{"id":8233,"date":"2023-11-01T15:04:00","date_gmt":"2023-11-01T19:04:00","guid":{"rendered":"https:\/\/www.semiconsoft.com\/wp2\/?page_id=8233"},"modified":"2025-01-07T14:11:10","modified_gmt":"2025-01-07T19:11:10","slug":"photoresist-thickness-measurement-application","status":"publish","type":"page","link":"https:\/\/www.semiconsoft.com\/wp2\/photoresist-thickness-measurement-application\/","title":{"rendered":"Photoresist Thickness Measurement Application"},"content":{"rendered":"<div  class=\"tatsu-HJ2hD71Qa tatsu-section  tatsu-bg-overlay   tatsu-clearfix\" data-title=\"\"  data-headerscheme=\"background--dark\"><div class='tatsu-section-pad clearfix' data-padding='{\"d\":\"10px 0px 20px 0px\"}' data-padding-top='10px'><div class=\"tatsu-row-wrap  tatsu-wrap tatsu-row-one-col tatsu-row-has-one-cols tatsu-medium-gutter tatsu-reg-cols  tatsu-clearfix tatsu-Hyxh2wXyQp\" ><div  class=\"tatsu-row \" ><div  class=\"tatsu-column  tatsu-bg-overlay tatsu-one-col tatsu-column-image-none tatsu-column-effect-none  tatsu-HJbn3D7kXa\"  data-parallax-speed=\"0\" style=\"\"><div class=\"tatsu-column-inner \" ><div class=\"tatsu-column-pad-wrap\"><div class=\"tatsu-column-pad\" ><div  class=\"tatsu-module tatsu-text-block-wrap tatsu-H1Mnhv7Jma  \"><div class=\"tatsu-text-inner tatsu-align-center  clearfix\" ><style>.tatsu-H1Mnhv7Jma.tatsu-text-block-wrap .tatsu-text-inner{width: 100%;text-align: center;background-color: rgba(74,144,226,1);color: rgba(255,255,255,1) ;}.tatsu-H1Mnhv7Jma.tatsu-text-block-wrap{margin: 40px 0px 30px 0px;}.tatsu-H1Mnhv7Jma .tatsu-text-inner *{color: rgba(255,255,255,1) ;}.tatsu-H1Mnhv7Jma.tatsu-text-block-wrap .tatsu-text-inner *{font-family : Arial, Helvetica, sans-serif;font-weight : 700;text-transform : none;font-size : 22px;line-height : 30px;}<\/style>\n<p style=\"text-align: center;\">Application: Photoresist thickness\u00a0 measurement<\/p>\n<\/div><\/div><\/div><\/div><div class = \"tatsu-column-bg-image-wrap\"><div class = \"tatsu-column-bg-image tatsu-bg-lazyload\" data-src = \"\"><\/div><\/div><div class=\"tatsu-overlay tatsu-column-overlay tatsu-animate-none\" ><\/div><\/div><style>.tatsu-row > .tatsu-HJbn3D7kXa.tatsu-column{width: 100%;}.tatsu-HJbn3D7kXa.tatsu-column > .tatsu-column-inner > .tatsu-column-overlay{mix-blend-mode: normal;}.tatsu-HJbn3D7kXa > .tatsu-column-inner > .tatsu-top-divider{z-index: 9999;}.tatsu-HJbn3D7kXa > .tatsu-column-inner > .tatsu-bottom-divider{z-index: 9999;}.tatsu-HJbn3D7kXa > .tatsu-column-inner > .tatsu-left-divider{z-index: 9999;}.tatsu-HJbn3D7kXa > .tatsu-column-inner > .tatsu-right-divider{z-index: 9999;}@media only screen and (max-width:1377px) {.tatsu-row > .tatsu-HJbn3D7kXa.tatsu-column{width: 100%;}}@media only screen and (min-width:768px) and (max-width: 1024px) {.tatsu-row > .tatsu-HJbn3D7kXa.tatsu-column{width: 100%;}}@media only screen and (max-width: 767px) {.tatsu-row > .tatsu-HJbn3D7kXa.tatsu-column{width: 100%;}}<\/style><\/div><\/div><\/div><\/div><div class=\"tatsu-section-background-wrap\"><div class = \"tatsu-section-background tatsu-bg-lazyload\" data-src = \"\"><\/div><\/div><div class=\"tatsu-overlay tatsu-section-overlay\"><\/div><style>.tatsu-HJ2hD71Qa .tatsu-section-pad{padding: 10px 0px 20px 0px;}.tatsu-HJ2hD71Qa .tatsu-section-offset-wrap{transform: translateY(-0px);}.tatsu-HJ2hD71Qa > .tatsu-bottom-divider{z-index: 9999;}.tatsu-HJ2hD71Qa > .tatsu-top-divider{z-index: 9999;}.tatsu-HJ2hD71Qa .tatsu-section-overlay{mix-blend-mode: normal;}<\/style><\/div><div  class=\"tatsu-Hk733PQJma tatsu-section    tatsu-clearfix\" data-title=\"\"  data-headerscheme=\"background--dark\"><div class='tatsu-section-pad clearfix' data-padding='{\"d\":\"0px 0px 29px 0px\"}' data-padding-top='0px'><div class=\"tatsu-row-wrap  tatsu-wrap tatsu-row-one-col tatsu-row-has-one-cols tatsu-medium-gutter tatsu-reg-cols  tatsu-clearfix tatsu-SyeTHOQ1mT\" ><div  class=\"tatsu-row \" ><div  class=\"tatsu-column  tatsu-bg-overlay tatsu-one-col tatsu-column-image-none tatsu-column-effect-none  tatsu-rJpBOm1Q6\"  data-parallax-speed=\"0\" style=\"\"><div class=\"tatsu-column-inner \" ><div class=\"tatsu-column-pad-wrap\"><div class=\"tatsu-column-pad\" ><div  class=\"tatsu-module tatsu-inline-text clearfix tatsu-SJQDdX1mT   \" ><style>.tatsu-SJQDdX1mT .tatsu-inline-text-inner{width: 100%;text-align: left;}.tatsu-SJQDdX1mT.tatsu-inline-text{margin: 10px 0px 30px 0px;}@media only screen and (max-width: 767px) {.tatsu-SJQDdX1mT .tatsu-inline-text-inner{width: 100%;}}<\/style><div class=\"tatsu-inline-text-inner tatsu-align-center\">\n<p><a href=\"https:\/\/en.wikipedia.org\/wiki\/Photoresist\" target=\"_blank\" rel=\"noopener\"><span class=\"tatsu-inline-link-style2\">Photoresist<\/span><\/a> thickness measurement is easy with <a href=\"mprobevis-thin-film-measurement-system\/\" target=\"_blank\" rel=\"noopener\"><span class=\"tatsu-inline-link-style2\">MProbe Vis<\/span><\/a> system.Practically, any photoresist&nbsp;<span style=\"background-color: #ffffff; font-size: 17px; letter-spacing: 0px;\">can be measured quickly and reliably<\/span><span style=\"font-size: 17px; letter-spacing: 0px;\">: baked or partially baked, thin or thick. Still,&nbsp;<\/span><span style=\"background-color: #ffffff; font-size: 17px; letter-spacing: 0px;\">the first time measurement may be confusing &#8211; there is a<\/span><span style=\"font-size: 17px; letter-spacing: 0px;\"> wide variety of photoresist types and processing conditions. This application note seeks to clarify the measurement process using examples of baked, and two partially baked photoresist samples. The photoresist measurements are done using 500nm -1000nm wavelengh range to minimize the effect of the absorption.&nbsp;<\/span><\/p>\n<h5>&nbsp;<strong>Step 1. Determine&nbsp; the optical constants of the photoresist. <\/strong><\/h5>\n<ul>\n<li>Many photoresists are already defined in the material library. Nothing needs to be done in this case<\/li>\n<li>&nbsp;Photoresist&nbsp; specification sheets have information about dispersion parameters. They are listed in the form of <a href=\"https:\/\/en.wikipedia.org\/wiki\/Cauchy%27s_equation\" target=\"_blank\" rel=\"noopener\"><span class=\"tatsu-inline-link-style2\">Cauchy coefficients<\/span><\/a> &#8211; it is 3 coefficients that allow to determine the refractive index (R.I.) of the material at different wavelengths of light.&nbsp; New Cauchy material can be created and assigned the Cauchy coefficients of the specific photoresist<\/li>\n<li>If Cauchy coefficients of the photoresist are not available &#8211;&nbsp; use the Cauchy coeffcients of the simiar photoresist, as a starting point.<\/li>\n<\/ul>\n<h5><strong>Step 2. Create the filmstack<\/strong><\/h5>\n<p>Filmstack represents a model of the physical sample &#8211; it defines the substrate and material layers. If 3000nm of photoresist is deposited on the Si wafer &#8211; filmstack will be Si substrate\/ 3000nm PR.&nbsp; Here PR will be the photoresit material that was defined in the Step 1.&nbsp;<\/p>\n<h5><strong>Step 3. Take the measurement<\/strong><\/h5>\n<p>Measurement is, actually, a two-step process: data acquisition and data analysis. They are transparently handled by the <a href=\"..\/tfcompanion-thickness-software\/\" target=\"_blank\" rel=\"noopener\"><span class=\"tatsu-inline-link-style2\">TFCompanion software<\/span><\/a>. During the first measurement one may or may not get a perfect result &#8211; filmstack needs to be adjusted. If the thickness of the photoresist is thick enough(&gt; 1um), one can start with the thick&nbsp; film (FFT based) algorithm. Once the thickness is determined, filmstack can be fine tuned using curve fitting (Marquardt-Levenberg algorithm). At this point, approach is slightly different depending on the processing\/conditions of the photoresist(fully baked, not baked, partially baked, etc) If the photoresist is fully baked and the Cauchy coefficients are correct &#8211; nothing needs to be done.&nbsp; &nbsp;Otherwise, optical constants need to be adjusted.<\/p>\n<h5>Conclusions<\/h5>\n<p>The results show that one needs to be especially careful with under baked photoresist where optical costants are different from the specification.&nbsp; Correct optical constants can be determined or confirmed by fitting of the model to measured data. Alternatively, optical constants can be measured independently (using spectroscopic ellipsometry, etc.).&nbsp; Once optical constants are determined &#8211; FFT algorithm can be used for further measurement. In the case of thick films, the thickness results of FFT closely match the thickness measured with the curve fitting algorithm. However, there maybe small descrepancies&nbsp; (&lt;0.1%) when the photoresist has a noticeable absorption. <span style=\"background-color: #ffffff; font-size: 17px; letter-spacing: 0px;\">FFT will, typically, give a slightly higher thickness value because it does not use absorption information. <\/span><span style=\"font-size: 17px; letter-spacing: 0px;\">The extinction coefficients are very small (&lt;0.01) in the 500-1000nm range but they effect optical measurement in the thick films. At the same time, FFT offers fast and foolproof measurement method, well suited for production environment.&nbsp; &nbsp;<\/span><\/p>\n<p>&nbsp;<\/p>\n<\/div><\/div><\/div><\/div><div class = \"tatsu-column-bg-image-wrap\"><div class = \"tatsu-column-bg-image tatsu-bg-lazyload\" data-src = \"\"><\/div><\/div><div class=\"tatsu-overlay tatsu-column-overlay tatsu-animate-none\" ><\/div><\/div><style>.tatsu-row > .tatsu-rJpBOm1Q6.tatsu-column{width: 100%;}.tatsu-rJpBOm1Q6.tatsu-column > .tatsu-column-inner > .tatsu-column-overlay{mix-blend-mode: normal;}.tatsu-rJpBOm1Q6 > .tatsu-column-inner > .tatsu-top-divider{z-index: 9999;}.tatsu-rJpBOm1Q6 > .tatsu-column-inner > .tatsu-bottom-divider{z-index: 9999;}.tatsu-rJpBOm1Q6 > .tatsu-column-inner > .tatsu-left-divider{z-index: 9999;}.tatsu-rJpBOm1Q6 > .tatsu-column-inner > .tatsu-right-divider{z-index: 9999;}@media only screen and (max-width:1377px) {.tatsu-row > .tatsu-rJpBOm1Q6.tatsu-column{width: 100%;}}@media only screen and (min-width:768px) and (max-width: 1024px) {.tatsu-row > .tatsu-rJpBOm1Q6.tatsu-column{width: 100%;}}@media only screen and (max-width: 767px) {.tatsu-row > .tatsu-rJpBOm1Q6.tatsu-column{width: 100%;}}<\/style><\/div><\/div><\/div><\/div><div class=\"tatsu-section-background-wrap\"><div class = \"tatsu-section-background tatsu-bg-lazyload\" data-src = \"\"><\/div><\/div><style>.tatsu-Hk733PQJma.tatsu-section{background-color: rgba(255,255,255,1);}.tatsu-Hk733PQJma .tatsu-section-pad{padding: 0px 0px 29px 0px;}.tatsu-Hk733PQJma > .tatsu-bottom-divider{z-index: 9999;}.tatsu-Hk733PQJma > .tatsu-top-divider{z-index: 9999;}<\/style><\/div><div  class=\"tatsu-Syph3w7k7a tatsu-section    tatsu-clearfix\" data-title=\"\"  data-headerscheme=\"background--dark\"><div class='tatsu-section-pad clearfix' data-padding='{\"d\":\"7px 0px 43px 0px\"}' data-padding-top='7px'><div class=\"tatsu-row-wrap  tatsu-wrap tatsu-row-has-one-half tatsu-row-has-two-cols tatsu-medium-gutter tatsu-reg-cols  tatsu-clearfix tatsu-Skx5W_lxQa\" ><div  class=\"tatsu-row \" ><div  class=\"tatsu-column  tatsu-bg-overlay tatsu-one-half tatsu-column-image-none tatsu-column-effect-none  tatsu-Hk2bdelXp\"  data-parallax-speed=\"0\" style=\"\"><div class=\"tatsu-column-inner \" ><div class=\"tatsu-column-pad-wrap\"><div class=\"tatsu-column-pad\" ><div  class=\"tatsu-single-image tatsu-module tatsu-image-lazyload tatsu-BJ_GOel7T  \" ><div class=\"tatsu-single-image-inner \" style=\"width : 600px;\" ><div class = \"tatsu-single-image-padding-wrap\" style = \"padding-bottom : 71%;\" ><\/div><a class = \"mfp-image\" href = \"https:\/\/www.semiconsoft.com\/wp2\/wp-content\/uploads\/2023\/11\/nk_cauchy_PR.jpg\" ><img class = \"tatsu-gradient-border\" alt = \"Photoresist thickness measurement n,k dispersion\" title = \"Photoresist thickness measurement n,k dispersion\" data-src = \"https:\/\/www.semiconsoft.com\/wp2\/wp-content\/uploads\/2023\/11\/nk_cauchy_PR.jpg\" src =\"data:image\/png;base64,iVBORw0KGgoAAAANSUhEUgAAAAEAAAABCAQAAAC1HAwCAAAAC0lEQVR42mNkYAAAAAYAAjCB0C8AAAAASUVORK5CYII=\"  \/><\/a><\/div><style>.tatsu-BJ_GOel7T .tatsu-single-image-inner{border-style: solid;max-width: 100%;}.tatsu-BJ_GOel7T.tatsu-single-image{transform: translate3d(0px,0px, 0);}<\/style><\/div><\/div><\/div><div class = \"tatsu-column-bg-image-wrap\"><div class = \"tatsu-column-bg-image tatsu-bg-lazyload\" data-src = \"\"><\/div><\/div><div class=\"tatsu-overlay tatsu-column-overlay tatsu-animate-none\" ><\/div><\/div><style>.tatsu-row > .tatsu-Hk2bdelXp.tatsu-column{width: 50.9%;}.tatsu-Hk2bdelXp.tatsu-column > .tatsu-column-inner > .tatsu-column-overlay{mix-blend-mode: normal;}.tatsu-Hk2bdelXp > .tatsu-column-inner > .tatsu-top-divider{z-index: 9999;}.tatsu-Hk2bdelXp > .tatsu-column-inner > .tatsu-bottom-divider{z-index: 9999;}.tatsu-Hk2bdelXp > .tatsu-column-inner > .tatsu-left-divider{z-index: 9999;}.tatsu-Hk2bdelXp > .tatsu-column-inner > .tatsu-right-divider{z-index: 9999;}@media only screen and (max-width:1377px) {.tatsu-row > .tatsu-Hk2bdelXp.tatsu-column{width: 50%;}}@media only screen and (min-width:768px) and (max-width: 1024px) {.tatsu-row > .tatsu-Hk2bdelXp.tatsu-column{width: 50%;}}@media only screen and (max-width: 767px) {.tatsu-row > .tatsu-Hk2bdelXp.tatsu-column{width: 100%;}}<\/style><\/div><div  class=\"tatsu-column  tatsu-bg-overlay tatsu-one-half tatsu-column-image-none tatsu-column-effect-none  tatsu-rkx2bOexXp\"  data-parallax-speed=\"0\" style=\"\"><div class=\"tatsu-column-inner \" ><div class=\"tatsu-column-pad-wrap\"><div class=\"tatsu-column-pad\" ><div  class=\"tatsu-module tatsu-inline-text clearfix tatsu-Hk1m_gl7T   \" ><style>.tatsu-Hk1m_gl7T .tatsu-inline-text-inner{width: 100%;text-align: left;}@media only screen and (max-width: 767px) {.tatsu-Hk1m_gl7T .tatsu-inline-text-inner{width: 100%;}}<\/style><div class=\"tatsu-inline-text-inner tatsu-align-center\">\n<h5>Creating Photoresist material<\/h5>\n<p>Creating a new material to represent AZ1580 photoresist dispersion. CauchyK material type is used. Cauchy approximation defines optical constants dispersion across the wavelength range using only 3 coefficients. These coefficients were taken from the <a href=\"https:\/\/www.microchemicals.com\/dokumente\/datenblaetter\/tds\/merck\/en\/tds_az_1500_series.pdf\" target=\"_blank\" rel=\"noopener\">AZ1500 photoresist specification sheet<\/a>. Cauchy coefficients are given for an unexposed photoresist of AZ1500 series, soft baked at optimal conditions. Individual photoresists may have different solvent concentration and baking conditions &#8211; this will require an adjustment of the Cauchy coefficients. CauchyK is an extension of the Cauchy that applies the dispersion relations to both the refractive index (n) and extinction coefficient(k). The k is currently 0 &#8211; we reserve it for the future use with underbaked photoresist where absorption is noticeably present.\u00a0<\/p>\n<\/div><\/div><\/div><\/div><div class = \"tatsu-column-bg-image-wrap\"><div class = \"tatsu-column-bg-image tatsu-bg-lazyload\" data-src = \"\"><\/div><\/div><div class=\"tatsu-overlay tatsu-column-overlay tatsu-animate-none\" ><\/div><\/div><style>.tatsu-row > .tatsu-rkx2bOexXp.tatsu-column{width: 49.1%;}.tatsu-rkx2bOexXp.tatsu-column > .tatsu-column-inner > .tatsu-column-overlay{mix-blend-mode: normal;}.tatsu-rkx2bOexXp > .tatsu-column-inner > .tatsu-top-divider{z-index: 9999;}.tatsu-rkx2bOexXp > .tatsu-column-inner > .tatsu-bottom-divider{z-index: 9999;}.tatsu-rkx2bOexXp > .tatsu-column-inner > .tatsu-left-divider{z-index: 9999;}.tatsu-rkx2bOexXp > .tatsu-column-inner > .tatsu-right-divider{z-index: 9999;}@media only screen and (max-width:1377px) {.tatsu-row > .tatsu-rkx2bOexXp.tatsu-column{width: 50%;}}@media only screen and (min-width:768px) and (max-width: 1024px) {.tatsu-row > .tatsu-rkx2bOexXp.tatsu-column{width: 50%;}}@media only screen and (max-width: 767px) {.tatsu-row > .tatsu-rkx2bOexXp.tatsu-column{width: 100%;}}<\/style><\/div><\/div><\/div><div class=\"tatsu-row-wrap  tatsu-wrap tatsu-row-one-col tatsu-row-has-one-cols tatsu-medium-gutter tatsu-reg-cols  tatsu-clearfix tatsu-BJgawKLxma\" ><div  class=\"tatsu-row \" ><div  class=\"tatsu-column  tatsu-bg-overlay tatsu-one-col tatsu-column-image-none tatsu-column-effect-none  tatsu-rJpDYUlXT\"  data-parallax-speed=\"0\" style=\"\"><div class=\"tatsu-column-inner \" ><div class=\"tatsu-column-pad-wrap\"><div class=\"tatsu-column-pad\" ><div  class=\"tatsu-module tatsu-inline-text clearfix tatsu-SymdY8gm6   \" ><style>.tatsu-SymdY8gm6 .tatsu-inline-text-inner{width: 100%;text-align: left;}@media only screen and (max-width: 767px) {.tatsu-SymdY8gm6 .tatsu-inline-text-inner{width: 100%;}}<\/style><div class=\"tatsu-inline-text-inner tatsu-align-center\">\n<h5>Measuring a fully baked photoresist<\/h5>\n<\/div><\/div><\/div><\/div><div class = \"tatsu-column-bg-image-wrap\"><div class = \"tatsu-column-bg-image tatsu-bg-lazyload\" data-src = \"\"><\/div><\/div><div class=\"tatsu-overlay tatsu-column-overlay tatsu-animate-none\" ><\/div><\/div><style>.tatsu-row > .tatsu-rJpDYUlXT.tatsu-column{width: 100%;}.tatsu-rJpDYUlXT.tatsu-column > .tatsu-column-inner > .tatsu-column-overlay{mix-blend-mode: normal;}.tatsu-rJpDYUlXT > .tatsu-column-inner > .tatsu-top-divider{z-index: 9999;}.tatsu-rJpDYUlXT > .tatsu-column-inner > .tatsu-bottom-divider{z-index: 9999;}.tatsu-rJpDYUlXT > .tatsu-column-inner > .tatsu-left-divider{z-index: 9999;}.tatsu-rJpDYUlXT > .tatsu-column-inner > .tatsu-right-divider{z-index: 9999;}@media only screen and (max-width:1377px) {.tatsu-row > .tatsu-rJpDYUlXT.tatsu-column{width: 100%;}}@media only screen and (min-width:768px) and (max-width: 1024px) {.tatsu-row > .tatsu-rJpDYUlXT.tatsu-column{width: 100%;}}@media only screen and (max-width: 767px) {.tatsu-row > .tatsu-rJpDYUlXT.tatsu-column{width: 100%;}}<\/style><\/div><\/div><\/div><div class=\"tatsu-row-wrap  tatsu-wrap tatsu-row-has-one-half tatsu-row-has-two-cols tatsu-medium-gutter tatsu-reg-cols  tatsu-clearfix tatsu-Syldw6glXa\" ><div  class=\"tatsu-row \" ><div  class=\"tatsu-column  tatsu-bg-overlay tatsu-one-half tatsu-column-image-none tatsu-column-effect-none  tatsu-ryD_aegQa\"  data-parallax-speed=\"0\" style=\"\"><div class=\"tatsu-column-inner \" ><div class=\"tatsu-column-pad-wrap\"><div class=\"tatsu-column-pad\" ><div  class=\"tatsu-single-image tatsu-module tatsu-image-lazyload tatsu-BJItpexmp  \" ><div class=\"tatsu-single-image-inner \" style=\"width : 600px;\" ><div class = \"tatsu-single-image-padding-wrap\" style = \"padding-bottom : 47.333333333333%;\" ><\/div><a class = \"mfp-image\" href = \"https:\/\/www.semiconsoft.com\/wp2\/wp-content\/uploads\/2023\/11\/BakedPR_curveFit.jpg\" ><img class = \"tatsu-gradient-border\" alt = \"photoresist thickness measurement: baked photoresist fit\" title = \"photoresist thickness measurement: baked photoresist fit\" data-src = \"https:\/\/www.semiconsoft.com\/wp2\/wp-content\/uploads\/2023\/11\/BakedPR_curveFit.jpg\" src =\"data:image\/png;base64,iVBORw0KGgoAAAANSUhEUgAAAAEAAAABCAQAAAC1HAwCAAAAC0lEQVR42mNkYAAAAAYAAjCB0C8AAAAASUVORK5CYII=\"  \/><\/a><\/div><style>.tatsu-BJItpexmp .tatsu-single-image-inner{border-style: solid;max-width: 100%;}.tatsu-BJItpexmp.tatsu-single-image{transform: translate3d(0px,0px, 0);}<\/style><\/div><div class=\"tatsu-row-wrap  tatsu-row-one-col tatsu-row-has-one-cols tatsu-medium-gutter tatsu-reg-cols tatsu-inner-row-wrap  tatsu-clearfix tatsu-SklycRxxma\" ><div  class=\"tatsu-row \" ><div  class=\"tatsu-column  tatsu-bg-overlay tatsu-one-col tatsu-column-image- tatsu-column-effect-  tatsu-Byk9Agxma\"  data-parallax-speed=\"0\" style=\"\"><div class=\"tatsu-column-inner \" ><div class=\"tatsu-column-pad-wrap\"><div class=\"tatsu-column-pad\" ><div  class=\"tatsu-module tatsu-inline-text clearfix tatsu-HyU9ClgXa   \" ><style>.tatsu-HyU9ClgXa .tatsu-inline-text-inner{width: 100%;text-align: left;}@media only screen and (max-width: 767px) {.tatsu-HyU9ClgXa .tatsu-inline-text-inner{width: 100%;}}<\/style><div class=\"tatsu-inline-text-inner tatsu-align-center\">\n<p>AZ1580 photoresist on Si wafer: fully soft baked. Fit of the model to measured data shows a very good fit<\/p>\n<\/div><\/div><\/div><\/div><div class = \"tatsu-column-bg-image-wrap\"><div class = \"tatsu-column-bg-image tatsu-bg-lazyload\" data-src = \"\"><\/div><\/div><div class=\"tatsu-overlay tatsu-column-overlay tatsu-animate-none\" ><\/div><\/div><style>.tatsu-row > .tatsu-Byk9Agxma.tatsu-column{width: 100%;}.tatsu-Byk9Agxma.tatsu-column > .tatsu-column-inner > .tatsu-column-overlay{mix-blend-mode: normal;}.tatsu-Byk9Agxma > .tatsu-column-inner > .tatsu-top-divider{z-index: 9999;}.tatsu-Byk9Agxma > .tatsu-column-inner > .tatsu-bottom-divider{z-index: 9999;}.tatsu-Byk9Agxma > .tatsu-column-inner > .tatsu-left-divider{z-index: 9999;}.tatsu-Byk9Agxma > .tatsu-column-inner > .tatsu-right-divider{z-index: 9999;}@media only screen and (max-width:1377px) {.tatsu-row > .tatsu-Byk9Agxma.tatsu-column{width: 100%;}}@media only screen and (min-width:768px) and (max-width: 1024px) {.tatsu-row > .tatsu-Byk9Agxma.tatsu-column{width: 100%;}}@media only screen and (max-width: 767px) {.tatsu-row > .tatsu-Byk9Agxma.tatsu-column{width: 100%;}}<\/style><\/div><\/div><\/div><\/div><\/div><div class = \"tatsu-column-bg-image-wrap\"><div class = \"tatsu-column-bg-image tatsu-bg-lazyload\" data-src = \"\"><\/div><\/div><div class=\"tatsu-overlay tatsu-column-overlay tatsu-animate-none\" ><\/div><\/div><style>.tatsu-row > .tatsu-ryD_aegQa.tatsu-column{width: 50%;}.tatsu-ryD_aegQa.tatsu-column > .tatsu-column-inner > .tatsu-column-overlay{mix-blend-mode: normal;}.tatsu-ryD_aegQa > .tatsu-column-inner > .tatsu-top-divider{z-index: 9999;}.tatsu-ryD_aegQa > .tatsu-column-inner > .tatsu-bottom-divider{z-index: 9999;}.tatsu-ryD_aegQa > .tatsu-column-inner > .tatsu-left-divider{z-index: 9999;}.tatsu-ryD_aegQa > .tatsu-column-inner > .tatsu-right-divider{z-index: 9999;}@media only screen and (max-width:1377px) {.tatsu-row > .tatsu-ryD_aegQa.tatsu-column{width: 50%;}}@media only screen and (min-width:768px) and (max-width: 1024px) {.tatsu-row > .tatsu-ryD_aegQa.tatsu-column{width: 50%;}}@media only screen and (max-width: 767px) {.tatsu-row > .tatsu-ryD_aegQa.tatsu-column{width: 100%;}}<\/style><\/div><div  class=\"tatsu-column  tatsu-bg-overlay tatsu-one-half tatsu-column-image-none tatsu-column-effect-none  tatsu-Sylv_6ggma\"  data-parallax-speed=\"0\" style=\"\"><div class=\"tatsu-column-inner \" ><div class=\"tatsu-column-pad-wrap\"><div class=\"tatsu-column-pad\" ><div  class=\"tatsu-single-image tatsu-module tatsu-image-lazyload tatsu-BydJAxg76  \" ><div class=\"tatsu-single-image-inner \" style=\"width : 600px;\" ><div class = \"tatsu-single-image-padding-wrap\" style = \"padding-bottom : 47.333333333333%;\" ><\/div><a class = \"mfp-image\" href = \"https:\/\/www.semiconsoft.com\/wp2\/wp-content\/uploads\/2023\/11\/BakedPR_FFT.jpg\" ><img class = \"tatsu-gradient-border\" alt = \"photoresist thickness measurement: baked photoresist FFT\" title = \"photoresist thickness measurement: baked photoresist FFT\" data-src = \"https:\/\/www.semiconsoft.com\/wp2\/wp-content\/uploads\/2023\/11\/BakedPR_FFT.jpg\" src =\"data:image\/png;base64,iVBORw0KGgoAAAANSUhEUgAAAAEAAAABCAQAAAC1HAwCAAAAC0lEQVR42mNkYAAAAAYAAjCB0C8AAAAASUVORK5CYII=\"  \/><\/a><\/div><style>.tatsu-BydJAxg76 .tatsu-single-image-inner{border-style: solid;max-width: 100%;}.tatsu-BydJAxg76.tatsu-single-image{transform: translate3d(0px,0px, 0);}<\/style><\/div><div class=\"tatsu-row-wrap  tatsu-row-one-col tatsu-row-has-one-cols tatsu-medium-gutter tatsu-reg-cols tatsu-inner-row-wrap  tatsu-clearfix tatsu-S1e1XJbx7p\" ><div  class=\"tatsu-row \" ><div  class=\"tatsu-column  tatsu-bg-overlay tatsu-one-col tatsu-column-image- tatsu-column-effect-  tatsu-HykX1-gXT\"  data-parallax-speed=\"0\" style=\"\"><div class=\"tatsu-column-inner \" ><div class=\"tatsu-column-pad-wrap\"><div class=\"tatsu-column-pad\" ><div  class=\"tatsu-module tatsu-inline-text clearfix tatsu-rkV7J-lQ6   \" ><style>.tatsu-rkV7J-lQ6 .tatsu-inline-text-inner{width: 100%;text-align: left;}@media only screen and (max-width: 767px) {.tatsu-rkV7J-lQ6 .tatsu-inline-text-inner{width: 100%;}}<\/style><div class=\"tatsu-inline-text-inner tatsu-align-center\">\n<p>Thick film (FFT) data analysis of the same measurement &#8211; matches perfectly well the curve-fitting result (< 0.2 nm difference in thickness)\u00a0<\/p>\n<\/div><\/div><\/div><\/div><div class = \"tatsu-column-bg-image-wrap\"><div class = \"tatsu-column-bg-image tatsu-bg-lazyload\" data-src = \"\"><\/div><\/div><div class=\"tatsu-overlay tatsu-column-overlay tatsu-animate-none\" ><\/div><\/div><style>.tatsu-row > .tatsu-HykX1-gXT.tatsu-column{width: 100%;}.tatsu-HykX1-gXT.tatsu-column > .tatsu-column-inner > .tatsu-column-overlay{mix-blend-mode: normal;}.tatsu-HykX1-gXT > .tatsu-column-inner > .tatsu-top-divider{z-index: 9999;}.tatsu-HykX1-gXT > .tatsu-column-inner > .tatsu-bottom-divider{z-index: 9999;}.tatsu-HykX1-gXT > .tatsu-column-inner > .tatsu-left-divider{z-index: 9999;}.tatsu-HykX1-gXT > .tatsu-column-inner > .tatsu-right-divider{z-index: 9999;}@media only screen and (max-width:1377px) {.tatsu-row > .tatsu-HykX1-gXT.tatsu-column{width: 100%;}}@media only screen and (min-width:768px) and (max-width: 1024px) {.tatsu-row > .tatsu-HykX1-gXT.tatsu-column{width: 100%;}}@media only screen and (max-width: 767px) {.tatsu-row > .tatsu-HykX1-gXT.tatsu-column{width: 100%;}}<\/style><\/div><\/div><\/div><\/div><\/div><div class = \"tatsu-column-bg-image-wrap\"><div class = \"tatsu-column-bg-image tatsu-bg-lazyload\" data-src = \"\"><\/div><\/div><div class=\"tatsu-overlay tatsu-column-overlay tatsu-animate-none\" ><\/div><\/div><style>.tatsu-row > .tatsu-Sylv_6ggma.tatsu-column{width: 50%;}.tatsu-Sylv_6ggma.tatsu-column > .tatsu-column-inner > .tatsu-column-overlay{mix-blend-mode: normal;}.tatsu-Sylv_6ggma > .tatsu-column-inner > .tatsu-top-divider{z-index: 9999;}.tatsu-Sylv_6ggma > .tatsu-column-inner > .tatsu-bottom-divider{z-index: 9999;}.tatsu-Sylv_6ggma > .tatsu-column-inner > .tatsu-left-divider{z-index: 9999;}.tatsu-Sylv_6ggma > .tatsu-column-inner > .tatsu-right-divider{z-index: 9999;}@media only screen and (max-width:1377px) {.tatsu-row > .tatsu-Sylv_6ggma.tatsu-column{width: 50%;}}@media only screen and (min-width:768px) and (max-width: 1024px) {.tatsu-row > .tatsu-Sylv_6ggma.tatsu-column{width: 50%;}}@media only screen and (max-width: 767px) {.tatsu-row > .tatsu-Sylv_6ggma.tatsu-column{width: 100%;}}<\/style><\/div><\/div><\/div><div class=\"tatsu-row-wrap  tatsu-wrap tatsu-row-one-col tatsu-row-has-one-cols tatsu-medium-gutter tatsu-reg-cols  tatsu-clearfix tatsu-H1lW_HDx76\" ><div  class=\"tatsu-row \" ><div  class=\"tatsu-column  tatsu-bg-overlay tatsu-one-col tatsu-column-image-none tatsu-column-effect-none  tatsu-r1ZOSDgX6\"  data-parallax-speed=\"0\" style=\"\"><div class=\"tatsu-column-inner \" ><div class=\"tatsu-column-pad-wrap\"><div class=\"tatsu-column-pad\" ><div  class=\"tatsu-module tatsu-inline-text clearfix tatsu-SymOHwl76   \" ><style>.tatsu-SymOHwl76 .tatsu-inline-text-inner{width: 100%;text-align: left;}@media only screen and (max-width: 767px) {.tatsu-SymOHwl76 .tatsu-inline-text-inner{width: 100%;}}<\/style><div class=\"tatsu-inline-text-inner tatsu-align-center\">\n<h5>Measuring a partially baked photoresist\u00a0<\/h5>\n<\/div><\/div><\/div><\/div><div class = \"tatsu-column-bg-image-wrap\"><div class = \"tatsu-column-bg-image tatsu-bg-lazyload\" data-src = \"\"><\/div><\/div><div class=\"tatsu-overlay tatsu-column-overlay tatsu-animate-none\" ><\/div><\/div><style>.tatsu-row > .tatsu-r1ZOSDgX6.tatsu-column{width: 100%;}.tatsu-r1ZOSDgX6.tatsu-column > .tatsu-column-inner > .tatsu-column-overlay{mix-blend-mode: normal;}.tatsu-r1ZOSDgX6 > .tatsu-column-inner > .tatsu-top-divider{z-index: 9999;}.tatsu-r1ZOSDgX6 > .tatsu-column-inner > .tatsu-bottom-divider{z-index: 9999;}.tatsu-r1ZOSDgX6 > .tatsu-column-inner > .tatsu-left-divider{z-index: 9999;}.tatsu-r1ZOSDgX6 > .tatsu-column-inner > .tatsu-right-divider{z-index: 9999;}@media only screen and (max-width:1377px) {.tatsu-row > .tatsu-r1ZOSDgX6.tatsu-column{width: 100%;}}@media only screen and (min-width:768px) and (max-width: 1024px) {.tatsu-row > .tatsu-r1ZOSDgX6.tatsu-column{width: 100%;}}@media only screen and (max-width: 767px) {.tatsu-row > .tatsu-r1ZOSDgX6.tatsu-column{width: 100%;}}<\/style><\/div><\/div><\/div><div class=\"tatsu-row-wrap  tatsu-wrap tatsu-row-has-three-cols tatsu-medium-gutter tatsu-reg-cols  tatsu-clearfix tatsu-S1x8RfbxQT\" ><div  class=\"tatsu-row \" ><div  class=\"tatsu-column  tatsu-bg-overlay tatsu-one-third tatsu-column-image-none tatsu-column-effect-none  tatsu-HJg1Qblma\"  data-parallax-speed=\"0\" style=\"\"><div class=\"tatsu-column-inner \" ><div class=\"tatsu-column-pad-wrap\"><div class=\"tatsu-column-pad\" ><div  class=\"tatsu-single-image tatsu-module tatsu-image-lazyload tatsu-HyllXWgQT  \" ><div class=\"tatsu-single-image-inner \" style=\"width : 600px;\" ><div class = \"tatsu-single-image-padding-wrap\" style = \"padding-bottom : 70.833333333333%;\" ><\/div><a class = \"mfp-image\" href = \"https:\/\/www.semiconsoft.com\/wp2\/wp-content\/uploads\/2023\/11\/light_baked_fit-1.jpg\" ><img class = \"tatsu-gradient-border\" alt = \"photoresist thickness measurement curve fitting\" title = \"light baked photoresist fit\" data-src = \"https:\/\/www.semiconsoft.com\/wp2\/wp-content\/uploads\/2023\/11\/light_baked_fit-1.jpg\" src =\"data:image\/png;base64,iVBORw0KGgoAAAANSUhEUgAAAAEAAAABCAQAAAC1HAwCAAAAC0lEQVR42mNkYAAAAAYAAjCB0C8AAAAASUVORK5CYII=\"  \/><\/a><\/div><style>.tatsu-HyllXWgQT .tatsu-single-image-inner{border-style: solid;max-width: 100%;}.tatsu-HyllXWgQT.tatsu-single-image{transform: translate3d(0px,0px, 0);}<\/style><\/div><div class=\"tatsu-row-wrap  tatsu-row-one-col tatsu-row-has-one-cols tatsu-medium-gutter tatsu-reg-cols tatsu-inner-row-wrap  tatsu-clearfix tatsu-SygE94bxQ6\" ><div  class=\"tatsu-row \" ><div  class=\"tatsu-column  tatsu-bg-overlay tatsu-one-col tatsu-column-image- tatsu-column-effect-  tatsu-BJ49VbxXa\"  data-parallax-speed=\"0\" style=\"\"><div class=\"tatsu-column-inner \" ><div class=\"tatsu-column-pad-wrap\"><div class=\"tatsu-column-pad\" ><div  class=\"tatsu-module tatsu-inline-text clearfix tatsu-rk95VWlmT   \" ><style>.tatsu-rk95VWlmT .tatsu-inline-text-inner{width: 100%;text-align: left;}@media only screen and (max-width: 767px) {.tatsu-rk95VWlmT .tatsu-inline-text-inner{width: 100%;}}<\/style><div class=\"tatsu-inline-text-inner tatsu-align-center\">\n<p><span style=\"font-size: 17px; background-color: #ffffff;\">AZ1580 photoresist on Si wafer: partially baked. There is a significant descrepancy in the fit of the model to the data. It indicates that optical constants need to be adjusted\u00a0<\/span><\/p>\n<\/div><\/div><\/div><\/div><div class = \"tatsu-column-bg-image-wrap\"><div class = \"tatsu-column-bg-image tatsu-bg-lazyload\" data-src = \"\"><\/div><\/div><div class=\"tatsu-overlay tatsu-column-overlay tatsu-animate-none\" ><\/div><\/div><style>.tatsu-row > .tatsu-BJ49VbxXa.tatsu-column{width: 100%;}.tatsu-BJ49VbxXa.tatsu-column > .tatsu-column-inner > .tatsu-column-overlay{mix-blend-mode: normal;}.tatsu-BJ49VbxXa > .tatsu-column-inner > .tatsu-top-divider{z-index: 9999;}.tatsu-BJ49VbxXa > .tatsu-column-inner > .tatsu-bottom-divider{z-index: 9999;}.tatsu-BJ49VbxXa > .tatsu-column-inner > .tatsu-left-divider{z-index: 9999;}.tatsu-BJ49VbxXa > .tatsu-column-inner > .tatsu-right-divider{z-index: 9999;}@media only screen and (max-width:1377px) {.tatsu-row > .tatsu-BJ49VbxXa.tatsu-column{width: 100%;}}@media only screen and (min-width:768px) and (max-width: 1024px) {.tatsu-row > .tatsu-BJ49VbxXa.tatsu-column{width: 100%;}}@media only screen and (max-width: 767px) {.tatsu-row > .tatsu-BJ49VbxXa.tatsu-column{width: 100%;}}<\/style><\/div><\/div><\/div><\/div><\/div><div class = \"tatsu-column-bg-image-wrap\"><div class = \"tatsu-column-bg-image tatsu-bg-lazyload\" data-src = \"\"><\/div><\/div><div class=\"tatsu-overlay tatsu-column-overlay tatsu-animate-none\" ><\/div><\/div><style>.tatsu-row > .tatsu-HJg1Qblma.tatsu-column{width: 33.33%;}.tatsu-HJg1Qblma.tatsu-column > .tatsu-column-inner > .tatsu-column-overlay{mix-blend-mode: normal;}.tatsu-HJg1Qblma > .tatsu-column-inner > .tatsu-top-divider{z-index: 9999;}.tatsu-HJg1Qblma > .tatsu-column-inner > .tatsu-bottom-divider{z-index: 9999;}.tatsu-HJg1Qblma > .tatsu-column-inner > .tatsu-left-divider{z-index: 9999;}.tatsu-HJg1Qblma > .tatsu-column-inner > .tatsu-right-divider{z-index: 9999;}@media only screen and (max-width:1377px) {.tatsu-row > .tatsu-HJg1Qblma.tatsu-column{width: 33.33%;}}@media only screen and (min-width:768px) and (max-width: 1024px) {.tatsu-row > .tatsu-HJg1Qblma.tatsu-column{width: 33.33%;}}@media only screen and (max-width: 767px) {.tatsu-row > .tatsu-HJg1Qblma.tatsu-column{width: 100%;}}<\/style><\/div><div  class=\"tatsu-column  tatsu-bg-overlay tatsu-one-third tatsu-column-image-none tatsu-column-effect-none  tatsu-BJgl1XZemT\"  data-parallax-speed=\"0\" style=\"\"><div class=\"tatsu-column-inner \" ><div class=\"tatsu-column-pad-wrap\"><div class=\"tatsu-column-pad\" ><div  class=\"tatsu-single-image tatsu-module tatsu-image-lazyload tatsu-S1zYmZlXa  \" ><div class=\"tatsu-single-image-inner \" style=\"width : 600px;\" ><div class = \"tatsu-single-image-padding-wrap\" style = \"padding-bottom : 62.833333333333%;\" ><\/div><a class = \"mfp-image\" href = \"https:\/\/www.semiconsoft.com\/wp2\/wp-content\/uploads\/2023\/11\/LightBaked_nkadj_fit.jpg\" ><img class = \"tatsu-gradient-border\" alt = \"photoresist thickness measurement: light baked fit\" title = \"Light baked photoresist fit, nk\" data-src = \"https:\/\/www.semiconsoft.com\/wp2\/wp-content\/uploads\/2023\/11\/LightBaked_nkadj_fit.jpg\" src =\"data:image\/png;base64,iVBORw0KGgoAAAANSUhEUgAAAAEAAAABCAQAAAC1HAwCAAAAC0lEQVR42mNkYAAAAAYAAjCB0C8AAAAASUVORK5CYII=\"  \/><\/a><\/div><style>.tatsu-S1zYmZlXa .tatsu-single-image-inner{border-style: solid;max-width: 100%;}.tatsu-S1zYmZlXa.tatsu-single-image{transform: translate3d(0px,0px, 0);}<\/style><\/div><div class=\"tatsu-row-wrap  tatsu-row-one-col tatsu-row-has-one-cols tatsu-medium-gutter tatsu-reg-cols tatsu-inner-row-wrap  tatsu-clearfix tatsu-Bkg6wv-eXT\" ><div  class=\"tatsu-row \" ><div  class=\"tatsu-column  tatsu-bg-overlay tatsu-one-col tatsu-column-image- tatsu-column-effect-  tatsu-HJTPPZlXT\"  data-parallax-speed=\"0\" style=\"\"><div class=\"tatsu-column-inner \" ><div class=\"tatsu-column-pad-wrap\"><div class=\"tatsu-column-pad\" ><div  class=\"tatsu-module tatsu-inline-text clearfix tatsu-ryfOvWx76   \" ><style>.tatsu-ryfOvWx76 .tatsu-inline-text-inner{width: 100%;text-align: left;}@media only screen and (max-width: 767px) {.tatsu-ryfOvWx76 .tatsu-inline-text-inner{width: 100%;}}<\/style><div class=\"tatsu-inline-text-inner tatsu-align-center\">\n<p>Thickness and n,k dispersion of the photoresist are measured to improve the fit to the data. Thickness has increased by ~500nm (as compared to original result) and refractive index descreased. This is consistent with underbaked photoresist that has lower density<\/p>\n<\/div><\/div><\/div><\/div><div class = \"tatsu-column-bg-image-wrap\"><div class = \"tatsu-column-bg-image tatsu-bg-lazyload\" data-src = \"\"><\/div><\/div><div class=\"tatsu-overlay tatsu-column-overlay tatsu-animate-none\" ><\/div><\/div><style>.tatsu-row > .tatsu-HJTPPZlXT.tatsu-column{width: 100%;}.tatsu-HJTPPZlXT.tatsu-column > .tatsu-column-inner > .tatsu-column-overlay{mix-blend-mode: normal;}.tatsu-HJTPPZlXT > .tatsu-column-inner > .tatsu-top-divider{z-index: 9999;}.tatsu-HJTPPZlXT > .tatsu-column-inner > .tatsu-bottom-divider{z-index: 9999;}.tatsu-HJTPPZlXT > .tatsu-column-inner > .tatsu-left-divider{z-index: 9999;}.tatsu-HJTPPZlXT > .tatsu-column-inner > .tatsu-right-divider{z-index: 9999;}@media only screen and (max-width:1377px) {.tatsu-row > .tatsu-HJTPPZlXT.tatsu-column{width: 100%;}}@media only screen and (min-width:768px) and (max-width: 1024px) {.tatsu-row > .tatsu-HJTPPZlXT.tatsu-column{width: 100%;}}@media only screen and (max-width: 767px) {.tatsu-row > .tatsu-HJTPPZlXT.tatsu-column{width: 100%;}}<\/style><\/div><\/div><\/div><\/div><\/div><div class = \"tatsu-column-bg-image-wrap\"><div class = \"tatsu-column-bg-image tatsu-bg-lazyload\" data-src = \"\"><\/div><\/div><div class=\"tatsu-overlay tatsu-column-overlay tatsu-animate-none\" ><\/div><\/div><style>.tatsu-row > .tatsu-BJgl1XZemT.tatsu-column{width: 33.33%;}.tatsu-BJgl1XZemT.tatsu-column > .tatsu-column-inner > .tatsu-column-overlay{mix-blend-mode: normal;}.tatsu-BJgl1XZemT > .tatsu-column-inner > .tatsu-top-divider{z-index: 9999;}.tatsu-BJgl1XZemT > .tatsu-column-inner > .tatsu-bottom-divider{z-index: 9999;}.tatsu-BJgl1XZemT > .tatsu-column-inner > .tatsu-left-divider{z-index: 9999;}.tatsu-BJgl1XZemT > .tatsu-column-inner > .tatsu-right-divider{z-index: 9999;}@media only screen and (max-width:1377px) {.tatsu-row > .tatsu-BJgl1XZemT.tatsu-column{width: 33.33%;}}@media only screen and (min-width:768px) and (max-width: 1024px) {.tatsu-row > .tatsu-BJgl1XZemT.tatsu-column{width: 33.33%;}}@media only screen and (max-width: 767px) {.tatsu-row > .tatsu-BJgl1XZemT.tatsu-column{width: 100%;}}<\/style><\/div><div  class=\"tatsu-column  tatsu-bg-overlay tatsu-one-third tatsu-column-image-none tatsu-column-effect-none  tatsu-ryZl17-xmp\"  data-parallax-speed=\"0\" style=\"\"><div class=\"tatsu-column-inner \" ><div class=\"tatsu-column-pad-wrap\"><div class=\"tatsu-column-pad\" ><div  class=\"tatsu-single-image tatsu-module tatsu-image-lazyload tatsu-B1skEWg7a  \" ><div class=\"tatsu-single-image-inner \" style=\"width : 600px;\" ><div class = \"tatsu-single-image-padding-wrap\" style = \"padding-bottom : 62.833333333333%;\" ><\/div><a class = \"mfp-image\" href = \"https:\/\/www.semiconsoft.com\/wp2\/wp-content\/uploads\/2023\/11\/softBaked_FFTjpg.jpg\" ><img class = \"tatsu-gradient-border\" alt = \"photoresist thickness measurement: light baked FFT\" title = \"photoresist thickness measurement: light baked FFT\" data-src = \"https:\/\/www.semiconsoft.com\/wp2\/wp-content\/uploads\/2023\/11\/softBaked_FFTjpg.jpg\" src =\"data:image\/png;base64,iVBORw0KGgoAAAANSUhEUgAAAAEAAAABCAQAAAC1HAwCAAAAC0lEQVR42mNkYAAAAAYAAjCB0C8AAAAASUVORK5CYII=\"  \/><\/a><\/div><style>.tatsu-B1skEWg7a .tatsu-single-image-inner{border-style: solid;max-width: 100%;}.tatsu-B1skEWg7a.tatsu-single-image{transform: translate3d(0px,0px, 0);}<\/style><\/div><div class=\"tatsu-row-wrap  tatsu-row-one-col tatsu-row-has-one-cols tatsu-medium-gutter tatsu-reg-cols tatsu-inner-row-wrap  tatsu-clearfix tatsu-r1etMO-lma\" ><div  class=\"tatsu-row \" ><div  class=\"tatsu-column  tatsu-bg-overlay tatsu-one-col tatsu-column-image- tatsu-column-effect-  tatsu-ByKG_bl7p\"  data-parallax-speed=\"0\" style=\"\"><div class=\"tatsu-column-inner \" ><div class=\"tatsu-column-pad-wrap\"><div class=\"tatsu-column-pad\" ><div  class=\"tatsu-module tatsu-inline-text clearfix tatsu-BkyX_-lm6   \" ><style>.tatsu-BkyX_-lm6 .tatsu-inline-text-inner{width: 100%;text-align: left;}@media only screen and (max-width: 767px) {.tatsu-BkyX_-lm6 .tatsu-inline-text-inner{width: 100%;}}<\/style><div class=\"tatsu-inline-text-inner tatsu-align-center\">\n<p>Using of the thick film algorithm (FFT) gives results matching the curve fit thickness on the left. The measured tthickness difference is 2nm. This is mainly due to the presence of the absorption<\/p>\n<\/div><\/div><\/div><\/div><div class = \"tatsu-column-bg-image-wrap\"><div class = \"tatsu-column-bg-image tatsu-bg-lazyload\" data-src = \"\"><\/div><\/div><div class=\"tatsu-overlay tatsu-column-overlay tatsu-animate-none\" ><\/div><\/div><style>.tatsu-row > .tatsu-ByKG_bl7p.tatsu-column{width: 100%;}.tatsu-ByKG_bl7p.tatsu-column > .tatsu-column-inner > .tatsu-column-overlay{mix-blend-mode: normal;}.tatsu-ByKG_bl7p > .tatsu-column-inner > .tatsu-top-divider{z-index: 9999;}.tatsu-ByKG_bl7p > .tatsu-column-inner > .tatsu-bottom-divider{z-index: 9999;}.tatsu-ByKG_bl7p > .tatsu-column-inner > .tatsu-left-divider{z-index: 9999;}.tatsu-ByKG_bl7p > .tatsu-column-inner > .tatsu-right-divider{z-index: 9999;}@media only screen and (max-width:1377px) {.tatsu-row > .tatsu-ByKG_bl7p.tatsu-column{width: 100%;}}@media only screen and (min-width:768px) and (max-width: 1024px) {.tatsu-row > .tatsu-ByKG_bl7p.tatsu-column{width: 100%;}}@media only screen and (max-width: 767px) {.tatsu-row > .tatsu-ByKG_bl7p.tatsu-column{width: 100%;}}<\/style><\/div><\/div><\/div><\/div><\/div><div class = \"tatsu-column-bg-image-wrap\"><div class = \"tatsu-column-bg-image tatsu-bg-lazyload\" data-src = \"\"><\/div><\/div><div class=\"tatsu-overlay tatsu-column-overlay tatsu-animate-none\" ><\/div><\/div><style>.tatsu-row > .tatsu-ryZl17-xmp.tatsu-column{width: 33.33%;}.tatsu-ryZl17-xmp.tatsu-column > .tatsu-column-inner > .tatsu-column-overlay{mix-blend-mode: normal;}.tatsu-ryZl17-xmp > .tatsu-column-inner > .tatsu-top-divider{z-index: 9999;}.tatsu-ryZl17-xmp > .tatsu-column-inner > .tatsu-bottom-divider{z-index: 9999;}.tatsu-ryZl17-xmp > .tatsu-column-inner > .tatsu-left-divider{z-index: 9999;}.tatsu-ryZl17-xmp > .tatsu-column-inner > .tatsu-right-divider{z-index: 9999;}@media only screen and (max-width:1377px) {.tatsu-row > .tatsu-ryZl17-xmp.tatsu-column{width: 33.33%;}}@media only screen and (min-width:768px) and (max-width: 1024px) {.tatsu-row > .tatsu-ryZl17-xmp.tatsu-column{width: 33.33%;}}@media only screen and (max-width: 767px) {.tatsu-row > .tatsu-ryZl17-xmp.tatsu-column{width: 100%;}}<\/style><\/div><\/div><\/div><div class=\"tatsu-row-wrap  tatsu-wrap tatsu-row-one-col tatsu-row-has-one-cols tatsu-medium-gutter tatsu-reg-cols  tatsu-clearfix tatsu-rJeK6Svgm6\" ><div  class=\"tatsu-row \" ><div  class=\"tatsu-column  tatsu-bg-overlay tatsu-one-col tatsu-column-image-none tatsu-column-effect-none  tatsu-HJYaBPxQ6\"  data-parallax-speed=\"0\" style=\"\"><div class=\"tatsu-column-inner \" ><div class=\"tatsu-column-pad-wrap\"><div class=\"tatsu-column-pad\" ><div  class=\"tatsu-module tatsu-inline-text clearfix tatsu-HyapBwg7a   \" ><style>.tatsu-HyapBwg7a .tatsu-inline-text-inner{width: 100%;text-align: left;}@media only screen and (max-width: 767px) {.tatsu-HyapBwg7a .tatsu-inline-text-inner{width: 100%;}}<\/style><div class=\"tatsu-inline-text-inner tatsu-align-center\">\n<h5>Measuring a lightly baked photoresist<\/h5>\n<\/div><\/div><\/div><\/div><div class = \"tatsu-column-bg-image-wrap\"><div class = \"tatsu-column-bg-image tatsu-bg-lazyload\" data-src = \"\"><\/div><\/div><div class=\"tatsu-overlay tatsu-column-overlay tatsu-animate-none\" ><\/div><\/div><style>.tatsu-row > .tatsu-HJYaBPxQ6.tatsu-column{width: 100%;}.tatsu-HJYaBPxQ6.tatsu-column > .tatsu-column-inner > .tatsu-column-overlay{mix-blend-mode: normal;}.tatsu-HJYaBPxQ6 > .tatsu-column-inner > .tatsu-top-divider{z-index: 9999;}.tatsu-HJYaBPxQ6 > .tatsu-column-inner > .tatsu-bottom-divider{z-index: 9999;}.tatsu-HJYaBPxQ6 > .tatsu-column-inner > .tatsu-left-divider{z-index: 9999;}.tatsu-HJYaBPxQ6 > .tatsu-column-inner > .tatsu-right-divider{z-index: 9999;}@media only screen and (max-width:1377px) {.tatsu-row > .tatsu-HJYaBPxQ6.tatsu-column{width: 100%;}}@media only screen and (min-width:768px) and (max-width: 1024px) {.tatsu-row > .tatsu-HJYaBPxQ6.tatsu-column{width: 100%;}}@media only screen and (max-width: 767px) {.tatsu-row > .tatsu-HJYaBPxQ6.tatsu-column{width: 100%;}}<\/style><\/div><\/div><\/div><div class=\"tatsu-row-wrap  tatsu-wrap tatsu-row-has-three-cols tatsu-medium-gutter tatsu-reg-cols  tatsu-clearfix tatsu-H1gGIFbeQa\" ><div  class=\"tatsu-row \" ><div  class=\"tatsu-column  tatsu-bg-overlay tatsu-one-third tatsu-column-image-none tatsu-column-effect-none  tatsu-SJwIFbeXp\"  data-parallax-speed=\"0\" style=\"\"><div class=\"tatsu-column-inner \" ><div class=\"tatsu-column-pad-wrap\"><div class=\"tatsu-column-pad\" ><div  class=\"tatsu-single-image tatsu-module tatsu-image-lazyload tatsu-B1R8YbxXT  \" ><div class=\"tatsu-single-image-inner \" style=\"width : 600px;\" ><div class = \"tatsu-single-image-padding-wrap\" style = \"padding-bottom : 51.833333333333%;\" ><\/div><a class = \"mfp-image\" href = \"https:\/\/www.semiconsoft.com\/wp2\/wp-content\/uploads\/2023\/11\/unbakedPR_Fit.jpg\" ><img class = \"tatsu-gradient-border\" alt = \"underbaked photoresist thickness measurement curve fit\" title = \"underbaked photoresist thickness measurement  curve fit\" data-src = \"https:\/\/www.semiconsoft.com\/wp2\/wp-content\/uploads\/2023\/11\/unbakedPR_Fit.jpg\" src =\"data:image\/png;base64,iVBORw0KGgoAAAANSUhEUgAAAAEAAAABCAQAAAC1HAwCAAAAC0lEQVR42mNkYAAAAAYAAjCB0C8AAAAASUVORK5CYII=\"  \/><\/a><\/div><style>.tatsu-B1R8YbxXT .tatsu-single-image-inner{border-style: solid;max-width: 100%;}.tatsu-B1R8YbxXT.tatsu-single-image{transform: translate3d(0px,0px, 0);}<\/style><\/div><div class=\"tatsu-row-wrap  tatsu-row-one-col tatsu-row-has-one-cols tatsu-medium-gutter tatsu-reg-cols tatsu-inner-row-wrap  tatsu-clearfix tatsu-H1xSJSGem6\" ><div  class=\"tatsu-row \" ><div  class=\"tatsu-column  tatsu-bg-overlay tatsu-one-col tatsu-column-image- tatsu-column-effect-  tatsu-B1ByBMgQ6\"  data-parallax-speed=\"0\" style=\"\"><div class=\"tatsu-column-inner \" ><div class=\"tatsu-column-pad-wrap\"><div class=\"tatsu-column-pad\" ><div  class=\"tatsu-module tatsu-inline-text clearfix tatsu-H1cJSMx76   \" ><style>.tatsu-H1cJSMx76 .tatsu-inline-text-inner{width: 100%;text-align: left;}@media only screen and (max-width: 767px) {.tatsu-H1cJSMx76 .tatsu-inline-text-inner{width: 100%;}}<\/style><div class=\"tatsu-inline-text-inner tatsu-align-center\">\n<p>AZ1580 photoresist on Si wafer: lightly baked. There is a significant descrepancy. It look like there is a residual absorption\u00a0 but , in fact, both n,k and need to be adjusted<\/p>\n<\/div><\/div><\/div><\/div><div class = \"tatsu-column-bg-image-wrap\"><div class = \"tatsu-column-bg-image tatsu-bg-lazyload\" data-src = \"\"><\/div><\/div><div class=\"tatsu-overlay tatsu-column-overlay tatsu-animate-none\" ><\/div><\/div><style>.tatsu-row > .tatsu-B1ByBMgQ6.tatsu-column{width: 100%;}.tatsu-B1ByBMgQ6.tatsu-column > .tatsu-column-inner > .tatsu-column-overlay{mix-blend-mode: normal;}.tatsu-B1ByBMgQ6 > .tatsu-column-inner > .tatsu-top-divider{z-index: 9999;}.tatsu-B1ByBMgQ6 > .tatsu-column-inner > .tatsu-bottom-divider{z-index: 9999;}.tatsu-B1ByBMgQ6 > .tatsu-column-inner > .tatsu-left-divider{z-index: 9999;}.tatsu-B1ByBMgQ6 > .tatsu-column-inner > .tatsu-right-divider{z-index: 9999;}@media only screen and (max-width:1377px) {.tatsu-row > .tatsu-B1ByBMgQ6.tatsu-column{width: 100%;}}@media only screen and (min-width:768px) and (max-width: 1024px) {.tatsu-row > .tatsu-B1ByBMgQ6.tatsu-column{width: 100%;}}@media only screen and (max-width: 767px) {.tatsu-row > .tatsu-B1ByBMgQ6.tatsu-column{width: 100%;}}<\/style><\/div><\/div><\/div><\/div><\/div><div class = \"tatsu-column-bg-image-wrap\"><div class = \"tatsu-column-bg-image tatsu-bg-lazyload\" data-src = \"\"><\/div><\/div><div class=\"tatsu-overlay tatsu-column-overlay tatsu-animate-none\" ><\/div><\/div><style>.tatsu-row > .tatsu-SJwIFbeXp.tatsu-column{width: 33.33%;}.tatsu-SJwIFbeXp.tatsu-column > .tatsu-column-inner > .tatsu-column-overlay{mix-blend-mode: normal;}.tatsu-SJwIFbeXp > .tatsu-column-inner > .tatsu-top-divider{z-index: 9999;}.tatsu-SJwIFbeXp > .tatsu-column-inner > .tatsu-bottom-divider{z-index: 9999;}.tatsu-SJwIFbeXp > .tatsu-column-inner > .tatsu-left-divider{z-index: 9999;}.tatsu-SJwIFbeXp > .tatsu-column-inner > .tatsu-right-divider{z-index: 9999;}@media only screen and (max-width:1377px) {.tatsu-row > .tatsu-SJwIFbeXp.tatsu-column{width: 33.33%;}}@media only screen and (min-width:768px) and (max-width: 1024px) {.tatsu-row > .tatsu-SJwIFbeXp.tatsu-column{width: 33.33%;}}@media only screen and (max-width: 767px) {.tatsu-row > .tatsu-SJwIFbeXp.tatsu-column{width: 100%;}}<\/style><\/div><div  class=\"tatsu-column  tatsu-bg-overlay tatsu-one-third tatsu-column-image-none tatsu-column-effect-none  tatsu-HJlDUKWlQa\"  data-parallax-speed=\"0\" style=\"\"><div class=\"tatsu-column-inner \" ><div class=\"tatsu-column-pad-wrap\"><div class=\"tatsu-column-pad\" ><div  class=\"tatsu-single-image tatsu-module tatsu-image-lazyload tatsu-rku3YWeXa  \" ><div class=\"tatsu-single-image-inner \" style=\"width : 600px;\" ><div class = \"tatsu-single-image-padding-wrap\" style = \"padding-bottom : 47.333333333333%;\" ><\/div><a class = \"mfp-image\" href = \"https:\/\/www.semiconsoft.com\/wp2\/wp-content\/uploads\/2023\/11\/UnbakedPR_fit_nk_adjustment.jpg\" ><img class = \"tatsu-gradient-border\" alt = \"underbaked photoresist thickness measurement FFT\" title = \"underbaked photoresist thickness measurement  FFT\" data-src = \"https:\/\/www.semiconsoft.com\/wp2\/wp-content\/uploads\/2023\/11\/UnbakedPR_fit_nk_adjustment.jpg\" src =\"data:image\/png;base64,iVBORw0KGgoAAAANSUhEUgAAAAEAAAABCAQAAAC1HAwCAAAAC0lEQVR42mNkYAAAAAYAAjCB0C8AAAAASUVORK5CYII=\"  \/><\/a><\/div><style>.tatsu-rku3YWeXa .tatsu-single-image-inner{border-style: solid;max-width: 100%;}.tatsu-rku3YWeXa.tatsu-single-image{transform: translate3d(0px,0px, 0);}<\/style><\/div><div class=\"tatsu-row-wrap  tatsu-row-one-col tatsu-row-has-one-cols tatsu-medium-gutter tatsu-reg-cols tatsu-inner-row-wrap  tatsu-clearfix tatsu-SkgU4UfxQa\" ><div  class=\"tatsu-row \" ><div  class=\"tatsu-column  tatsu-bg-overlay tatsu-one-col tatsu-column-image- tatsu-column-effect-  tatsu-HJLNUfemT\"  data-parallax-speed=\"0\" style=\"\"><div class=\"tatsu-column-inner \" ><div class=\"tatsu-column-pad-wrap\"><div class=\"tatsu-column-pad\" ><div  class=\"tatsu-module tatsu-inline-text clearfix tatsu-rJKEUGxQT   \" ><style>.tatsu-rJKEUGxQT .tatsu-inline-text-inner{width: 100%;text-align: left;}@media only screen and (max-width: 767px) {.tatsu-rJKEUGxQT .tatsu-inline-text-inner{width: 100%;}}<\/style><div class=\"tatsu-inline-text-inner tatsu-align-center\">\n<p>Thickness and n,k of the photoresist are measured to improve the fit. The resulting thickness is significantly higher (almost 30% higher)<\/p>\n<\/div><\/div><\/div><\/div><div class = \"tatsu-column-bg-image-wrap\"><div class = \"tatsu-column-bg-image tatsu-bg-lazyload\" data-src = \"\"><\/div><\/div><div class=\"tatsu-overlay tatsu-column-overlay tatsu-animate-none\" ><\/div><\/div><style>.tatsu-row > .tatsu-HJLNUfemT.tatsu-column{width: 100%;}.tatsu-HJLNUfemT.tatsu-column > .tatsu-column-inner > .tatsu-column-overlay{mix-blend-mode: normal;}.tatsu-HJLNUfemT > .tatsu-column-inner > .tatsu-top-divider{z-index: 9999;}.tatsu-HJLNUfemT > .tatsu-column-inner > .tatsu-bottom-divider{z-index: 9999;}.tatsu-HJLNUfemT > .tatsu-column-inner > .tatsu-left-divider{z-index: 9999;}.tatsu-HJLNUfemT > .tatsu-column-inner > .tatsu-right-divider{z-index: 9999;}@media only screen and (max-width:1377px) {.tatsu-row > .tatsu-HJLNUfemT.tatsu-column{width: 100%;}}@media only screen and (min-width:768px) and (max-width: 1024px) {.tatsu-row > .tatsu-HJLNUfemT.tatsu-column{width: 100%;}}@media only screen and (max-width: 767px) {.tatsu-row > .tatsu-HJLNUfemT.tatsu-column{width: 100%;}}<\/style><\/div><\/div><\/div><\/div><\/div><div class = \"tatsu-column-bg-image-wrap\"><div class = \"tatsu-column-bg-image tatsu-bg-lazyload\" data-src = \"\"><\/div><\/div><div class=\"tatsu-overlay tatsu-column-overlay tatsu-animate-none\" ><\/div><\/div><style>.tatsu-row > .tatsu-HJlDUKWlQa.tatsu-column{width: 33.33%;}.tatsu-HJlDUKWlQa.tatsu-column > .tatsu-column-inner > .tatsu-column-overlay{mix-blend-mode: normal;}.tatsu-HJlDUKWlQa > .tatsu-column-inner > .tatsu-top-divider{z-index: 9999;}.tatsu-HJlDUKWlQa > .tatsu-column-inner > .tatsu-bottom-divider{z-index: 9999;}.tatsu-HJlDUKWlQa > .tatsu-column-inner > .tatsu-left-divider{z-index: 9999;}.tatsu-HJlDUKWlQa > .tatsu-column-inner > .tatsu-right-divider{z-index: 9999;}@media only screen and (max-width:1377px) {.tatsu-row > .tatsu-HJlDUKWlQa.tatsu-column{width: 33.33%;}}@media only screen and (min-width:768px) and (max-width: 1024px) {.tatsu-row > .tatsu-HJlDUKWlQa.tatsu-column{width: 33.33%;}}@media only screen and (max-width: 767px) {.tatsu-row > .tatsu-HJlDUKWlQa.tatsu-column{width: 100%;}}<\/style><\/div><div  class=\"tatsu-column  tatsu-bg-overlay tatsu-one-third tatsu-column-image-none tatsu-column-effect-none  tatsu-rkWD8tbxXa\"  data-parallax-speed=\"0\" style=\"\"><div class=\"tatsu-column-inner \" ><div class=\"tatsu-column-pad-wrap\"><div class=\"tatsu-column-pad\" ><div  class=\"tatsu-single-image tatsu-module tatsu-image-lazyload tatsu-Bkq1cbl7a  \" ><div class=\"tatsu-single-image-inner \" style=\"width : 600px;\" ><div class = \"tatsu-single-image-padding-wrap\" style = \"padding-bottom : 47.833333333333%;\" ><\/div><a class = \"mfp-image\" href = \"https:\/\/www.semiconsoft.com\/wp2\/wp-content\/uploads\/2023\/11\/Unbaked_FFT.jpg\" ><img class = \"tatsu-gradient-border\" alt = \"underbaked photoresist thickness measurement FFT\" title = \"underbaked photoresist thickness measurement  FFT\" data-src = \"https:\/\/www.semiconsoft.com\/wp2\/wp-content\/uploads\/2023\/11\/Unbaked_FFT.jpg\" src =\"data:image\/png;base64,iVBORw0KGgoAAAANSUhEUgAAAAEAAAABCAQAAAC1HAwCAAAAC0lEQVR42mNkYAAAAAYAAjCB0C8AAAAASUVORK5CYII=\"  \/><\/a><\/div><style>.tatsu-Bkq1cbl7a .tatsu-single-image-inner{border-style: solid;max-width: 100%;}.tatsu-Bkq1cbl7a.tatsu-single-image{transform: translate3d(0px,0px, 0);}<\/style><\/div><div class=\"tatsu-row-wrap  tatsu-row-one-col tatsu-row-has-one-cols tatsu-medium-gutter tatsu-reg-cols tatsu-inner-row-wrap  tatsu-clearfix tatsu-HJgZBLGxXp\" ><div  class=\"tatsu-row \" ><div  class=\"tatsu-column  tatsu-bg-overlay tatsu-one-col tatsu-column-image- tatsu-column-effect-  tatsu-Sk-B8GgX6\"  data-parallax-speed=\"0\" style=\"\"><div class=\"tatsu-column-inner \" ><div class=\"tatsu-column-pad-wrap\"><div class=\"tatsu-column-pad\" ><div  class=\"tatsu-module tatsu-inline-text clearfix tatsu-ryESLzeXp   \" ><style>.tatsu-ryESLzeXp .tatsu-inline-text-inner{width: 100%;text-align: left;}@media only screen and (max-width: 767px) {.tatsu-ryESLzeXp .tatsu-inline-text-inner{width: 100%;}}<\/style><div class=\"tatsu-inline-text-inner tatsu-align-center\">\n<p>Using the thick film algorithm(FFT) to determine thickness gives a good match to the curve-fitting result on the left. There is a 3nm difference in thickness due to high absorption.<\/p>\n<\/div><\/div><\/div><\/div><div class = \"tatsu-column-bg-image-wrap\"><div class = \"tatsu-column-bg-image tatsu-bg-lazyload\" data-src = \"\"><\/div><\/div><div class=\"tatsu-overlay tatsu-column-overlay tatsu-animate-none\" ><\/div><\/div><style>.tatsu-row > .tatsu-Sk-B8GgX6.tatsu-column{width: 100%;}.tatsu-Sk-B8GgX6.tatsu-column > .tatsu-column-inner > .tatsu-column-overlay{mix-blend-mode: normal;}.tatsu-Sk-B8GgX6 > .tatsu-column-inner > .tatsu-top-divider{z-index: 9999;}.tatsu-Sk-B8GgX6 > .tatsu-column-inner > .tatsu-bottom-divider{z-index: 9999;}.tatsu-Sk-B8GgX6 > .tatsu-column-inner > .tatsu-left-divider{z-index: 9999;}.tatsu-Sk-B8GgX6 > .tatsu-column-inner > .tatsu-right-divider{z-index: 9999;}@media only screen and (max-width:1377px) {.tatsu-row > .tatsu-Sk-B8GgX6.tatsu-column{width: 100%;}}@media only screen and (min-width:768px) and (max-width: 1024px) {.tatsu-row > .tatsu-Sk-B8GgX6.tatsu-column{width: 100%;}}@media only screen and (max-width: 767px) {.tatsu-row > .tatsu-Sk-B8GgX6.tatsu-column{width: 100%;}}<\/style><\/div><\/div><\/div><\/div><\/div><div class = \"tatsu-column-bg-image-wrap\"><div class = \"tatsu-column-bg-image tatsu-bg-lazyload\" data-src = \"\"><\/div><\/div><div class=\"tatsu-overlay tatsu-column-overlay tatsu-animate-none\" ><\/div><\/div><style>.tatsu-row > .tatsu-rkWD8tbxXa.tatsu-column{width: 33.33%;}.tatsu-rkWD8tbxXa.tatsu-column > .tatsu-column-inner > .tatsu-column-overlay{mix-blend-mode: normal;}.tatsu-rkWD8tbxXa > .tatsu-column-inner > .tatsu-top-divider{z-index: 9999;}.tatsu-rkWD8tbxXa > .tatsu-column-inner > .tatsu-bottom-divider{z-index: 9999;}.tatsu-rkWD8tbxXa > .tatsu-column-inner > .tatsu-left-divider{z-index: 9999;}.tatsu-rkWD8tbxXa > .tatsu-column-inner > .tatsu-right-divider{z-index: 9999;}@media only screen and (max-width:1377px) {.tatsu-row > .tatsu-rkWD8tbxXa.tatsu-column{width: 33.33%;}}@media only screen and (min-width:768px) and (max-width: 1024px) {.tatsu-row > .tatsu-rkWD8tbxXa.tatsu-column{width: 33.33%;}}@media only screen and (max-width: 767px) {.tatsu-row > .tatsu-rkWD8tbxXa.tatsu-column{width: 100%;}}<\/style><\/div><\/div><\/div><\/div><div class=\"tatsu-section-background-wrap\"><div class = \"tatsu-section-background tatsu-bg-lazyload\" data-src = \"\"><\/div><\/div><style>.tatsu-Syph3w7k7a.tatsu-section{background-color: rgba(255,255,255,1);}.tatsu-Syph3w7k7a .tatsu-section-pad{padding: 7px 0px 43px 0px;}.tatsu-Syph3w7k7a > .tatsu-bottom-divider{z-index: 9999;}.tatsu-Syph3w7k7a > .tatsu-top-divider{z-index: 9999;}<\/style><\/div><div  class=\"tatsu-HkLxnhwQkX6 tatsu-section  tatsu-bg-overlay   tatsu-clearfix\" data-title=\"\"  data-headerscheme=\"background--dark\"><div class='tatsu-section-pad clearfix' data-padding='{\"d\":\"1px 0px 0px 0px\"}' data-padding-top='1px'><div class=\"tatsu-row-wrap  tatsu-wrap tatsu-row-has-one-half tatsu-row-has-two-cols tatsu-medium-gutter tatsu-reg-cols  tatsu-clearfix tatsu-SkwenhvX1QT\" ><div  class=\"tatsu-row \" ><div  class=\"tatsu-column  tatsu-bg-overlay tatsu-one-half tatsu-column-image-none tatsu-column-effect-none  tatsu-HJue3nwmyQp\"  data-parallax-speed=\"0\" style=\"\"><div class=\"tatsu-column-inner \" ><div class=\"tatsu-column-pad-wrap\"><div class=\"tatsu-column-pad\" ><div  class=\"tatsu-single-image tatsu-module tatsu-image-lazyload tatsu-SkYghhPmJ76  \" ><div class=\"tatsu-single-image-inner \" style=\"width : 300px;\" ><div class = \"tatsu-single-image-padding-wrap\" style = \"padding-bottom : 95.666666666667%;\" ><\/div><a href = \"https:\/\/www.semiconsoft.com\/wp2\/mprobevis-thin-film-measurement-system\/\" target = \"_blank\" ><img class = \"tatsu-gradient-border\" alt = \"MProbe 20 thickness measurement system\" title = \"MProbe20 Vis\" data-src = \"https:\/\/www.semiconsoft.com\/wp2\/wp-content\/uploads\/2020\/02\/MProbeVis_scalled_updated.gif\" src =\"data:image\/png;base64,iVBORw0KGgoAAAANSUhEUgAAAAEAAAABCAQAAAC1HAwCAAAAC0lEQVR42mNkYAAAAAYAAjCB0C8AAAAASUVORK5CYII=\"  \/><\/a><\/div><style>.tatsu-SkYghhPmJ76 .tatsu-single-image-inner{border-style: solid;max-width: 100%;}.tatsu-SkYghhPmJ76.tatsu-single-image{transform: translate3d(0px,0px, 0);}<\/style><\/div><\/div><\/div><div class = \"tatsu-column-bg-image-wrap\"><div class = \"tatsu-column-bg-image tatsu-bg-lazyload\" data-src = \"\"><\/div><\/div><div class=\"tatsu-overlay tatsu-column-overlay tatsu-animate-none\" ><\/div><\/div><style>.tatsu-row > .tatsu-HJue3nwmyQp.tatsu-column{width: 47.3%;}.tatsu-HJue3nwmyQp.tatsu-column > .tatsu-column-inner > .tatsu-column-overlay{mix-blend-mode: normal;}.tatsu-HJue3nwmyQp > .tatsu-column-inner > .tatsu-top-divider{z-index: 9999;}.tatsu-HJue3nwmyQp > .tatsu-column-inner > .tatsu-bottom-divider{z-index: 9999;}.tatsu-HJue3nwmyQp > .tatsu-column-inner > .tatsu-left-divider{z-index: 9999;}.tatsu-HJue3nwmyQp > .tatsu-column-inner > .tatsu-right-divider{z-index: 9999;}@media only screen and (max-width:1377px) {.tatsu-row > .tatsu-HJue3nwmyQp.tatsu-column{width: 50%;}}@media only screen and (min-width:768px) and (max-width: 1024px) {.tatsu-row > .tatsu-HJue3nwmyQp.tatsu-column{width: 50%;}}@media only screen and (max-width: 767px) {.tatsu-row > .tatsu-HJue3nwmyQp.tatsu-column{width: 100%;}}<\/style><\/div><div  class=\"tatsu-column  tatsu-bg-overlay tatsu-one-half tatsu-column-image-none tatsu-column-effect-none  tatsu-Bk5xnhwQJXa\"  data-parallax-speed=\"0\" style=\"\"><div class=\"tatsu-column-inner \" ><div class=\"tatsu-column-pad-wrap\"><div class=\"tatsu-column-pad\" ><div  class=\"tatsu-module tatsu-inline-text clearfix tatsu-H1cgobx7p   \" ><style>.tatsu-H1cgobx7p .tatsu-inline-text-inner{width: 100%;text-align: left;}@media only screen and (max-width: 767px) {.tatsu-H1cgobx7p .tatsu-inline-text-inner{width: 100%;}}<\/style><div class=\"tatsu-inline-text-inner tatsu-align-center\">\n<p><span class=\"swatch-black\"><span style=\"background-color: #ffffff; font-size: 17px; letter-spacing: 0px;\"><a href=\"mprobevis-thin-film-measurement-system\/\" target=\"_self\" rel=\"noopener\"><span class=\"tatsu-inline-link-style2 swatch-black\">MProbe 20Vis <\/span><\/a>&#8211; <\/span>BASIC SPECIFICATION :<\/span><br \/>\n<span class=\"swatch-black\" style=\"font-size: 17px; font-family: arial;\">Wavelength range: 400-1000nm (450-1050nm for VisX)<\/span><br \/>\n<span class=\"swatch-black\" style=\"font-size: 17px; font-family: arial;\">Wavelength resolution:<1 nm<br \/>\n<\/span><span class=\"swatch-black\" style=\"font-size: 17px; font-family: arial;\">Precision: <0.01nm or 0.01% <\/span><br \/>\n<span class=\"swatch-black\" style=\"font-size: 16px;\">Accuracy: <1nm or 0.2%\u00a0<\/span><br \/>\n<span class=\"swatch-black\" style=\"font-size: 16px;\">\u00a0Measurement:< 10ms (typical, depends on sample reflectivity)<\/span><br \/>\n<span class=\"swatch-black\" style=\"font-size: 16px;\">Spot size: <1 mm\u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0<\/span><span class=\"swatch-black\" style=\"letter-spacing: 0px; font-size: 16px;\">Sample stage: <a href=\"sample-stage-sh200a-reflectance-transmittance-measurement\/\" target=\"_blank\" rel=\"noopener\"><span class=\"tatsu-inline-link-style2 swatch-black\">SH200A<\/span><\/a> with focusing lens and fine adjustment mechanism, sample area 200x200mm<\/span><span class=\"swatch-black\" style=\"letter-spacing: 0px; font-size: 16px;\">\u00a0<\/span><\/p>\n<\/div><\/div><div  class=\"tatsu-module tatsu-normal-button tatsu-button-wrap   tatsu-S12l2hDXyX6   \"><a class=\"tatsu-shortcode mediumbtn tatsu-button left-icon circular   bg-animation-none  \" href=\"https:\/\/www.semiconsoft.com\/wp2\/mprobevis-thin-film-measurement-system\/\" style= \"\"  aria-label=\"Read more about MProbe 20 Vis\" data-gdpr-atts={} >Read more about MProbe 20 Vis<\/a><style>.tatsu-S12l2hDXyX6 .tatsu-button{background-color: rgba(34,147,215,1);color: #ffffff ;}<\/style><\/div><\/div><\/div><div class = \"tatsu-column-bg-image-wrap\"><div class = \"tatsu-column-bg-image tatsu-bg-lazyload\" data-src = \"\"><\/div><\/div><div class=\"tatsu-overlay tatsu-column-overlay tatsu-animate-none\" ><\/div><\/div><style>.tatsu-row > .tatsu-Bk5xnhwQJXa.tatsu-column{width: 52.7%;}.tatsu-Bk5xnhwQJXa.tatsu-column > .tatsu-column-inner > .tatsu-column-overlay{mix-blend-mode: normal;}.tatsu-Bk5xnhwQJXa > .tatsu-column-inner > .tatsu-top-divider{z-index: 9999;}.tatsu-Bk5xnhwQJXa > .tatsu-column-inner > .tatsu-bottom-divider{z-index: 9999;}.tatsu-Bk5xnhwQJXa > .tatsu-column-inner > .tatsu-left-divider{z-index: 9999;}.tatsu-Bk5xnhwQJXa > .tatsu-column-inner > .tatsu-right-divider{z-index: 9999;}@media only screen and (max-width:1377px) {.tatsu-row > .tatsu-Bk5xnhwQJXa.tatsu-column{width: 50%;}}@media only screen and (min-width:768px) and (max-width: 1024px) {.tatsu-row > .tatsu-Bk5xnhwQJXa.tatsu-column{width: 50%;}}@media only screen and (max-width: 767px) {.tatsu-row > .tatsu-Bk5xnhwQJXa.tatsu-column{width: 100%;}}<\/style><\/div><\/div><\/div><\/div><div class=\"tatsu-section-background-wrap\"><div class = \"tatsu-section-background tatsu-bg-lazyload\" data-src = \"\"><\/div><\/div><div class=\"tatsu-overlay tatsu-section-overlay\"><\/div><style>.tatsu-HkLxnhwQkX6 .tatsu-section-pad{padding: 1px 0px 0px 0px;}.tatsu-HkLxnhwQkX6 .tatsu-section-offset-wrap{transform: translateY(-0px);}.tatsu-HkLxnhwQkX6 > .tatsu-bottom-divider{z-index: 9999;}.tatsu-HkLxnhwQkX6 > .tatsu-top-divider{z-index: 9999;}.tatsu-HkLxnhwQkX6 .tatsu-section-overlay{mix-blend-mode: normal;}<\/style><\/div>\n","protected":false},"excerpt":{"rendered":"<p><a href=\"https:\/\/www.semiconsoft.com\/wp2\/photoresist-thickness-measurement-application\/\" class=\"exp-read-more exp-read-more-dots\">&#8230;<\/a><\/p>\n","protected":false},"author":1,"featured_media":8247,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"footnotes":""},"class_list":["post-8233","page","type-page","status-publish","has-post-thumbnail","hentry"],"yoast_head":"<!-- This site is optimized with the Yoast SEO Premium plugin v27.3 (Yoast SEO v27.3) - https:\/\/yoast.com\/product\/yoast-seo-premium-wordpress\/ -->\n<title>Photoresist Thickness Measurement Application - Semiconsoft,Inc.<\/title>\n<meta name=\"description\" content=\"Photoresist thickness measurement is simple with MProbe. Practical examples of measurement of fully\/partially baked photoresist are discussed\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/www.semiconsoft.com\/wp2\/photoresist-thickness-measurement-application\/\" \/>\n<meta property=\"og:locale\" content=\"en_US\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"Photoresist Thickness Measurement Application\" \/>\n<meta property=\"og:description\" content=\"Photoresist thickness measurement is simple with MProbe. 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