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MPROBE UVVISF – GATED THIN FILM MEASUREMENT 

MPROBE UVVisF Thin film measurement system

MProbe UVVisF  allows measurement of thickness and refractive index. This system is similar to MProbe UVVisSr system but has a shorter wavelength range weighted towards the UV wavelengths. It is designed for applications requiring fast measurement and long lamp life. In-situ, inline and production QC are some of the areas where MProbeUVVisF is used.  This system can work in high ambient light environement (e.g. sputtering) because it is using gated acquisition of Xe lamp flashes (~1 ms). Different intensity Xe lamps options are available and intensity is regulated by the software. 

MProbe UVVisF Brochure

WHY MPROBE UVVisF?

  • Fast measurement on low and high reflectivity samples. Constant/ predictable measurement frequency. Typically, 10Hz – 20Hz 
  • The same unmatched precision as other desktop MProbe systems (<0.01nm) 
  • Can be used in high ambient light environment due to gated acquisition 
  • Materials: 500+ extended material database
  • Software: user friendly and feature rich TFCompanion software can handle even most complex applications.No limit on number of layers, support for backside reflectance, surface roughness, dullness and much more. 
  •    Affordable: unmatched price/performance

MProbe UVVisF:  Measuring thin Tin Oxide on float glass

WHAT IS IN THE BOX

  • Main unit (includes spectrometer, light source)
  • Fiberoptics reflectance probe
  • TFCompanion -RA software, USB dongle(license key), USB memory stick with softwar distribution,User Guide and other materials
  •  Calibration set (bare Si wafer and Quartz plate ) and black absorber
  • Test sample 200nm Si oxide 
  • USB and or LAN cable 
  • 24VDC power supply adapter (110/220V)

BASIC SPECIFICATION:

Precision: <0.01nm or 0.01% 

Accuracy: <1nm or 0.2% (filmstack dependent)

 Stability:< 0.02nm or 0.2% 

Spot size: <1mm 

Sample size: up to 200 mm

OPTION

DESCRIPTION

COMMENTS

-20W

20W flash Xe lamp model, recommended for small spot measurement and low reflectance samples.

Standard model is using 10W Xe lamp

–  MOD 

TCP-IP remote control (based on modbus protocol)

Software plugin to allow measurement control from the 3rd party software

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