MPROBE 60 – THICKNESS MAPPING
MProbe 60 is a complete turnkey system designed for R&D centers and small manufacturing. It combines the ability to measure thickness/n&k with mapping automation and small spot measurement. MProbe 60 is used by leading R&D/Nanotechnology centers worldwide. The thicknesses from 1nm – 2mm, including multilayer filmstacks, can be measured quickly and reliably. Different MProbe 40 models are distringuished primarily by wavelength ranges and resolutions of spectrometers, which in turn determine the thickness range that can be measured.
BASIC SPECIFICATION:
Precision: <0.01nm or 0.01% (s.d.of 100 measurements on 200nm oxide)
Accuracy: <1nm or 0.2% (filmstack dependent)
Stability:< 0.02nm or 0.2% (daily measurements for 20 days)
Spot size: 4μm to 200μm (typical- depending on objective used)
Sample size: up to 300 mm
Mapping stage: 0.5 μm resolution, 1μm repeatability
Z-axis: 0.25 μm resolution, 0.5μm repeatability
OPTION
DESCRIPTION
COMMENTS
-XY Mapping stage
XY motorized mapping stage with controller ans mapping software support.
150x150mm, 200x200mm and 300x300mm option.
Step size: 0.5 μm;
Repeatability: 1μm.
One of the stage has to be selected.
– Transmission option
Attachment to support transmittance measurement. Includes: quartz stage insert, fiberoptics, collimator optics and 45 deg. mirror cube
Optics matching wavelength range of the main system
– Visible and Vis-NIR LWD objectives
-2x lens (200μm measurement)
-10x lens (40μm measurement)
-20x lens (20μm measurement)
-50x lens (8μm measurement)
-100x lens (4μm measurement)
spot sizes listed for standard 400μm fiberoptics
Standard LWD parfocal 95mm lenses, mounting thread M26x36TPI (like Mitutoyo) are compatible
– All mirror achromatic objectives
All mirrors Cassegrain objectives:
-10x objective
-15x objective
-20x objective
LWD 95mm parfocal objectives with mounting thread M26x36TPI
Fully covers UVVisNIR system wavelength range:190-1700nm
400-1000nm
F4 Spectrometer,3600 pix CCD, 16 bit ADC, 5W Tungsten-Halogen lamp
10nm – 75 μm
Spot size down to 2μm possible with 100x objective and 200μm core fiberoptics
MPROBE UVVISSR-MAP
200nm -1100nm
F4 Spectrometer, 2048 pix (backthinned),16 bit ADC 20W TH lamp, 30W Deuterium short-ark lamp
1nm -75μm
Spot size down to 20μm possible with 40x all reflective objective and 400μm fiberoptics
MPROBE VISHR-MAP
700nm -1100nm
F4 Spectrometer, 2048 pix (backthinned),16 bit ADC, 5W TH lamp
1μm-400μm
Spot size down to 2μm possible with 100x objective and 200μm fiberoptics
MPROBE NIR-MAP
900nm-1700nm
F4 spectrometer, InGaAs detector 512 pix., 16 bit ADC, 5W TH lamp
50nm – 85μm
Spot size down to 2μm possible with 100x objective and 200μm core fiberoptics
MPROBE UVVISNIR-MAP
200nm -1700nm
F4 Spectrometer, 2048 pix (backthinned),16 bit ADC 20W TH lamp, 30W Deuterium short-ark lamp. F4 spectrometer, InGaAs detector 512 pix., 16 bit ADC, 5W TH lamp
1nm -85μm
Spot size down to 20μm possible with 40x all reflective objective and 400μm fiberoptics
MPROBE NIRHR-MAP
1500nm – 1550nm
F4 spectrometer, InGaAs detector 512 pix., 16 bit ADC, 5W TH lamp or SLD option
10μm-1800μm (glass) 4μm-400μm (Si)
Spot size down to 2μm possible with 100x objective and 200μm core fiberoptics
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Thin film measurement system. Practically, any transluscent film can be measured quickly and reliably.
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