{"id":7654,"date":"2021-08-29T20:48:18","date_gmt":"2021-08-30T00:48:18","guid":{"rendered":"https:\/\/www.semiconsoft.com\/wp2\/?page_id=7654"},"modified":"2021-08-30T10:56:52","modified_gmt":"2021-08-30T14:56:52","slug":"film-thickness-measurement-on-rough-surfaces","status":"publish","type":"page","link":"https:\/\/www.semiconsoft.com\/wp2\/film-thickness-measurement-on-rough-surfaces\/","title":{"rendered":"Film thickness measurement on rough surfaces"},"content":{"rendered":"<div  class=\"tatsu-H1KvnMtZK tatsu-section  tatsu-bg-overlay   tatsu-clearfix\" data-title=\"\"  data-headerscheme=\"background--dark\"><div class='tatsu-section-pad clearfix' data-padding='{\"d\":\"10px 0px 21px 0px\"}' data-padding-top='10px'><div class=\"tatsu-row-wrap  tatsu-wrap tatsu-row-one-col tatsu-row-has-one-cols tatsu-medium-gutter tatsu-reg-cols  tatsu-clearfix tatsu-rkeYDhGKWF\" ><div  class=\"tatsu-row \" ><div  class=\"tatsu-column  tatsu-bg-overlay tatsu-one-col tatsu-column-image-none tatsu-column-effect-none  tatsu-r1WKvhMKZY\"  data-parallax-speed=\"0\" style=\"\"><div class=\"tatsu-column-inner \" ><div class=\"tatsu-column-pad-wrap\"><div class=\"tatsu-column-pad\" ><div  class=\"tatsu-module tatsu-inline-text clearfix tatsu-S1fFD3ztZt   \" ><style>.tatsu-S1fFD3ztZt .tatsu-inline-text-inner{width: 100%;text-align: center;background-color: rgba(74,144,226,1);padding: 10px 0px 10px 0px;}.tatsu-S1fFD3ztZt.tatsu-inline-text{margin: 80px 0px 10px 0px;}.tatsu-S1fFD3ztZt.tatsu-inline-text .tatsu-inline-text-inner *{font-family : Arial, Helvetica, sans-serif;font-weight : 700;font-size : 33px;}@media only screen and (max-width: 767px) {.tatsu-S1fFD3ztZt .tatsu-inline-text-inner{width: 100%;}}<\/style><div class=\"tatsu-inline-text-inner tatsu-align-center\">\n<p><span class=\"swatch-white\">SURFACE ROUGHNESS AND COATING THICKNESS MEASUREMENT <\/span>\u00a0\u00a0<\/p>\n<\/div><\/div><\/div><\/div><div class = \"tatsu-column-bg-image-wrap\"><div class = \"tatsu-column-bg-image tatsu-bg-lazyload\" data-src = \"\"><\/div><\/div><div class=\"tatsu-overlay tatsu-column-overlay tatsu-animate-none\" ><\/div><\/div><style>.tatsu-row > .tatsu-r1WKvhMKZY.tatsu-column{width: 100%;}.tatsu-r1WKvhMKZY.tatsu-column > .tatsu-column-inner > .tatsu-column-overlay{mix-blend-mode: normal;}.tatsu-r1WKvhMKZY > .tatsu-column-inner > .tatsu-top-divider{z-index: 9999;}.tatsu-r1WKvhMKZY > .tatsu-column-inner > .tatsu-bottom-divider{z-index: 9999;}.tatsu-r1WKvhMKZY > .tatsu-column-inner > .tatsu-left-divider{z-index: 9999;}.tatsu-r1WKvhMKZY > .tatsu-column-inner > .tatsu-right-divider{z-index: 9999;}@media only screen and (max-width:1377px) {.tatsu-row > .tatsu-r1WKvhMKZY.tatsu-column{width: 100%;}}@media only screen and (min-width:768px) and (max-width: 1024px) {.tatsu-row > .tatsu-r1WKvhMKZY.tatsu-column{width: 100%;}}@media only screen and (max-width: 767px) {.tatsu-row > .tatsu-r1WKvhMKZY.tatsu-column{width: 100%;}}<\/style><\/div><\/div><\/div><\/div><div class=\"tatsu-section-background-wrap\"><div class = \"tatsu-section-background tatsu-bg-lazyload\" data-src = \"\"><\/div><\/div><div class=\"tatsu-overlay tatsu-section-overlay\"><\/div><style>.tatsu-H1KvnMtZK .tatsu-section-pad{padding: 10px 0px 21px 0px;}.tatsu-H1KvnMtZK .tatsu-section-offset-wrap{transform: translateY(-0px);}.tatsu-H1KvnMtZK > .tatsu-bottom-divider{z-index: 9999;}.tatsu-H1KvnMtZK > .tatsu-top-divider{z-index: 9999;}.tatsu-H1KvnMtZK .tatsu-section-overlay{mix-blend-mode: normal;}<\/style><\/div><div  class=\"tatsu-Sk7tw2fY-Y tatsu-section    tatsu-clearfix\" data-title=\"\"  data-headerscheme=\"background--dark\"><div class='tatsu-section-pad clearfix' data-padding='{\"d\":\"1px 0px 1px 0px\"}' data-padding-top='1px'><div class=\"tatsu-row-wrap  tatsu-wrap tatsu-row-has-one-half tatsu-row-has-two-cols tatsu-medium-gutter tatsu-reg-cols  tatsu-clearfix tatsu-SyEtP3GF-F\" ><div  class=\"tatsu-row \" ><div  class=\"tatsu-column  tatsu-column-no-bg tatsu-one-half tatsu-column-align-middle tatsu-column-image-none tatsu-column-effect-none  tatsu-rkrtPnfKZK\"  data-parallax-speed=\"0\" style=\"\"><div class=\"tatsu-column-inner \" ><div class=\"tatsu-column-pad-wrap\"><div class=\"tatsu-column-pad\" ><div  class=\"tatsu-single-image tatsu-module align-center be-shadow-light tatsu-external-image tatsu-HkIYv2zFbF  \" ><div class=\"tatsu-single-image-inner \" style=\"\" ><div class = \"tatsu-single-image-padding-wrap\" style = \"\" ><\/div><a class = \"mfp-image\" href = \"https:\/\/i0.wp.com\/www.semiconsoft.com\/wp2\/wp-content\/uploads\/2021\/08\/Roughness_effect_scalled.gif?fit=600%2C332&#038;ssl=1\" ><img class = \"tatsu-gradient-border\" src = \"https:\/\/i0.wp.com\/www.semiconsoft.com\/wp2\/wp-content\/uploads\/2021\/08\/Roughness_effect_scalled.gif?fit=600%2C332&ssl=1\" alt =\" \"  \/><\/a><\/div><style>.tatsu-HkIYv2zFbF{margin: 0px 0px 0px 0px;}.tatsu-HkIYv2zFbF .tatsu-single-image-inner{border-style: solid;max-width: 100%;}.tatsu-HkIYv2zFbF.tatsu-single-image{transform: translate3d(0px,0px, 0);}<\/style><\/div><div  class=\"tatsu-module tatsu-inline-text clearfix tatsu-B1PKvnMF-t   \" ><style>.tatsu-B1PKvnMF-t .tatsu-inline-text-inner{width: 100%;text-align: left;}.tatsu-B1PKvnMF-t.tatsu-inline-text{margin: 0px 0px 10px 0px;}@media only screen and (max-width: 767px) {.tatsu-B1PKvnMF-t .tatsu-inline-text-inner{width: 100%;}}<\/style><div class=\"tatsu-inline-text-inner tatsu-align-center\">\n<p><strong>Fig. 1 Reflectance spectra (700nm -1700nm) <span style=\"background-color: #ffffff; font-size: 17px; letter-spacing: 0px;\">of a\u00a0 5um polymer film<\/span> <span style=\"font-size: 17px; letter-spacing: 0px;\">for different surface roughnesses (simulation). There is\u00a0 characteristic, for light scattering,\u00a0 accelerated degradation (of intensity and interference) at shorter wavelengths<\/span><\/strong><\/p>\n<\/div><\/div><div  class=\"tatsu-single-image tatsu-module align-center tatsu-image-lazyload tatsu-external-image tatsu-H1OFv2GF-K  \" ><div class=\"tatsu-single-image-inner \" style=\"\" ><div class = \"tatsu-single-image-padding-wrap\" style = \"\" ><\/div><a class = \"mfp-image\" href = \"https:\/\/i0.wp.com\/www.semiconsoft.com\/wp2\/wp-content\/uploads\/2021\/08\/20umImage.jpg?fit=280%2C236&#038;ssl=1\" ><img class = \"tatsu-gradient-border\" data-src = \"https:\/\/i0.wp.com\/www.semiconsoft.com\/wp2\/wp-content\/uploads\/2021\/08\/20umImage.jpg?fit=280%2C236&ssl=1\" alt =\" \"  src =\"data:image\/png;base64,iVBORw0KGgoAAAANSUhEUgAAAAEAAAABCAQAAAC1HAwCAAAAC0lEQVR42mNkYAAAAAYAAjCB0C8AAAAASUVORK5CYII=\"  \/><\/a><\/div><style>.tatsu-H1OFv2GF-K .tatsu-single-image-inner{border-style: solid;max-width: 100%;}.tatsu-H1OFv2GF-K.tatsu-single-image{transform: translate3d(0px,0px, 0);}<\/style><\/div><div  class=\"tatsu-module tatsu-inline-text clearfix tatsu-rJKtPhMYZF   \" ><style>.tatsu-rJKtPhMYZF .tatsu-inline-text-inner{width: 100%;text-align: left;}@media only screen and (max-width: 767px) {.tatsu-rJKtPhMYZF .tatsu-inline-text-inner{width: 100%;}}<\/style><div class=\"tatsu-inline-text-inner tatsu-align-center\">\n<p style=\"text-align: left;\"><strong>Fig. 2 Metal surface with 0.5um RMS roughness\u00a0 \u00a0 \u00a0( reticle diameter is 20um). There is significant roughness\u00a0 on a 20um scale but smooth areas are visible on a < 5um scale<\/strong><\/p>\n<\/div><\/div><\/div><\/div><div class = \"tatsu-column-bg-image-wrap\"><div class = \"tatsu-column-bg-image tatsu-bg-lazyload\" data-src = \"\"><\/div><\/div><\/div><style>.tatsu-row > .tatsu-rkrtPnfKZK.tatsu-column{width: 38%;}.tatsu-rkrtPnfKZK.tatsu-column > .tatsu-column-inner > .tatsu-column-overlay{mix-blend-mode: none;}.tatsu-rkrtPnfKZK > .tatsu-column-inner > .tatsu-top-divider{z-index: 9999;}.tatsu-rkrtPnfKZK > .tatsu-column-inner > .tatsu-bottom-divider{z-index: 9999;}.tatsu-rkrtPnfKZK > .tatsu-column-inner > .tatsu-left-divider{z-index: 9999;}.tatsu-rkrtPnfKZK > .tatsu-column-inner > .tatsu-right-divider{z-index: 9999;}@media only screen and (max-width: 767px) {.tatsu-row > .tatsu-rkrtPnfKZK.tatsu-column{width: 100%;}}<\/style><\/div><div  class=\"tatsu-column  tatsu-column-no-bg tatsu-one-half tatsu-column-align-middle tatsu-column-image-none tatsu-column-effect-none  tatsu-By5KPhMFWK\"  data-parallax-speed=\"0\" style=\"\"><div class=\"tatsu-column-inner \" ><div class=\"tatsu-column-pad-wrap\"><div class=\"tatsu-column-pad\" ><div  class=\"tatsu-module tatsu-inline-text clearfix tatsu-Skg6GmKZF   \" ><style>.tatsu-Skg6GmKZF .tatsu-inline-text-inner{width: 100%;text-align: left;}@media only screen and (max-width: 767px) {.tatsu-Skg6GmKZF .tatsu-inline-text-inner{width: 100%;}}<\/style><div class=\"tatsu-inline-text-inner tatsu-align-center\">\n<p>\u00a0<\/p>\n<p><span style=\"font-size: 17px; background-color: #ffffff;\">\u00a0 \u00a0 \u00a0 \u00a0Film thickness measurement on rough surfaces is, typically, challenging because of light-scattering. In fact, <span class=\"\">surface roughness<\/span> and <\/span>thickness nonuniformity are the\u00a0 two main factors that can degrade thickness measurement capability of spectroscopic reflectance based systems. Yet, these properties\u00a0 are commonly present in many real-life cases,like coatings on metals.<a href=\"film-thickness-measurement-msp-mprobe40\/\" target=\"_blank\" rel=\"noopener\"><span class=\"tatsu-inline-link-style3\"> MProbe MSP<\/span><\/a> offers a solution to overcome this limitation and to measure even the most challenging applications.\u00a0<\/p>\n<p>\u00a0 \u00a0 \u00a0 \u00a0 \u00a0The key to the solution is the fact that both surface roughness and thickness nonuniformity are dependent on the measurement area. By reducing the measurement spot size one can reduce\u00a0 effective roughness and thickness nonuniformity (observed within this spot).\u00a0<\/p>\n<\/div><\/div><div  class=\"tatsu-module tatsu-inline-text clearfix tatsu-r1woeXYWF   \" ><style>.tatsu-r1woeXYWF .tatsu-inline-text-inner{width: 100%;text-align: left;}.tatsu-r1woeXYWF.tatsu-inline-text{margin: 0px 0px 0px 0px;}@media only screen and (max-width: 767px) {.tatsu-r1woeXYWF .tatsu-inline-text-inner{width: 100%;}}<\/style><div class=\"tatsu-inline-text-inner tatsu-align-center\">\n<h4><strong>SURFACE ROUGHNESS<\/strong><\/h4>\n<\/div><\/div><div  class=\"tatsu-module tatsu-inline-text clearfix tatsu-B1sWZmYWF   \" ><style>.tatsu-B1sWZmYWF .tatsu-inline-text-inner{width: 100%;text-align: left;padding: 0px 0px 20px 0px;}@media only screen and (max-width: 767px) {.tatsu-B1sWZmYWF .tatsu-inline-text-inner{width: 100%;}}<\/style><div class=\"tatsu-inline-text-inner tatsu-align-center\">\n<p>\u00a0 \u00a0 \u00a0 \u00a0 \u00a0Surface roughness causes increased light-scattering. This leads to decreased <a href=\"https:\/\/en.wikipedia.org\/wiki\/Specular_reflection\" target=\"_self\" rel=\"noopener\"><span class=\"tatsu-inline-link-style3\">specular reflectivity<\/span><\/a> and degradation of <a href=\"https:\/\/en.wikipedia.org\/wiki\/Wave_interference\" target=\"_self\" rel=\"noopener\"><span class=\"tatsu-inline-link-style2 \">interference<\/span><\/a>. The light scattering is more pronouced at a shorter weavelengths. For this reason, long Visible and Near-infrared (NIR) wavelength range (700-1700nm) is better suited for appication with surface roughness.\u00a0 Simulation of the effect of surface roughness on reflectance spectra (Fig.1) shows that interference pattern is significantly degraded for RMS> 100nm. And it becomes challenging to measure thickness in these conditions.\u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0<\/p>\n<p>\u00a0 Rough surface exhibits peaks and smooth areas on the microscopic level (Fig. 2). It is clear that there is significant roughness on 20um scale but, there are smooth areas on a < 5um scale. So, it should be possible to select a small enough measurement spot to reduce the roughness effect. Indeed, results on Fig.3, 4 shows that using 2um measurement spot surface roughness effect can be practically eliminated and coating thickness can be\u00a0 reliably measured. Roughness topology is also leading to variation of\u00a0 the coating thickness on microscopic level - a potential source of measurement degradation(as we will review below). But the small spot size helps to reduce this as well. The smallest possible measurement spot size does not always gives best results. The spot size needs to be optimized based on the particular application.\u00a0\u00a0<\/p>\n<\/div><\/div><\/div><\/div><div class = \"tatsu-column-bg-image-wrap\"><div class = \"tatsu-column-bg-image tatsu-bg-lazyload\" data-src = \"\"><\/div><\/div><\/div><style>.tatsu-row > .tatsu-By5KPhMFWK.tatsu-column{width: 62%;}.tatsu-By5KPhMFWK.tatsu-column > .tatsu-column-inner > .tatsu-column-overlay{mix-blend-mode: none;}.tatsu-By5KPhMFWK > .tatsu-column-inner > .tatsu-top-divider{z-index: 9999;}.tatsu-By5KPhMFWK > .tatsu-column-inner > .tatsu-bottom-divider{z-index: 9999;}.tatsu-By5KPhMFWK > .tatsu-column-inner > .tatsu-left-divider{z-index: 9999;}.tatsu-By5KPhMFWK > .tatsu-column-inner > .tatsu-right-divider{z-index: 9999;}@media only screen and (max-width: 767px) {.tatsu-row > .tatsu-By5KPhMFWK.tatsu-column{width: 100%;}}<\/style><\/div><\/div><\/div><\/div><div class=\"tatsu-section-background-wrap\"><div class = \"tatsu-section-background tatsu-bg-lazyload\" data-src = \"\"><\/div><\/div><style>.tatsu-Sk7tw2fY-Y.tatsu-section{background-color: rgba(255,255,255,1);}.tatsu-Sk7tw2fY-Y .tatsu-section-pad{padding: 1px 0px 1px 0px;}.tatsu-Sk7tw2fY-Y > .tatsu-bottom-divider{z-index: 9999;}.tatsu-Sk7tw2fY-Y > .tatsu-top-divider{z-index: 9999;}<\/style><\/div><div  class=\"tatsu-BJ3Yv2GFZt tatsu-section    tatsu-clearfix\" data-title=\"\"  data-headerscheme=\"background--dark\"><div class='tatsu-section-pad clearfix' data-padding='{\"d\":\"7px 0px 26px 0px\"}' data-padding-top='7px'><div class=\"tatsu-row-wrap  tatsu-wrap tatsu-row-has-one-half tatsu-row-has-two-cols tatsu-medium-gutter tatsu-reg-cols  tatsu-clearfix tatsu-Bk6FPhMtWY\" ><div  class=\"tatsu-row \" ><div  class=\"tatsu-column  tatsu-column-no-bg tatsu-one-half tatsu-column-align-middle tatsu-column-image-none tatsu-column-effect-none  tatsu-Sy0KP3GYWF\"  data-parallax-speed=\"0\" style=\"\"><div class=\"tatsu-column-inner \" ><div class=\"tatsu-column-pad-wrap\"><div class=\"tatsu-column-pad\" ><div  class=\"tatsu-single-image tatsu-module align-center tatsu-image-lazyload tatsu-external-image tatsu-BkaYN4F-K  \" ><div class=\"tatsu-single-image-inner \" style=\"\" ><div class = \"tatsu-single-image-padding-wrap\" style = \"\" ><\/div><a class = \"mfp-image\" href = \"https:\/\/i1.wp.com\/www.semiconsoft.com\/wp2\/wp-content\/uploads\/2021\/08\/MeasurementOnMandrel.gif?fit=600%2C363&#038;ssl=1\" ><img class = \"tatsu-gradient-border\" data-src = \"https:\/\/i1.wp.com\/www.semiconsoft.com\/wp2\/wp-content\/uploads\/2021\/08\/MeasurementOnMandrel.gif?fit=600%2C363&ssl=1\" alt =\" \"  src =\"data:image\/png;base64,iVBORw0KGgoAAAANSUhEUgAAAAEAAAABCAQAAAC1HAwCAAAAC0lEQVR42mNkYAAAAAYAAjCB0C8AAAAASUVORK5CYII=\"  \/><\/a><\/div><style>.tatsu-BkaYN4F-K{margin: 0px 0px 0px 0px;}.tatsu-BkaYN4F-K .tatsu-single-image-inner{border-style: solid;max-width: 100%;}.tatsu-BkaYN4F-K.tatsu-single-image{transform: translate3d(0px,0px, 0);}<\/style><\/div><div class=\"tatsu-row-wrap  tatsu-row-one-col tatsu-row-has-one-cols tatsu-medium-gutter tatsu-reg-cols tatsu-inner-row-wrap  tatsu-clearfix tatsu-B1eD2IEFbK\" ><div  class=\"tatsu-row \" ><div  class=\"tatsu-column  tatsu-bg-overlay tatsu-one-col tatsu-column-image- tatsu-column-effect-  tatsu-HJDnLVKbF\"  data-parallax-speed=\"0\" style=\"\"><div class=\"tatsu-column-inner \" ><div class=\"tatsu-column-pad-wrap\"><div class=\"tatsu-column-pad\" ><div  class=\"tatsu-module tatsu-inline-text clearfix tatsu-Byl08VYbF   \" ><style>.tatsu-Byl08VYbF .tatsu-inline-text-inner{width: 100%;text-align: left;}.tatsu-Byl08VYbF.tatsu-inline-text{margin: 0px 0px 0px 0px;}@media only screen and (max-width: 767px) {.tatsu-Byl08VYbF .tatsu-inline-text-inner{width: 100%;}}<\/style><div class=\"tatsu-inline-text-inner tatsu-align-center\">\n<p><strong>Fig.3 Measurement reflectance spectrum 700 -1100nm\u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 (sample Fig. 2) using 2um measurement spot. Pronounced interference fringes are clearly visible<\/strong><\/p>\n<\/div><\/div><\/div><\/div><div class = \"tatsu-column-bg-image-wrap\"><div class = \"tatsu-column-bg-image tatsu-bg-lazyload\" data-src = \"\"><\/div><\/div><div class=\"tatsu-overlay tatsu-column-overlay tatsu-animate-none\" ><\/div><\/div><style>.tatsu-row > .tatsu-HJDnLVKbF.tatsu-column{width: 100%;}.tatsu-HJDnLVKbF.tatsu-column > .tatsu-column-inner > .tatsu-column-overlay{mix-blend-mode: normal;}.tatsu-HJDnLVKbF > .tatsu-column-inner > .tatsu-top-divider{z-index: 9999;}.tatsu-HJDnLVKbF > .tatsu-column-inner > .tatsu-bottom-divider{z-index: 9999;}.tatsu-HJDnLVKbF > .tatsu-column-inner > .tatsu-left-divider{z-index: 9999;}.tatsu-HJDnLVKbF > .tatsu-column-inner > .tatsu-right-divider{z-index: 9999;}@media only screen and (max-width:1377px) {.tatsu-row > .tatsu-HJDnLVKbF.tatsu-column{width: 100%;}}@media only screen and (min-width:768px) and (max-width: 1024px) {.tatsu-row > .tatsu-HJDnLVKbF.tatsu-column{width: 100%;}}@media only screen and (max-width: 767px) {.tatsu-row > .tatsu-HJDnLVKbF.tatsu-column{width: 100%;}}<\/style><\/div><\/div><\/div><\/div><\/div><div class = \"tatsu-column-bg-image-wrap\"><div class = \"tatsu-column-bg-image tatsu-bg-lazyload\" data-src = \"\"><\/div><\/div><\/div><style>.tatsu-row > .tatsu-Sy0KP3GYWF.tatsu-column{width: 50%;}.tatsu-Sy0KP3GYWF.tatsu-column > .tatsu-column-inner > .tatsu-column-overlay{mix-blend-mode: none;}.tatsu-Sy0KP3GYWF > .tatsu-column-inner > .tatsu-top-divider{z-index: 9999;}.tatsu-Sy0KP3GYWF > .tatsu-column-inner > .tatsu-bottom-divider{z-index: 9999;}.tatsu-Sy0KP3GYWF > .tatsu-column-inner > .tatsu-left-divider{z-index: 9999;}.tatsu-Sy0KP3GYWF > .tatsu-column-inner > .tatsu-right-divider{z-index: 9999;}@media only screen and (max-width: 767px) {.tatsu-row > .tatsu-Sy0KP3GYWF.tatsu-column{width: 100%;}}<\/style><\/div><div  class=\"tatsu-column  tatsu-column-no-bg tatsu-one-half tatsu-column-align-middle tatsu-column-image-none tatsu-column-effect-none  tatsu-Hyletv3zKWt\"  data-parallax-speed=\"0\" style=\"\"><div class=\"tatsu-column-inner \" ><div class=\"tatsu-column-pad-wrap\"><div class=\"tatsu-column-pad\" ><div  class=\"tatsu-single-image tatsu-module align-center be-shadow-light tatsu-image-lazyload tatsu-external-image tatsu-SkZlKw2GY-F  \" ><div class=\"tatsu-single-image-inner \" style=\"\" ><div class = \"tatsu-single-image-padding-wrap\" style = \"\" ><\/div><a class = \"mfp-image\" href = \"https:\/\/i2.wp.com\/www.semiconsoft.com\/wp2\/wp-content\/uploads\/2021\/08\/MeasurementResultMandrel.jpg?fit=600%2C363&#038;ssl=1\" ><img class = \"tatsu-gradient-border\" data-src = \"https:\/\/i2.wp.com\/www.semiconsoft.com\/wp2\/wp-content\/uploads\/2021\/08\/MeasurementResultMandrel.jpg?fit=600%2C363&ssl=1\" alt =\" \"  src =\"data:image\/png;base64,iVBORw0KGgoAAAANSUhEUgAAAAEAAAABCAQAAAC1HAwCAAAAC0lEQVR42mNkYAAAAAYAAjCB0C8AAAAASUVORK5CYII=\"  \/><\/a><\/div><style>.tatsu-SkZlKw2GY-F{margin: 0px 0px 0px 0px;}.tatsu-SkZlKw2GY-F .tatsu-single-image-inner{border-style: solid;max-width: 100%;}.tatsu-SkZlKw2GY-F.tatsu-single-image{transform: translate3d(0px,0px, 0);}<\/style><\/div><div  class=\"tatsu-module tatsu-inline-text clearfix tatsu-Hk4lFPhMtZY   \" ><style>.tatsu-Hk4lFPhMtZY .tatsu-inline-text-inner{width: 100%;text-align: left;}@media only screen and (max-width: 767px) {.tatsu-Hk4lFPhMtZY .tatsu-inline-text-inner{width: 100%;}}<\/style><div class=\"tatsu-inline-text-inner tatsu-align-center\">\n<p><span class=\"swatch-black\"><strong>Fig. 4\u00a0 Measurement results (data Fig. 3). The peak indicates the coating thickness. It is strong and pronounced, showing excellent selectivity (absence of other thicknesses)<\/strong><\/span><\/p>\n<\/div><\/div><\/div><\/div><div class = \"tatsu-column-bg-image-wrap\"><div class = \"tatsu-column-bg-image tatsu-bg-lazyload\" data-src = \"\"><\/div><\/div><\/div><style>.tatsu-row > .tatsu-Hyletv3zKWt.tatsu-column{width: 50%;}.tatsu-Hyletv3zKWt.tatsu-column > .tatsu-column-inner > .tatsu-column-overlay{mix-blend-mode: none;}.tatsu-Hyletv3zKWt > .tatsu-column-inner > .tatsu-top-divider{z-index: 9999;}.tatsu-Hyletv3zKWt > .tatsu-column-inner > .tatsu-bottom-divider{z-index: 9999;}.tatsu-Hyletv3zKWt > .tatsu-column-inner > .tatsu-left-divider{z-index: 9999;}.tatsu-Hyletv3zKWt > .tatsu-column-inner > .tatsu-right-divider{z-index: 9999;}@media only screen and (max-width: 767px) {.tatsu-row > .tatsu-Hyletv3zKWt.tatsu-column{width: 100%;}}<\/style><\/div><\/div><\/div><\/div><div class=\"tatsu-section-background-wrap\"><div class = \"tatsu-section-background tatsu-bg-lazyload\" data-src = \"\"><\/div><\/div><style>.tatsu-BJ3Yv2GFZt.tatsu-section{background-color: rgba(255,255,255,1);}.tatsu-BJ3Yv2GFZt .tatsu-section-pad{padding: 7px 0px 26px 0px;}.tatsu-BJ3Yv2GFZt > .tatsu-bottom-divider{z-index: 9999;}.tatsu-BJ3Yv2GFZt > .tatsu-top-divider{z-index: 9999;}<\/style><\/div><div  class=\"tatsu-HJHgKvnGYZF tatsu-section  tatsu-bg-overlay   tatsu-clearfix\" data-title=\"\"  data-headerscheme=\"background--dark\"><div class='tatsu-section-pad clearfix' data-padding='{\"d\":\"0px 0px 0px 0px\"}' data-padding-top='0px'><div class=\"tatsu-row-wrap  tatsu-wrap tatsu-row-has-one-half tatsu-row-has-two-cols tatsu-medium-gutter tatsu-reg-cols  tatsu-clearfix tatsu-H1LltP2GKbK\" ><div  class=\"tatsu-row \" ><div  class=\"tatsu-column  tatsu-bg-overlay tatsu-one-half tatsu-column-image-none tatsu-column-effect-none  tatsu-B1DxYPhzKWt\"  data-parallax-speed=\"0\" style=\"\"><div class=\"tatsu-column-inner \" ><div class=\"tatsu-column-pad-wrap\"><div class=\"tatsu-column-pad\" ><div  class=\"tatsu-single-image tatsu-module tatsu-image-lazyload tatsu-external-image tatsu-ryOVsEt-K  \" ><div class=\"tatsu-single-image-inner \" style=\"\" ><div class = \"tatsu-single-image-padding-wrap\" style = \"\" ><\/div><img class = \"tatsu-gradient-border\" data-src = \"https:\/\/i0.wp.com\/www.semiconsoft.com\/wp2\/wp-content\/uploads\/2021\/08\/Two_Areas.png?fit=359%2C304&ssl=1\" alt =\" \"  src =\"data:image\/png;base64,iVBORw0KGgoAAAANSUhEUgAAAAEAAAABCAQAAAC1HAwCAAAAC0lEQVR42mNkYAAAAAYAAjCB0C8AAAAASUVORK5CYII=\"  \/><\/div><style>.tatsu-ryOVsEt-K .tatsu-single-image-inner{border-style: solid;max-width: 100%;}.tatsu-ryOVsEt-K.tatsu-single-image{transform: translate3d(0px,0px, 0);}<\/style><\/div><div  class=\"tatsu-module tatsu-inline-text clearfix tatsu-Skg9j4K-t   \" ><style>.tatsu-Skg9j4K-t .tatsu-inline-text-inner{width: 100%;text-align: left;}@media only screen and (max-width: 767px) {.tatsu-Skg9j4K-t .tatsu-inline-text-inner{width: 100%;}}<\/style><div class=\"tatsu-inline-text-inner tatsu-align-center\">\n<p><strong>Fig. 5\u00a0 Different thickness areas within the measurement spot\u00a0<\/strong><\/p>\n<\/div><\/div><div  class=\"tatsu-single-image tatsu-module tatsu-image-lazyload tatsu-external-image tatsu-ryMjsVY-Y  \" ><div class=\"tatsu-single-image-inner \" style=\"\" ><div class = \"tatsu-single-image-padding-wrap\" style = \"\" ><\/div><img class = \"tatsu-gradient-border\" data-src = \"https:\/\/i1.wp.com\/www.semiconsoft.com\/wp2\/wp-content\/uploads\/2021\/08\/Convolution_deconv.jpg?fit=600%2C143&ssl=1\" alt =\" \"  src =\"data:image\/png;base64,iVBORw0KGgoAAAANSUhEUgAAAAEAAAABCAQAAAC1HAwCAAAAC0lEQVR42mNkYAAAAAYAAjCB0C8AAAAASUVORK5CYII=\"  \/><\/div><style>.tatsu-ryMjsVY-Y .tatsu-single-image-inner{border-style: solid;max-width: 100%;}.tatsu-ryMjsVY-Y.tatsu-single-image{transform: translate3d(0px,0px, 0);}<\/style><\/div><div  class=\"tatsu-module tatsu-inline-text clearfix tatsu-r1MnhEtWY   \" ><style>.tatsu-r1MnhEtWY .tatsu-inline-text-inner{width: 100%;text-align: left;}@media only screen and (max-width: 767px) {.tatsu-r1MnhEtWY .tatsu-inline-text-inner{width: 100%;}}<\/style><div class=\"tatsu-inline-text-inner tatsu-align-center\">\n<p><strong>Fig. 6 Transformation of measurement signals (convolution and deconvolution) from different thickness area, during the measurement process<\/strong><\/p>\n<\/div><\/div><\/div><\/div><div class = \"tatsu-column-bg-image-wrap\"><div class = \"tatsu-column-bg-image tatsu-bg-lazyload\" data-src = \"\"><\/div><\/div><div class=\"tatsu-overlay tatsu-column-overlay tatsu-animate-none\" ><\/div><\/div><style>.tatsu-row > .tatsu-B1DxYPhzKWt.tatsu-column{width: 48.7%;}.tatsu-B1DxYPhzKWt.tatsu-column > .tatsu-column-inner > .tatsu-column-overlay{mix-blend-mode: normal;}.tatsu-B1DxYPhzKWt > .tatsu-column-inner > .tatsu-top-divider{z-index: 9999;}.tatsu-B1DxYPhzKWt > .tatsu-column-inner > .tatsu-bottom-divider{z-index: 9999;}.tatsu-B1DxYPhzKWt > .tatsu-column-inner > .tatsu-left-divider{z-index: 9999;}.tatsu-B1DxYPhzKWt > .tatsu-column-inner > .tatsu-right-divider{z-index: 9999;}@media only screen and (max-width:1377px) {.tatsu-row > .tatsu-B1DxYPhzKWt.tatsu-column{width: 50%;}}@media only screen and (min-width:768px) and (max-width: 1024px) {.tatsu-row > .tatsu-B1DxYPhzKWt.tatsu-column{width: 50%;}}@media only screen and (max-width: 767px) {.tatsu-row > .tatsu-B1DxYPhzKWt.tatsu-column{width: 100%;}}<\/style><\/div><div  class=\"tatsu-column  tatsu-bg-overlay tatsu-one-half tatsu-column-image-none tatsu-column-effect-none  tatsu-B1FgYv3Gt-Y\"  data-parallax-speed=\"0\" style=\"\"><div class=\"tatsu-column-inner \" ><div class=\"tatsu-column-pad-wrap\"><div class=\"tatsu-column-pad\" ><div  class=\"tatsu-module tatsu-inline-text clearfix tatsu-HJtYqVYbY   \" ><style>.tatsu-HJtYqVYbY .tatsu-inline-text-inner{width: 100%;text-align: left;}.tatsu-HJtYqVYbY.tatsu-inline-text{margin: 0px 0px 0px 0px;}@media only screen and (max-width: 767px) {.tatsu-HJtYqVYbY .tatsu-inline-text-inner{width: 100%;}}<\/style><div class=\"tatsu-inline-text-inner tatsu-align-center\">\n<h4>THICKNESS NONUNIFORMITY<\/h4>\n<\/div><\/div><div  class=\"tatsu-module tatsu-inline-text clearfix tatsu-BkKQjEFZt   \" ><style>.tatsu-BkKQjEFZt .tatsu-inline-text-inner{width: 100%;text-align: left;}@media only screen and (max-width: 767px) {.tatsu-BkKQjEFZt .tatsu-inline-text-inner{width: 100%;}}<\/style><div class=\"tatsu-inline-text-inner tatsu-align-center\">\n<p>Coating thickness nonuniformity (within the measurement spot) causes the reflectance spectra similar to a multilayer filmstack. If the thickness variation is large enough &#8211; the light phase (and interference) will be scrambled and thickness measurement would not be possible. An example of a spot size covering two area S1, S2 with different thicknesses T1,T2 is shown on Fig. 5.\u00a0<\/p>\n<p><span style=\"font-size: 17px; background-color: #ffffff;\">When reflectances from area S1, S2 reach photodetector &#8211; reflectances are combined and converted to intensity (reflectances as vectors\/ complex numbers). This process is called convolution. The optical phase is not lost &#8211; it is converted to the signal amplitude. During data analysis the signal is decomposed (using FFT) and thicknesses are extracted. Reflectance transformation during the measurement is illustrated on Fig. 6. The optical phase is never averaged and if the light beam has several areas with different phases &#8211; they\u00a0 will be convoluted and de-convoluted independently.<\/span><\/p>\n<p><span style=\"font-size: 17px; background-color: #ffffff;\">As a result if the thickness is changing randomly (or continuously) within the measurement spot &#8211; it would create a continium of thicknesses after deconvolution. As a result, it would be impossible to determine the coating thickness. <\/span><\/p>\n<p><span style=\"font-size: 17px; background-color: #ffffff;\">By reducing the measurement spot size &#8211; we reduce the thickness variation and make thickness measurement possible.<\/span><\/p>\n<\/div><\/div><div  class=\"tatsu-module tatsu-normal-button tatsu-button-wrap   tatsu-BkVxEjYWt   \"><a class=\"tatsu-shortcode mediumbtn tatsu-button left-icon circular   bg-animation-none  \" href=\"https:\/\/www.semiconsoft.com\/wp2\/film-thickness-measurement-msp-mprobe40\/\" style= \"\"  aria-label=\"Learn more about mprobe msp system\" data-gdpr-atts={} target=\"_blank\">Learn more about mprobe msp system<\/a><style>.tatsu-BkVxEjYWt .tatsu-button{background-color: rgba(34,147,215,1);color: #ffffff ;}.tatsu-BkVxEjYWt.tatsu-button-wrap{margin: 0px 0px 1px 0px;}.tatsu-BkVxEjYWt{padding: 0px 0px 10px 0px;}<\/style><\/div><\/div><\/div><div class = \"tatsu-column-bg-image-wrap\"><div class = \"tatsu-column-bg-image tatsu-bg-lazyload\" data-src = \"\"><\/div><\/div><div class=\"tatsu-overlay tatsu-column-overlay tatsu-animate-none\" ><\/div><\/div><style>.tatsu-row > .tatsu-B1FgYv3Gt-Y.tatsu-column{width: 51.3%;}.tatsu-B1FgYv3Gt-Y.tatsu-column > .tatsu-column-inner > .tatsu-column-overlay{mix-blend-mode: normal;}.tatsu-B1FgYv3Gt-Y > .tatsu-column-inner > .tatsu-top-divider{z-index: 9999;}.tatsu-B1FgYv3Gt-Y > .tatsu-column-inner > .tatsu-bottom-divider{z-index: 9999;}.tatsu-B1FgYv3Gt-Y > .tatsu-column-inner > .tatsu-left-divider{z-index: 9999;}.tatsu-B1FgYv3Gt-Y > .tatsu-column-inner > .tatsu-right-divider{z-index: 9999;}@media only screen and (max-width:1377px) {.tatsu-row > .tatsu-B1FgYv3Gt-Y.tatsu-column{width: 50%;}}@media only screen and (min-width:768px) and (max-width: 1024px) {.tatsu-row > .tatsu-B1FgYv3Gt-Y.tatsu-column{width: 50%;}}@media only screen and (max-width: 767px) {.tatsu-row > .tatsu-B1FgYv3Gt-Y.tatsu-column{width: 100%;}}<\/style><\/div><\/div><\/div><\/div><div class=\"tatsu-section-background-wrap\"><div class = \"tatsu-section-background tatsu-bg-lazyload\" data-src = \"\"><\/div><\/div><div class=\"tatsu-overlay tatsu-section-overlay\"><\/div><style>.tatsu-HJHgKvnGYZF .tatsu-section-offset-wrap{transform: translateY(-0px);}.tatsu-HJHgKvnGYZF > .tatsu-bottom-divider{z-index: 9999;}.tatsu-HJHgKvnGYZF > .tatsu-top-divider{z-index: 9999;}.tatsu-HJHgKvnGYZF .tatsu-section-overlay{mix-blend-mode: normal;}<\/style><\/div>\n","protected":false},"excerpt":{"rendered":"<p><a href=\"https:\/\/www.semiconsoft.com\/wp2\/film-thickness-measurement-on-rough-surfaces\/\" class=\"exp-read-more exp-read-more-dots\">&#8230;<\/a><\/p>\n","protected":false},"author":1,"featured_media":7656,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"footnotes":""},"class_list":["post-7654","page","type-page","status-publish","has-post-thumbnail","hentry"],"yoast_head":"<!-- This site is optimized with the Yoast SEO Premium plugin v27.4 (Yoast SEO v27.5) - https:\/\/yoast.com\/product\/yoast-seo-premium-wordpress\/ -->\n<title>Film thickness measurement on rough surfaces - Semiconsoft,Inc.<\/title>\n<meta name=\"description\" content=\"MProbe MSP enables film thickness measurement on rough surfaces. 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