down attachment. (-FSD)

-R400 SMA UV

Reflectance backscattering probe UV (190-1100nm)

same as -R400UV, only common leg is terminated with SMA connector

$550

Used for face-down samples measurement
Require face-down attachment. (-FSD)

-SS100

Reflectance table/fixture

150mm table with fiber (ferrule) holder. Adjustable height.
(for samples up to 100mm diameter)

$450

-SS300

Reflectance table/fixture

Rectangular 350x350mm table with fiber (ferrule) holder. Adjustable height.
(for samples up to 300mm diameter)

$550

-FSD

Reflectance table (face-down)

150mm reflectance table for "face-down" wafer measurement. Includes SMA adapter

$350

Requires SS100 table and
either R400SMAVIS or R400SMAUV fiber probe.