MProbe: thin film measurement system

Small, affordable and reliable, MProbe is a spectral reflectometer/transmittance system that can measure practically any translucent films in 3nm -800 um range. There are several MProbe models with total spectral range from 200nm to 5000nm. Measurements can be done on desktop, insitu (UHV, etc), inline, small or big spot, mapping with motorized XY stage and other options are available. It is well suited for R&D and production measurements. One-click measurement process is smooth and transparent to the user. TFCompanion software is integrated in MProbe system and controls both data acquisition and data analysis It is easy to be a measurement expert with MProbe( read more..)

TFCompanion: data analysis software.

TFCompanion software is a de facto standard for thin-film data analysis for ellipsometry, reflectance and transmittance measurements.Single point measurement, batch, mapping data, imaging data are supported. Researchers and engineers from around the world relying of our software for analysis of thin-film solar, semiconductor, biotechnology, chemical, LCD, magnetic media and many other applications in universities, R&D and production environment. Metrology vendors use it to identify precision improvement, semiconductor fabs use it to qualify metrology equipment, optical coating engineers use it to quickly identify the problems, in-situ and ex-situ measurements for various applications are enabled by TFCompanion software.

• Several version and capabilties levels are supported: versions from Standard to Imaging; capabilities from Reflectance/Transmittance only and Ellipsometry only, to a combination of both & Imaging Ellipsometry/Reflectometry/Microscopy

• R&D and production environment support: Adminstrator and Operator level interface and functionality.

• Extensive material library (500+ materials) and support of a wide range of parametrized materials types from Cauchy to Cody-Lorentz

From most simple, routine measurements to multilayer, multisample analysis - our software is ready for a challenge( read more...)

Software integration.

TFCompanion has integrated control and data acquisition module and a TCP server. Full network integration and remote command interface are supported. On line (production) or in-situ (vacuum deposition chamber integration) measurements are supported using multiple scenarios.

We welcome custom development and OEM inquiries.

 

Components & Accessories

 

PicoProbe and PicoScan ellipsometer systems.

PicoProbe is a series of spectroscopic(SEXY) and single wavelength ellipsometers(SWEXY) that offers unparalleled precision for most demading R&D applications. PicoScan system is a first truly quantitative Imaging ellipsometer that combines high lateral resolution (<5um) with simultaneos high-precision measurement on millions of points (typically ~ 5m) in few seconds. (read more...)