MProbe UVVis thickness measurement systems

MPROBE UVVIS THIN FILM MEASUREMENT SYSTEMS

MProbe UVVisF or MProbe UVVisSR?

There are two MProbeUVVis thin film measurement systems: MProbe UVVis and MProbe UVVisF. Both systems cover 200nm -1000nm wavelength range and can measure thickness and optical constants of thin films. These systems are using different light source and mode of operation. They have advantages are disadvantages depending on application requirements.

MProbe UVVisSR system uses 30W short-arc (see-thru) Deuterium lamp and 20W Tungsten-Halogen lamp. These lamps are placed in tandem and, together, they cover UVVis range. Both Deuterium and Tungsten- halogen lamp are high stability continuous light source. This means that longer integration time can be used to improve precision in case of a low intensity signal.

MProbe UVVisF system uses 20W Xe flash lamp. The lamp strobes (< 2 µs) are synchronized with the data acquisition. Short light strobes and gated acquisition works well in high ambient light environment like deposition chambers. Short measurement time is also useful for inline measurement and monitoring other kinetic processes.

MProbe UVVisF thin film measurement system using 20 W Xe flash lamp

MProbe UVVisF Brochure

MProbe UVVisSR thin film measurement system

MProbe UVVis thin film measurment system using 30W Deuterium lamp and 20W Tungsten-halogen lamp in see-thru/tandem configuration

mprobe uvvis brochure

MProbeUvV thickness measurement system reflection from Si wafer

MProbe UVVisF thin-film measurement system. Raw reflectance from bare Si wafer. Spectrum intensity is weighted heavily in UV part of the spectrum

MProbe UVVisSR thin film measurement system. Reflection from Si wafer

MProbe UVVis thin film measurement system. Raw reflectance from bare Si wafer. The intensity is balanced between UV and Vis parts of the spectrum

Light intensity comparison

20W Xe flash lamp has an equivalent ~ 0.5W (500mJ in <2µs pulse). 30 W Deuterium lamp has an equivalent of~ 0.6W in 20ms integration time measurement. Both lamps have approximately the same light intensity at short wavelengths. But MProbe UVVis light source has additional 20W tungsten-halogen lamp that add intensity to the Vis part of the spectrum.

MProbe UVVisF advantages:

Short fixed measurement time(< 1ms) and constant/ predictable measurement frequency. Typically, 10Hz – 20Hz.
High intensity at shorter wavelengths
Long lifetime (> 20,000 hrs at 10 Hz)
Can be used in high ambient light environment due to gated acquisition
Can be used for inline monitoring other kinetic processes due to short measurement time

MProbe UVVis advantages:

Balanced UVVis spectrum, controlled by two independent lamps
Smooth spectrum allows measurement of thicker films
Can measure low reflectivity using longer integration time
Well suited for desktop configuration

WHAT IS IN THE BOX

Main unit (includes spectrometer, light source)
Fiberoptics reflectance probe
Sample stage SH200A with focusing lens (MProbe 20 configuration)
TFCompanion -RA software, USB dongle(license key), USB memory stick with softwar distribution,User Guide and other materials
Calibration set (bare Si wafer and Quartz plate ) and black absorber
Test sample 200nm Si oxide
USB cable
24VDC power supply adapter (110/220V)

BASIC SPECIFICATION (UVVis and UVVisF):

Wavelength range: 200nm -1000nm
F3 astigmatism-correted spectrometer with 2018 pixels CMOS detector
Wavelength resolution: < 2nm
Precision: <0.01nm or 0.01%
Accuracy: <1nm or 0.2% (filmstack dependent)
Stability:< 0.02nm or 0.2%
Spot size: <1mm

OPTION

DESCRIPTION

COMMENTS

– MOD

TCP-IP remote control (based on modbus protocol)

Software plugin to allow measurement control from the 3rd party software

MProbe UVVisF or MProbe UVVisSR?

MProbe UVVis advantages:

WHAT IS IN THE BOX

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