{"id":7380,"date":"2021-02-11T20:24:02","date_gmt":"2021-02-12T01:24:02","guid":{"rendered":"https:\/\/www.semiconsoft.com\/wp2\/?page_id=7380"},"modified":"2021-04-15T21:32:56","modified_gmt":"2021-04-16T01:32:56","slug":"small-spot-thickness-measurement","status":"publish","type":"page","link":"https:\/\/www.semiconsoft.com\/wp2\/small-spot-thickness-measurement\/","title":{"rendered":"Small Spot thickness measurement"},"content":{"rendered":"<div  class=\"tatsu-rk5zAQ7-u tatsu-section  tatsu-bg-overlay   tatsu-clearfix\" data-title=\"\"  data-headerscheme=\"background--dark\"><div class='tatsu-section-pad clearfix' data-padding='{\"d\":\"10px 0px 20px 0px\"}' data-padding-top='10px'><div class=\"tatsu-row-wrap  tatsu-wrap tatsu-row-one-col tatsu-row-has-one-cols tatsu-medium-gutter tatsu-reg-cols  tatsu-clearfix tatsu-Syg9fR77ZO\" ><div  class=\"tatsu-row \" ><div  class=\"tatsu-column  tatsu-bg-overlay tatsu-one-col tatsu-column-image-none tatsu-column-effect-none  tatsu-HyZcMCQ7bd\"  data-parallax-speed=\"0\" style=\"\"><div class=\"tatsu-column-inner \" ><div class=\"tatsu-column-pad-wrap\"><div class=\"tatsu-column-pad\" ><div  class=\"tatsu-module tatsu-inline-text clearfix tatsu-HyG9zA7mWO   \" ><style>.tatsu-HyG9zA7mWO .tatsu-inline-text-inner{width: 100%;text-align: center;background-color: rgba(74,144,226,1);padding: 10px 0px 10px 0px;}.tatsu-HyG9zA7mWO.tatsu-inline-text{margin: 50px 0px 30px 0px;}.tatsu-HyG9zA7mWO.tatsu-inline-text .tatsu-inline-text-inner *{font-family : Arial, Helvetica, sans-serif;font-weight : 700;font-size : 33px;}@media only screen and (max-width: 767px) {.tatsu-HyG9zA7mWO .tatsu-inline-text-inner{width: 100%;}}<\/style><div class=\"tatsu-inline-text-inner tatsu-align-center\">\n<p><span class=\"swatch-white\">\u00a0THICKNESS MEASUREMENT IN SMALL SPOT <\/span>\u00a0\u00a0<\/p>\n<\/div><\/div><\/div><\/div><div class = \"tatsu-column-bg-image-wrap\"><div class = \"tatsu-column-bg-image tatsu-bg-lazyload\" data-src = \"\"><\/div><\/div><div class=\"tatsu-overlay tatsu-column-overlay tatsu-animate-none\" ><\/div><\/div><style>.tatsu-row > .tatsu-HyZcMCQ7bd.tatsu-column{width: 100%;}.tatsu-HyZcMCQ7bd.tatsu-column > .tatsu-column-inner > .tatsu-column-overlay{mix-blend-mode: normal;}.tatsu-HyZcMCQ7bd > .tatsu-column-inner > .tatsu-top-divider{z-index: 9999;}.tatsu-HyZcMCQ7bd > .tatsu-column-inner > .tatsu-bottom-divider{z-index: 9999;}.tatsu-HyZcMCQ7bd > .tatsu-column-inner > .tatsu-left-divider{z-index: 9999;}.tatsu-HyZcMCQ7bd > .tatsu-column-inner > .tatsu-right-divider{z-index: 9999;}@media only screen and (max-width:1377px) {.tatsu-row > .tatsu-HyZcMCQ7bd.tatsu-column{width: 100%;}}@media only screen and (min-width:768px) and (max-width: 1024px) {.tatsu-row > .tatsu-HyZcMCQ7bd.tatsu-column{width: 100%;}}@media only screen and (max-width: 767px) {.tatsu-row > .tatsu-HyZcMCQ7bd.tatsu-column{width: 100%;}}<\/style><\/div><\/div><\/div><\/div><div class=\"tatsu-section-background-wrap\"><div class = \"tatsu-section-background tatsu-bg-lazyload\" data-src = \"\"><\/div><\/div><div class=\"tatsu-overlay tatsu-section-overlay\"><\/div><style>.tatsu-rk5zAQ7-u .tatsu-section-pad{padding: 10px 0px 20px 0px;}.tatsu-rk5zAQ7-u .tatsu-section-offset-wrap{transform: translateY(-0px);}.tatsu-rk5zAQ7-u > .tatsu-bottom-divider{z-index: 9999;}.tatsu-rk5zAQ7-u > .tatsu-top-divider{z-index: 9999;}.tatsu-rk5zAQ7-u .tatsu-section-overlay{mix-blend-mode: normal;}<\/style><\/div><div  class=\"tatsu-S1Q9M077Zu tatsu-section    tatsu-clearfix\" data-title=\"\"  data-headerscheme=\"background--dark\"><div class='tatsu-section-pad clearfix' data-padding='{\"d\":\"0px 0px 0px 0px\"}' data-padding-top='0px'><div class=\"tatsu-row-wrap  tatsu-wrap tatsu-row-has-one-half tatsu-row-has-two-cols tatsu-medium-gutter tatsu-reg-cols  tatsu-clearfix tatsu-HkN9z0m7Z_\" ><div  class=\"tatsu-row \" ><div  class=\"tatsu-column  tatsu-column-no-bg tatsu-one-half tatsu-column-align-middle tatsu-column-image-none tatsu-column-effect-none  tatsu-ByBcfRX7b_\"  data-parallax-speed=\"0\" style=\"\"><div class=\"tatsu-column-inner \" ><div class=\"tatsu-column-pad-wrap\"><div class=\"tatsu-column-pad\" ><div  class=\"tatsu-single-image tatsu-module align-center be-shadow-light tatsu-image-lazyload tatsu-external-image tatsu-B1U5zCQmWu  \" ><div class=\"tatsu-single-image-inner \" style=\"\" ><div class = \"tatsu-single-image-padding-wrap\" style = \"\" ><\/div><a class = \"mfp-image\" href = \"https:\/\/i0.wp.com\/www.semiconsoft.com\/wp2\/wp-content\/uploads\/2021\/02\/NA_diagram.png?fit=600%2C293&#038;ssl=1\" ><img class = \"tatsu-gradient-border\" data-src = \"https:\/\/i0.wp.com\/www.semiconsoft.com\/wp2\/wp-content\/uploads\/2021\/02\/NA_diagram.png?fit=600%2C293&ssl=1\" alt =\" \"  src =\"data:image\/png;base64,iVBORw0KGgoAAAANSUhEUgAAAAEAAAABCAQAAAC1HAwCAAAAC0lEQVR42mNkYAAAAAYAAjCB0C8AAAAASUVORK5CYII=\"  \/><\/a><\/div><style>.tatsu-B1U5zCQmWu{margin: 0px 0px 0px 0px;}.tatsu-B1U5zCQmWu .tatsu-single-image-inner{border-style: solid;max-width: 100%;}.tatsu-B1U5zCQmWu.tatsu-single-image{transform: translate3d(0px,0px, 0);}<\/style><\/div><div  class=\"tatsu-module tatsu-inline-text clearfix tatsu-S1wqzRmm-_   \" ><style>.tatsu-S1wqzRmm-_ .tatsu-inline-text-inner{width: 100%;text-align: left;}@media only screen and (max-width: 767px) {.tatsu-S1wqzRmm-_ .tatsu-inline-text-inner{width: 100%;}}<\/style><div class=\"tatsu-inline-text-inner tatsu-align-center\">\n<p>Fig. 1 Smal spot measurment with large numerical aperture (NA)\u00a0<\/p>\n<\/div><\/div><div  class=\"tatsu-single-image tatsu-module align-center tatsu-image-lazyload tatsu-external-image tatsu-ryd5M0mQZO  \" ><div class=\"tatsu-single-image-inner \" style=\"\" ><div class = \"tatsu-single-image-padding-wrap\" style = \"\" ><\/div><a class = \"mfp-image\" href = \"https:\/\/i0.wp.com\/www.semiconsoft.com\/wp2\/wp-content\/uploads\/2021\/02\/200nm_NA_effect.png?fit=288%2C195&#038;ssl=1\" ><img class = \"tatsu-gradient-border\" data-src = \"https:\/\/i0.wp.com\/www.semiconsoft.com\/wp2\/wp-content\/uploads\/2021\/02\/200nm_NA_effect.png?fit=288%2C195&ssl=1\" alt =\" \"  src =\"data:image\/png;base64,iVBORw0KGgoAAAANSUhEUgAAAAEAAAABCAQAAAC1HAwCAAAAC0lEQVR42mNkYAAAAAYAAjCB0C8AAAAASUVORK5CYII=\"  \/><\/a><\/div><style>.tatsu-ryd5M0mQZO .tatsu-single-image-inner{border-style: solid;max-width: 100%;}.tatsu-ryd5M0mQZO.tatsu-single-image{transform: translate3d(0px,0px, 0);}<\/style><\/div><div  class=\"tatsu-module tatsu-inline-text clearfix tatsu-rkYqf0m7Wu   \" ><style>.tatsu-rkYqf0m7Wu .tatsu-inline-text-inner{width: 100%;text-align: left;}@media only screen and (max-width: 767px) {.tatsu-rkYqf0m7Wu .tatsu-inline-text-inner{width: 100%;}}<\/style><div class=\"tatsu-inline-text-inner tatsu-align-center\">\n<p>\u00a0Fig.2 The effect of large NA on reflectance spectrum for 200nm oxide measurement. Lines represent: 0, +-30deg(NA=0.5), +-50deg(NA=0.76),+-70 deg(NA=94) and +-90 deg(NA=1)\u00a0<\/p>\n<\/div><\/div><div  class=\"tatsu-single-image tatsu-module tatsu-image-lazyload tatsu-external-image tatsu-SJqS6L7bd  \" ><div class=\"tatsu-single-image-inner \" style=\"\" ><div class = \"tatsu-single-image-padding-wrap\" style = \"\" ><\/div><img class = \"tatsu-gradient-border\" data-src = \"https:\/\/i2.wp.com\/www.semiconsoft.com\/wp2\/wp-content\/uploads\/2021\/02\/2um_NA_effect.png?fit=288%2C195&ssl=1\" alt =\" \"  src =\"data:image\/png;base64,iVBORw0KGgoAAAANSUhEUgAAAAEAAAABCAQAAAC1HAwCAAAAC0lEQVR42mNkYAAAAAYAAjCB0C8AAAAASUVORK5CYII=\"  \/><\/div><style>.tatsu-SJqS6L7bd .tatsu-single-image-inner{border-style: solid;max-width: 100%;}.tatsu-SJqS6L7bd.tatsu-single-image{transform: translate3d(0px,0px, 0);}<\/style><\/div><div  class=\"tatsu-module tatsu-inline-text clearfix tatsu-SkIcp8mb_   \" ><style>.tatsu-SkIcp8mb_ .tatsu-inline-text-inner{width: 100%;text-align: left;}@media only screen and (max-width: 767px) {.tatsu-SkIcp8mb_ .tatsu-inline-text-inner{width: 100%;}}<\/style><div class=\"tatsu-inline-text-inner tatsu-align-center\">\n<p><span style=\"font-size: 17px; background-color: #ffffff;\">Fig.3 The effect of large NA on reflectance spectrum for 2000nm oxide measurement. Lines represent: 0, +-30deg(NA=0.5), +-50deg(NA=0.76),+-70 deg(NA=94) and +-90 deg(NA=1)\u00a0<\/span><\/p>\n<\/div><\/div><\/div><\/div><div class = \"tatsu-column-bg-image-wrap\"><div class = \"tatsu-column-bg-image tatsu-bg-lazyload\" data-src = \"\"><\/div><\/div><\/div><style>.tatsu-row > .tatsu-ByBcfRX7b_.tatsu-column{width: 36.3%;}.tatsu-ByBcfRX7b_.tatsu-column > .tatsu-column-inner > .tatsu-column-overlay{mix-blend-mode: none;}.tatsu-ByBcfRX7b_ > .tatsu-column-inner > .tatsu-top-divider{z-index: 9999;}.tatsu-ByBcfRX7b_ > .tatsu-column-inner > .tatsu-bottom-divider{z-index: 9999;}.tatsu-ByBcfRX7b_ > .tatsu-column-inner > .tatsu-left-divider{z-index: 9999;}.tatsu-ByBcfRX7b_ > .tatsu-column-inner > .tatsu-right-divider{z-index: 9999;}@media only screen and (max-width: 767px) {.tatsu-row > .tatsu-ByBcfRX7b_.tatsu-column{width: 100%;}}<\/style><\/div><div  class=\"tatsu-column  tatsu-column-no-bg tatsu-one-half tatsu-column-align-middle tatsu-column-image-none tatsu-column-effect-none  tatsu-S1cqGA77ZO\"  data-parallax-speed=\"0\" style=\"\"><div class=\"tatsu-column-inner \" ><div class=\"tatsu-column-pad-wrap\"><div class=\"tatsu-column-pad\" ><div  class=\"tatsu-module tatsu-inline-text clearfix tatsu-S1X8CQ7-d   \" ><style>.tatsu-S1X8CQ7-d .tatsu-inline-text-inner{width: 100%;text-align: left;}@media only screen and (max-width: 767px) {.tatsu-S1X8CQ7-d .tatsu-inline-text-inner{width: 100%;}}<\/style><div class=\"tatsu-inline-text-inner tatsu-align-center\">\n<h4>Thickness measurement with microscope\u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0<\/h4>\n<p>\u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 <span class=\"tatsu-inline-link-style2\">Small spot film thickness<\/span>\u00a0 measurement is, typically, done using microscope objectives with low Numerical Apertures (NA). Most standard microscopes are using high -NA objectives i.e. a larger cone angle of light is striking the sample. High-NA objectives have many advantages: higher resolution, better light collection, etc.\u00a0 But they have some significant downsides when the goal is to measure film thickness.<\/p>\n<h4>High-NA objectives problem<\/h4>\n<p>\u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 The most serious problem is reduced contrast of interferometric signal that is used to determine film thickness. In a high-NA objective, light rays are refracted in the film at different angles (see Fig. 1), as a result, they have paths of different length in the film material. This means that they have different phase differences. Once different light rays are combined and phases are superimposed on the detector &#8211; the contrast between constructive and distructive interference\u00a0 peaks\/valleys is diminished. The severity of this effect depends on the specific filmstack and NA. But, in general, effect increases with the thickness.<\/p>\n<h4>How NA affects the thickness measurement<\/h4>\n<p>\u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0The effect\u00a0 is easy to see on an example of Si oxide measurement. Simulation of the UVVis reflectance spectrum (200-1000nm) for 200nm oxide is shown on Fig.2 It shows gradual degradation of the spectrum with the increase of the NA. But the changes are small and can be easily corrected. However, the same simulation for 2000nm oxide (Fig. 3 ) shows a more significant effect of the NA.<\/p>\n<h4>What is the solution ?\u00a0<\/h4>\n<p>\u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0<a href=\"..\/tfcompanion-thickness-software\/\" target=\"_self\" rel=\"noopener\"><span class=\"\"><span class=\"tatsu-inline-link-style2\">TFCompanion softwar<\/span>e<\/span><\/a> has an option to correct for high NA effects (Fig. 4). However, if the interference signal is already weakened due to other artifacts (scattering, thickness non-uniformity, etc.) &#8211; the NA effect can make interence fringes practically disappear and, in this case, software correction cannot help. Use of objectives needs to be evaluated based on application requirements. If possible, it is always better to use low NA objectives. Low NA (ideally NA< 0.5) has a very small effect on measured spectra, practically, in all applications.\u00a0<\/p>\n<\/div><\/div><\/div><\/div><div class = \"tatsu-column-bg-image-wrap\"><div class = \"tatsu-column-bg-image tatsu-bg-lazyload\" data-src = \"\"><\/div><\/div><\/div><style>.tatsu-row > .tatsu-S1cqGA77ZO.tatsu-column{width: 63.7%;}.tatsu-S1cqGA77ZO.tatsu-column > .tatsu-column-inner > .tatsu-column-overlay{mix-blend-mode: none;}.tatsu-S1cqGA77ZO > .tatsu-column-inner > .tatsu-top-divider{z-index: 9999;}.tatsu-S1cqGA77ZO > .tatsu-column-inner > .tatsu-bottom-divider{z-index: 9999;}.tatsu-S1cqGA77ZO > .tatsu-column-inner > .tatsu-left-divider{z-index: 9999;}.tatsu-S1cqGA77ZO > .tatsu-column-inner > .tatsu-right-divider{z-index: 9999;}@media only screen and (max-width: 767px) {.tatsu-row > .tatsu-S1cqGA77ZO.tatsu-column{width: 100%;}}<\/style><\/div><\/div><\/div><\/div><div class=\"tatsu-section-background-wrap\"><div class = \"tatsu-section-background tatsu-bg-lazyload\" data-src = \"\"><\/div><\/div><style>.tatsu-S1Q9M077Zu.tatsu-section{background-color: rgba(255,255,255,1);}.tatsu-S1Q9M077Zu > .tatsu-bottom-divider{z-index: 9999;}.tatsu-S1Q9M077Zu > .tatsu-top-divider{z-index: 9999;}<\/style><\/div><div  class=\"tatsu-S1n5GRQQWO tatsu-section    tatsu-clearfix\" data-title=\"\"  data-headerscheme=\"background--dark\"><div class='tatsu-section-pad clearfix' data-padding='{\"d\":\"7px 0px 43px 0px\"}' data-padding-top='7px'><\/div><div class=\"tatsu-section-background-wrap\"><div class = \"tatsu-section-background tatsu-bg-lazyload\" data-src = \"\"><\/div><\/div><style>.tatsu-S1n5GRQQWO.tatsu-section{background-color: rgba(255,255,255,1);}.tatsu-S1n5GRQQWO .tatsu-section-pad{padding: 7px 0px 43px 0px;}.tatsu-S1n5GRQQWO > .tatsu-bottom-divider{z-index: 9999;}.tatsu-S1n5GRQQWO > .tatsu-top-divider{z-index: 9999;}<\/style><\/div><div  class=\"tatsu-ryrg9fCQmbu tatsu-section  tatsu-bg-overlay   tatsu-clearfix\" data-title=\"\"  data-headerscheme=\"background--dark\"><div class='tatsu-section-pad clearfix' data-padding='{\"d\":\"0px 0px 0px 0px\"}' data-padding-top='0px'><div class=\"tatsu-row-wrap  tatsu-wrap tatsu-row-has-one-half tatsu-row-has-two-cols tatsu-medium-gutter tatsu-reg-cols  tatsu-clearfix tatsu-rkIgcfCmQWu\" ><div  class=\"tatsu-row \" ><div  class=\"tatsu-column  tatsu-bg-overlay tatsu-one-half tatsu-column-image-none tatsu-column-effect-none  tatsu-ryPg9GA7Xbu\"  data-parallax-speed=\"0\" style=\"\"><div class=\"tatsu-column-inner \" ><div class=\"tatsu-column-pad-wrap\"><div class=\"tatsu-column-pad\" ><div  class=\"tatsu-single-image tatsu-module tatsu-image-lazyload tatsu-external-image tatsu-ryOg5zAm7bu  \" ><div class=\"tatsu-single-image-inner \" style=\"\" ><div class = \"tatsu-single-image-padding-wrap\" style = \"\" ><\/div><a class = \"mfp-image\" href = \"https:\/\/i1.wp.com\/www.semiconsoft.com\/wp2\/wp-content\/uploads\/2020\/02\/MSP_Front-View.png?fit=596%2C747&#038;ssl=1\" ><img class = \"tatsu-gradient-border\" data-src = \"https:\/\/i1.wp.com\/www.semiconsoft.com\/wp2\/wp-content\/uploads\/2020\/02\/MSP_Front-View.png?fit=596%2C747&ssl=1\" alt =\" \"  src =\"data:image\/png;base64,iVBORw0KGgoAAAANSUhEUgAAAAEAAAABCAQAAAC1HAwCAAAAC0lEQVR42mNkYAAAAAYAAjCB0C8AAAAASUVORK5CYII=\"  \/><\/a><\/div><style>.tatsu-ryOg5zAm7bu .tatsu-single-image-inner{border-style: solid;max-width: 100%;}.tatsu-ryOg5zAm7bu.tatsu-single-image{transform: translate3d(0px,0px, 0);}<\/style><\/div><\/div><\/div><div class = \"tatsu-column-bg-image-wrap\"><div class = \"tatsu-column-bg-image tatsu-bg-lazyload\" data-src = \"\"><\/div><\/div><div class=\"tatsu-overlay tatsu-column-overlay tatsu-animate-none\" ><\/div><\/div><style>.tatsu-row > .tatsu-ryPg9GA7Xbu.tatsu-column{width: 47.3%;}.tatsu-ryPg9GA7Xbu.tatsu-column > .tatsu-column-inner > .tatsu-column-overlay{mix-blend-mode: normal;}.tatsu-ryPg9GA7Xbu > .tatsu-column-inner > .tatsu-top-divider{z-index: 9999;}.tatsu-ryPg9GA7Xbu > .tatsu-column-inner > .tatsu-bottom-divider{z-index: 9999;}.tatsu-ryPg9GA7Xbu > .tatsu-column-inner > .tatsu-left-divider{z-index: 9999;}.tatsu-ryPg9GA7Xbu > .tatsu-column-inner > .tatsu-right-divider{z-index: 9999;}@media only screen and (max-width:1377px) {.tatsu-row > .tatsu-ryPg9GA7Xbu.tatsu-column{width: 50%;}}@media only screen and (min-width:768px) and (max-width: 1024px) {.tatsu-row > .tatsu-ryPg9GA7Xbu.tatsu-column{width: 50%;}}@media only screen and (max-width: 767px) {.tatsu-row > .tatsu-ryPg9GA7Xbu.tatsu-column{width: 100%;}}<\/style><\/div><div  class=\"tatsu-column  tatsu-bg-overlay tatsu-one-half tatsu-column-image-none tatsu-column-effect-none  tatsu-HJYlcf0mmbd\"  data-parallax-speed=\"0\" style=\"\"><div class=\"tatsu-column-inner \" ><div class=\"tatsu-column-pad-wrap\"><div class=\"tatsu-column-pad\" ><div  class=\"tatsu-single-image tatsu-module align-center tatsu-image-lazyload tatsu-external-image tatsu-HyhRp8QZd  \" ><div class=\"tatsu-single-image-inner \" style=\"\" ><div class = \"tatsu-single-image-padding-wrap\" style = \"\" ><\/div><a class = \"mfp-image\" href = \"https:\/\/i1.wp.com\/www.semiconsoft.com\/wp2\/wp-content\/uploads\/2021\/02\/NA_correction-e1613085789851.png?fit=288%2C192&#038;ssl=1\" ><img class = \"tatsu-gradient-border\" data-src = \"https:\/\/i1.wp.com\/www.semiconsoft.com\/wp2\/wp-content\/uploads\/2021\/02\/NA_correction-e1613085789851.png?fit=288%2C192&ssl=1\" alt =\" \"  src =\"data:image\/png;base64,iVBORw0KGgoAAAANSUhEUgAAAAEAAAABCAQAAAC1HAwCAAAAC0lEQVR42mNkYAAAAAYAAjCB0C8AAAAASUVORK5CYII=\"  \/><\/a><\/div><style>.tatsu-HyhRp8QZd .tatsu-single-image-inner{border-style: solid;max-width: 100%;}.tatsu-HyhRp8QZd.tatsu-single-image{transform: translate3d(0px,0px, 0);}<\/style><\/div><div  class=\"tatsu-module tatsu-inline-text clearfix tatsu-SJMGRLQZu   \" ><style>.tatsu-SJMGRLQZu .tatsu-inline-text-inner{width: 100%;text-align: left;}@media only screen and (max-width: 767px) {.tatsu-SJMGRLQZu .tatsu-inline-text-inner{width: 100%;}}<\/style><div class=\"tatsu-inline-text-inner tatsu-align-center\">\n<p><span style=\"font-size: 17px; background-color: #ffffff;\">Fig. 4 Correcting NA effects in TFCompanion.\u00a0 \u00a0TFCompanion has an option to set NA of the measurement in Advance Tab (main screen) &#8211; this will include NA correction in the calculations during the curve fitting (for FFT correction is normally not needed)<\/span><\/p>\n<\/div><\/div><div  class=\"tatsu-module tatsu-inline-text clearfix tatsu-SJoCeLQ-u   \" ><style>.tatsu-SJoCeLQ-u .tatsu-inline-text-inner{width: 100%;text-align: left;}@media only screen and (max-width: 767px) {.tatsu-SJoCeLQ-u .tatsu-inline-text-inner{width: 100%;}}<\/style><div class=\"tatsu-inline-text-inner tatsu-align-center\">\n<p><span class=\"tatsu-inline-link-style2\"><a href=\"https:\/\/www.semiconsoft.com\/wp2\/film-thickness-measurement-msp-mprobe40\/\" target=\"_blank\" rel=\"noopener\"><span class=\"\"><a href=\"..\/film-thickness-measurement-msp-mprobe40\/\" target=\"_blank\" rel=\"noopener\"><span style=\"color: #1137a0;\">MProbe 40 MSP syste<\/span><\/a><\/span><span style=\"color: #1137a0;\">m<\/span><\/a><\/span> uses long-working distance objectives with NA&lt;0.55. This minimizes degradation of the measured signal for, practically, all filmstacks. In addition, long working distance makes it more comfortable to navigate to measurement location, even without switching to a low magnification objective.&nbsp;<\/p>\n<\/div><\/div><div  class=\"tatsu-module tatsu-normal-button tatsu-button-wrap   tatsu-SJoxcfRQXW_   \"><a class=\"tatsu-shortcode mediumbtn tatsu-button left-icon circular   bg-animation-none  \" href=\"https:\/\/www.semiconsoft.com\/wp2\/film-thickness-measurement-msp-mprobe40\/\" style= \"\"  aria-label=\"Read more about MProbe MSP\" data-gdpr-atts={} >Read more about MProbe MSP<\/a><style>.tatsu-SJoxcfRQXW_ .tatsu-button{background-color: rgba(34,147,215,1);color: #ffffff ;}<\/style><\/div><\/div><\/div><div class = \"tatsu-column-bg-image-wrap\"><div class = \"tatsu-column-bg-image tatsu-bg-lazyload\" data-src = \"\"><\/div><\/div><div class=\"tatsu-overlay tatsu-column-overlay tatsu-animate-none\" ><\/div><\/div><style>.tatsu-row > .tatsu-HJYlcf0mmbd.tatsu-column{width: 52.7%;}.tatsu-HJYlcf0mmbd.tatsu-column > .tatsu-column-inner > .tatsu-column-overlay{mix-blend-mode: normal;}.tatsu-HJYlcf0mmbd > .tatsu-column-inner > .tatsu-top-divider{z-index: 9999;}.tatsu-HJYlcf0mmbd > .tatsu-column-inner > .tatsu-bottom-divider{z-index: 9999;}.tatsu-HJYlcf0mmbd > .tatsu-column-inner > .tatsu-left-divider{z-index: 9999;}.tatsu-HJYlcf0mmbd > .tatsu-column-inner > .tatsu-right-divider{z-index: 9999;}@media only screen and (max-width:1377px) {.tatsu-row > .tatsu-HJYlcf0mmbd.tatsu-column{width: 50%;}}@media only screen and (min-width:768px) and (max-width: 1024px) {.tatsu-row > .tatsu-HJYlcf0mmbd.tatsu-column{width: 50%;}}@media only screen and (max-width: 767px) {.tatsu-row > .tatsu-HJYlcf0mmbd.tatsu-column{width: 100%;}}<\/style><\/div><\/div><\/div><\/div><div class=\"tatsu-section-background-wrap\"><div class = \"tatsu-section-background tatsu-bg-lazyload\" data-src = \"\"><\/div><\/div><div class=\"tatsu-overlay tatsu-section-overlay\"><\/div><style>.tatsu-ryrg9fCQmbu .tatsu-section-offset-wrap{transform: translateY(-0px);}.tatsu-ryrg9fCQmbu > .tatsu-bottom-divider{z-index: 9999;}.tatsu-ryrg9fCQmbu > .tatsu-top-divider{z-index: 9999;}.tatsu-ryrg9fCQmbu .tatsu-section-overlay{mix-blend-mode: normal;}<\/style><\/div>\n","protected":false},"excerpt":{"rendered":"<p><a href=\"https:\/\/www.semiconsoft.com\/wp2\/small-spot-thickness-measurement\/\" class=\"exp-read-more exp-read-more-dots\">&#8230;<\/a><\/p>\n","protected":false},"author":1,"featured_media":7386,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"footnotes":""},"class_list":["post-7380","page","type-page","status-publish","has-post-thumbnail","hentry"],"yoast_head":"<!-- This site is optimized with the Yoast SEO Premium plugin v27.4 (Yoast SEO v27.4) - https:\/\/yoast.com\/product\/yoast-seo-premium-wordpress\/ -->\n<title>Small Spot thickness measurement - Semiconsoft,Inc.<\/title>\n<meta name=\"description\" content=\"Small spot film thickness measurement is affected by lens NA. 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