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Photoresist is used in many applications. The type, the thickness of photoresist (PR) and substrate it is deposited on can be different.
In most cases, it is necessary to measure the thickness of the PR to control the process. MProbe™  Vis reflectometer (400nm -1000nm wavelength range, thickness range: 10 nm -50μm) can be successfully used for this measurement. Illumination wavelength range is, typically, limited using a long pass filter (LP500) to avoid PR exposure. Final wavelength range (with LP500 filter): 500-1000nm. Photoresist optical dispersion is represented using Cauchy model, refractive index (n) is,typically, available from manufacturer. If this information is not available, it is possible to measure thickness and R.I. directly with MProbe system.

In cases where  small spot measurement is required, MProbe™  Vis MSP is used.

Photoresist Measurement

Why use MProbeVis or Vis-MSP?

  • 500nm -1000nm wavelength range is well suited for most (except very thick) PR films. Wavelength can be limited to prevent RP exposure 
  • Non destructive measurement and instant results
  • Small spot measurement can be used if needed
  • Thickness and R.I. dispersion can be measured

MPROBE VIS:  measurement of photoresis thickness and optical dispersion (n).

Wavelength range: 400-1000nm
Wavelength resolution:< 1 nm
Precision: <0.01nm or 0.01%
Accuracy: <1nm or 0.2% 
 Measurement:< 100ms (typical, depends on sample reflectivity)
Spot size: 2μm to 200 μm (depending on objective)
Integrated 2MB camera to display measurement area

Read more about MProbe MSP
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