MProbe60 - Semiconsoft,Inc.

MPROBE 60 SERIES: THIN FILMS THICKNESS MEASUREMENT

MPROBE 60 Thin film measurement system (small spot and mapping)

MProbe 60 is a complete turnkey system designed for R&D centers and small manufacturing. It combines the ability to measure thickness/n&k with mapping automation and small spot measurement. MProbe 60 is used by leading R&D/Nanotechnology centers worldwide. The thicknesses from 1nm – 2mm, including multilayer filmstacks, can be measured quickly and reliably. Different MProbe 40 models are distringuished primarily by wavelength ranges and resolutions of spectrometers, which in turn determine the thickness range that can be measured.

MProbe 60 Brochure

WHY MPROBE 60?

A turnkey system with mapping automation that is flexible and modular
Precision: unmatched precision <0.01nm or 0.01%
Materials: 500+ extended material database
Software: user friendly and feature rich TFCompanion software can handle even most complex applications.No limit on number of layers, support for backside reflectance, surface roughness, dullness and much more. Integrated camera and imaging software allows to pinpoint measurement location and display results directly on the image
Affordable: unmatched price/performance

MPROBE 60 Series: Thickness ranges

WHAT IS IN THE BOX

Main unit (includes spectrometer, light source)
Solid platform with motorized mapping stage and controller
Microscope tube on z-axis motorized stage or a bracket with standard lens (depending on configuration)
Fiberoptics reflectance probe
TFCompanion -RA software, USB dongle(license key), USB memory stick with software distribution,User Guide and other materials
Calibration set (bare Si wafer and/or Quartz plate and/or Al mirror) depending on the model and black absorber
Test sample 200nm Si oxide or PET film, depending on the model
USB cables and 24VDC power supply adapters (110/220V)

BASIC SPECIFICATION:

Precision: <0.01nm or 0.01% (s.d.of 100 measurements on 200nm oxide)
Accuracy: <1nm or 0.2% (filmstack dependent)
Stability:< 0.02nm or 0.2% (daily measurements for 20 days)
Spot size: 4μm to 200μm (typical- depending on objective used)
Sample size: up to 300 mm
Mapping stage: 0.5 μm resolution, 1μm repeatability
Z-axis: 0.25 μm resolution, 0.5μm repeatability

OPTION

DESCRIPTION

COMMENTS

-XY Mapping stage

XY motorized mapping stage with controller ans mapping software support.
150x150mm, 200x200mm and 300x300mm option.
Step size: 0.5 μm;
Repeatability: 1μm.

One of the stage has to be selected.

– Transmission option

Attachment to support transmittance measurement. Includes: quartz stage insert, fiberoptics, collimator optics and 45 deg. mirror cube

Optics matching wavelength range of the main system

– Visible and Vis-NIR LWD objectives

-2x lens (200μm measurement)
-10x lens (40μm measurement)
-20x lens (20μm measurement)
-50x lens (8μm measurement)
-100x lens (4μm measurement)
spot sizes listed for standard 400μm fiberoptics

Visible lens: 430nm -900nm wavelength range
VisNIR lens: 450-1700nm wavelength range

Standard LWD parfocal 95mm lenses, mounting thread M26x36TPI (like Mitutoyo) are compatible

– All mirror achromatic objectives

All mirrors Cassegrain objectives:
-10x objective
-15x objective
-20x objective

LWD 95mm parfocal objectives with mounting thread M26x36TPI
Fully covers UVVisNIR system wavelength range:190-1700nm

MPROBE 60 MODEL

Wavelength range, nm

Description

Thickness range

Comments

MPROBE VIS-MAP

400-1000nm

F4 Spectrometer,3600 pix CCD, 16 bit ADC, 5W Tungsten-Halogen lamp

10nm – 75 μm

Spot size down to 2μm possible with 100x objective and 200μm core fiberoptics

MPROBE UVVISSR-MAP

200nm -1100nm

F4 Spectrometer, 2048 pix (backthinned),16 bit ADC 20W TH lamp, 30W Deuterium short-ark lamp

1nm -75μm

Spot size down to 20μm possible with 40x all reflective objective and 400μm fiberoptics

MPROBE VISHR-MAP

700nm -1100nm

F4 Spectrometer, 2048 pix (backthinned),16 bit ADC, 5W TH lamp

1μm-400μm

Spot size down to 2μm possible with 100x objective and 200μm fiberoptics

MPROBE NIR-MAP

900nm-1700nm

F4 spectrometer, InGaAs detector 512 pix., 16 bit ADC, 5W TH lamp

50nm – 85μm

Spot size down to 2μm possible with 100x objective and 200μm core fiberoptics

MPROBE UVVISNIR-MAP

200nm -1700nm

F4 Spectrometer, 2048 pix (backthinned),16 bit ADC 20W TH lamp, 30W Deuterium short-ark lamp. F4 spectrometer, InGaAs detector 512 pix., 16 bit ADC, 5W TH lamp

1nm -85μm

Spot size down to 20μm possible with 40x all reflective objective and 400μm fiberoptics

MPROBE NIRHR-MAP

1500nm – 1550nm

F4 spectrometer, InGaAs detector 512 pix., 16 bit ADC, 5W TH lamp or SLD option

10μm-1800μm (glass) 4μm-400μm (Si)

Spot size down to 2μm possible with 100x objective and 200μm core fiberoptics

MPROBE 60 Thin film measurement system (small spot and mapping)

WHY MPROBE 60?

WHAT IS IN THE BOX

MPROBE 60 MODEL

Wavelength range, nm

Description

Thickness range

Comments

MPROBE VIS-MAP

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