TFCompanion software: features overview.

Analysis Data Reduction(Regression) Materials Presentation

TFCompanion is a powerful and user friendly software application for thin film analysis and metrology. It combines versatile analytical tools for interpretation of measurements - to determine actual physical parameters of a filmstack (like thickness of the layers and optical properties of materials). It allows simulation and sensitivity analysis to understand better why the things are the way they are. TFCompanion gives the ability to estimate measurement/calculation errors, create and optimize measurement recipes and find tradeoffs between measurement accuracy and throughput TFCompanion is designed from ground up as a flexible workplace/framework that integrate different capabilities to improve your productivity. It has an open architecture that allows easily add new features or integrate TFCompanion into other products.

Following is a brief review of TFCompanion features: please check the latest product brochure for more information.

TFCompanion Main Window

Analysis

• Simulation of parameters (Ellipsometric parameters(D, Y, CosD, TanY,X,Y), Reflectance( Normal, Rp, Rs), Transmittance(Normal, Tp, Ts), Absorbance(Normal, Ap, As) and other parameters (see full list in the UserGuide)
• Error Estimation - enables to estimate repeatability of filmstack parameters measurement. You can optimize measurement recipe and/or select the proper instrument before you do the measurements;
• Sensitivity analysis of the measured parameters (Reflectivity,Ellipsometric parameters, Transmittance, etc.) to physical parameters of the filmstack (thickness of layers,optical constants, etc.).

Analysis of a new filmstack frequently starts with Sensitivity analysis to determine the most sensitive measurement parameters and ranges (Wavelength or Angle-of-Incidence). The next step is to estimate the errors - the most sensitive area does not necessarily give the best repeatability.

Simulation/Sensitivity Dialog ErrorEstimator Dialog

Data Reduction

Optical measurements are indirect, i.e. actually measured parameters are Reflectance, Transmittance, Ellipsometric parameters. To determine physical parameters of the filmstack "an inverse problem" should be solved.. TFCompanion uses Modified Marquardt-Levenberg and Global Modified Marquardt-Levenberg algorithms. This algorithm was selected for unsurpassed speed and robustness.

Calculation Dialog

Materials

TFCompanion supports all commonly used material types:

Tabular	3 components EMA *
Standard Cauchy (dielectrics)	Harmonic( Lorentz) Oscillator
CauchyK, CauchyExponential	Drude-Lorentz Oscillator (metal-like films)
2 components EMA*	Tauc-Lorentz Oscillator (aSi, SiN, SiRN,etc)
Compond-Binary Material (SiGe, etc.)	Cody-Lorentz Oscillator (improvement of Tauc-Lorentz oscillator model)
Exciton model (polymer materials)	Cody-Lorentz-Urbach Oscillator (improvement of Cody-Lorentz oscillator model)

* EMA- Effective-Medium Approximation ( after Bruggeman).

An extensive library of Tabular materials (text files) is included in the distribution. The utility to read material files in SOPRA format is also included. Materials can be easily modified and extended. New parameterized materials can be easily created in the Material dialog. Parameterized materials types (approximations) serve very important role in spectroscopic measurements -- by representing all material spectrum by function with few parameters they reduce significantly the number of parameters that need to be calculated. If material type you would like to use is not currently supported, please let us know and we will add it for you.

Material Editor

Presentation of Results

Results of Analysis and Data reduction can be presented in tabular or graphical form and saved to file in different formats (jpeg, html and ascii) or printed. Both 2D and 3D plots support interactive features - data introspection, limiting range, hiding plot series, changing line style, etc.

Simulation Results (table and Plot) Simulation Plot (3D)

Our Commitment.

If measurement or material file format you use is not supported by TFCompanion we will add it free of charge.

TFCompanion is the most powerful, flexible and intelligent tool for thin-film metrology and analysis. Our goal is to make it the tool of your choice that will increase your productivity and make life at work a bit easier. We selected the best practices and proven methodologies to mitigate sometimes contradicting requirements of R&D and production environment.

TFCompanion continues to evolve, new features are being added and new releases becoming available.