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MPROBE 20 SERIES: THIN FILMS THICKNESS MEASUREMENT

 

MPROBE 20 Thin film measurement system (single-spot)

MProbe 20 is a thin film thickness measurement desktop system used for thousands of applications worldwide. It  measures thin film thickness and refractive index with a single mouse-click. The thicknesses from 1nm – 1mm, including multilayer filmstacks, can be measured quickly and reliably.  Different MProbe 20 models are distinguished primarily by  wavelength ranges and resolution of spectrometers, which in  turn determines the thickness range and types of the materials that can be measured.

 

MProbe 20 Brochure

WHY MPROBE?

  • Flexible modular system: select the best configuration for your application and easily upgrade when needed 
  • Precision: unmatched precision <0.01nm or 0.01%
  • Materials: 500+ extended material database
  • Software: user friendly and feature rich TFCompanion software can handle even most complex applications.No limit on number of layers, support for backside reflectance, surface roughness, dullness and much more. 
  •   Integration: easy integration TCP server
  •  Affordable: unmatched price/performance

MPROBE 20 Series:  Thickness ranges

WHAT IS IN THE BOX

  • Main unit (includes spectrometer, light source, light controller microprocessor) 
  • SH200A sample table with focusing lens and fine adjustment
  • Fiberoptics reflectance probe
  • TFCompanion -RA software, USB dongle(license key), USB memory stick with softwar distribution,User Guide and other materials
  •  Calibration set (bare Si wafer and/or Quartz plate and/or Al mirror) depending on the model and black absorber
  • Test sample 200nm Si oxide or PET film, depending on the model
  • USB or LAN cable (for connecting main unit to PC)
  • 24VDC power supply adapter (110/220V)

BASIC SPECIFICATION:

Precision: <0.01nm or 0.01% (s.d.of 100 measurements on 200nm oxide)

Accuracy: <1nm or 0.2% (filmstack dependent)

 Stability:< 0.02nm or 0.2% (daily measurements for 20 days)

Spot size:< 1mm 

Sample size: >= 5mm

MPROBE 20 MODEL 
Wavelength range, nm
Description
Thickness range
More details
MPROBE VIS

400-1000nm

F4 Spectrometer, 2048 pix CCD, 16 bit ADC, 5W Tungsten-Halogen lamp

10nm – 75 μm

MProbe20 Vis Brochure(PDF)

MPROBE UVVISSR

  200nm -1100nm

F4 Spectrometer, 2048 pix (backthinned),16 bit ADC 20W TH lamp, 30W Deuterium short-ark lamp

1nm -75μm

mprobe uvvissr brochure(pdf)

MPROBE VISHR

700nm -1100nm

F4 Spectrometer, 2048 pix (backthinned),16 bit ADC, 5W TH lamp 

1μm-400μm

mprobe vishr brochure(pdf)

MPROBE NIR

900nm-1700nm

F4 spectrometer, InGaAs detector 512 pix., 16 bit ADC, 5W TH lamp

50nm – 85μm

mprobe nir brochure(pdf)

MPROBE UVVisF

200nm-800nm

F4 spectrometer, Si detector 2048 pixels CCD, 16 bit ADC, 10W Xe flash lamp

1nm – 5μm

mprobe UVVisF brochure(pdf)

MPROBE UVVISNIR

200nm -1700nm

F4 Spectrometer, 2048 pix (backthinned),16 bit ADC 20W TH lamp, 30W Deuterium short-ark lamp. F4 spectrometer, InGaAs detector 512 pix., 16 bit ADC, 5W TH lamp

1nm -75μm

mprobe uvvinir brochure(pdf)

MPROBE NIRHR

1500nm – 1550nm

F4 spectrometer, InGaAs detector 512 pix., 16 bit ADC, 5W TH lamp or SLD option 

10μm-1800μm (glass) 4μm-400μm (Si)

mprobe nir brochure(pdf)
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