The MProbe 20 Series: Thin Film Thickness Measurement and more


The MProbe 20 series is a desktop system for thin-film thickness measurement. The measurement is based on spectroscopic reflectance and uses fiber optics retro-reflecting probe. This approach yields a compact, easy to use and affordable system.

The system is user friendly and easy to setup – you will be ready to start measurements right away. Everything is included for samples measurement: spectrometer/ light source (main unit), fiber optics probe, sample stage, software, calibration/reference sample.

Our extensive materials library has 500+ materials. New materials can be easily imported or created/added to the library. Support for a wide range of parameterized materials (from Cauchy to Tauc-Lorentz, etc.) is included.

One-click measurement combines data acquisition and data analysis. Everybody is a measurement expert with MProbe!

For advanced users, we have all the sophisticated tools including sensitivity analysis, error-estimator, simulation, filmstack switching, global optimization, layers and materials linking, etc. that can be used for advanced applications development

Reflectance and transmittance spectral data can also be used as a raw measurement (for example, as in spectrophotometer) or a for a wide range of other applications e.g. chemical concentration (we have a range of flow cells), filters and coating testing, etc.


Why use MProbe
Applications

Flexible: select the best hardware configuration for your application

Affordable: up to 50% savings as compared to other commercial instruments

Precision: unmatched precision <0.01nm or 0.01%

Materials database: extended database (500+ materials) is included

Software: flexible, user friendly and powerful software; integrated control/data acquisition and data analysis; any filmstack: no limits on number of layers, support inhomogeneous and thick incoherent layers, surface roughness, multi-sample analysis, etc.

Integration: several integration options are available: Modbus TCP, OPC (DA 2.0/3.0), custom options

Technical support: application and technical support

Practically any translucent or low-absorbing film can be measured: SiO2, SiNx, DLC, Photoresist, Polymer, Polyamide, polySi, nanocrystalline Si, aSi, Si, Parylene, industrial coatings.

1nm-1000µm thickness range

Thin-film solar cells: aSi, CIGS, CdT, TCO

Semiconductor and dielectric materials (Photoresist, oxides, nitrides, OLED stack)

Optical coatings (Anti-Reflection, Hard coatings, Filters)

Liquid Crystal displays (Cell Gaps, ITO, Polyamides)

Magnetic media, laser mirrors, thin metal films

What’s in the box?

  • Main unit (includes spectrometer(s), light source, electronics)
  • Reflectance probe
  • Sample table with reflectance probe holder
  • TFCompanion -R software Advanced version (USB dongle (license key), Software, user guide and other materials on USB memory stick )
  • Calibration set: reference wafer (Si or Al depending on the model, or/and Quartz plate (optional)) and black absorber/pad
  • Test sample- 200nm oxide wafer
  • USB cable (connecting main unit to computer)
  • Universal power adapter (110V/220V)

In addition, MProbe includes the following Semiconsoft advantages:

  • Library with over 500 materials and support for parameterized materials
  • 12 months of free software updates and application support
  • Hardware upgrade program


System model can be selected based on the required thickness and/or wavelength range.Custom configurations that combine features of different models are available on request. Please let us know your application and we will offer a solution


Basic Specification
PrecisionAccuracyStabilitySpot Size Sample Size
0.1Å or 0.01% (greater of)0.2% or 10A (greater of)stability 0.2A or 0.02% (greater of)2mm standard (optional to 20µm) from 4mm
s.d. of 100 thickness reading of 100nm SiO2/Si calibration samplefilmstack dependent2 sigma over 20 days (100 measurements daily) on 100nm/Si calibration sample

System Configurations
ModelWavelength range(nm)Spectrometer/DetectorLightsourceThicknessPDF
Vis400-1100Spectrometer F4/Si CCD 3600 pixels/ ADC- 16 bitTungsten-Halogen 15nm- 75µm Vis Brochure
UVVisSR200-1100Spectrometer F4/Si CCD 2048 pixels/ ADC- 16 bitDeuterium/Tungsten-Halogen1nm-75µm UVVis Brochure
HRVis700-1000Spectrometer F4/Si CCD 2048 pixels/ ADC- 16 bit /resolution Tungsten-Halogen 1µm-400µm
UVVis-RT200-1000 F4/Si CCD 2048 pixels/ ADC 16 bit/Optical Switch(Reflectance & Transmittance) Tungsten-Halogen 1nm-75µm UVVisRT Brochure
NIR 900-1700F2 Spectrometer InGaAs CCD 512 pixels: ADC- 16 bit Tungsten-Halogen 50nm- 85µm NIR Brochure
VisNIR 400-1700 Two spectrometer channels/ detectors (F4 Si 3600 pixels CCD and F2 InGaAs 512 pixels PDA) /ADC- 16 bit Tungsten-Halogen 10nm- 85µm
UVVis-NIR 200-1700 Two spectrometer channels/ detectors (F4 Si 3600 pixels CCD and InGaAs 512)/ ADC – 16 bit Deuterium/Tungsten-Halogen 1nm-85µm
VisXT 800-870 F4 spectrometer/Si 2048 pixels CCDTungsten-Halogen 10µm-1400 µm

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