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MPROBE 50: IN-SITU MEASUREMENT SYSTEM

MProbe UVVisF system

MProbe in-situ

In-situ real-time  optical thickness monitor for measurement of thin film thickness and n&k (optical constants). The system can work in high ambient light environment, because it is using gated data acquisition.  Accurate measurement in a broadband (UV-NIR) wavelength range using high-intensity flash Xe lamp.

MProbe 50 system is fully customizable to supports different vacuum  chamber geometries. Depending on optical ports available, oblique or normal incidence can be used.  Light can be focused on the sample surface or collimated. Reflectance probe can be placed outside the deposition chamber optical port or inside (using a fiberoptics feedthru).  

MProbe 50 system has no moving parts. Typical measurement time~ 10ms. Any translucent films can be measured quickly and reliably

WHY MPROBE 50?

  • In-situ thin film thickness and n&k measurement 
  • Gated data acquisition for measurement in high ambient light environment
  • Materials: 500+ extended material database
  • Continuous, fast and reliable measurement
  • Flexible configuration – fully customized to match  depositiom chamber geometry

In-situ configuration example. Other configurations available depending on deposition chamber

Fiberoptics adapter for integration with optical port of a vacuum chamber.

Optical port adapter
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