In-situ real-time optical thickness monitor for measurement of thin film thickness and n&k (optical constants). The system can work in high ambient light environment, because it is using gated data acquisition. Accurate measurement in a broadband (UV-NIR) wavelength range using high-intensity flash Xe lamp.
MProbe 50 system is fully customizable to supports different vacuum chamber geometries. Depending on optical ports available, oblique or normal incidence can be used. Light can be focused on the sample surface or collimated. Reflectance probe can be placed outside the deposition chamber optical port or inside (using a fiberoptics feedthru).
MProbe 50 system has no moving parts. Typical measurement time~ 10ms. Any translucent films can be measured quickly and reliably