Get a Quote

 OLED thickness  measurement

OLED thickness measurement structure
OLED thickness measurement structure

Typical OLED structures

 OLED (organic LED) structures include several thin organic layers sandwiched between electrodes. The thickness  and optical constants of these layers need to be  measured and controlled in R&D and production. MProbe 20 UVVis system is perfectly suited for OLED thickness measurement. In case of the patterned sample, a small spot measurement (on a pixel), is done using MProbe 40 UVVis system.  It offers non-contact, robust and inexpensive metrology for this application. Individual layers, complete OLED structure and/or thickness and dispersion of the organic layers can be measured. OLEDs are used in a variety of applications from TV screens to cell phones.  This requires the use of different materials for implementation of the OLED. Typical implementation of the OLED structure are displayed  on the left. One of the interesting implementations  uses NPD (hole transport material) and Alq3 (electron transport material) materials. Both of these materials have a fairly comples dispersion, especially, in the UV range that depends on the deposition conditions. Alq3 is particularly sensitive to deposition conditions since it has several crystalline phases. 

OLED measurement
OLED thickness measurement Alq3

Measurement of a thin (17 nm)  Alq3 layer 

OLED thickness measurement Alq3 dispersion

Optical dispersion  (n, k constants) of Alq3 material, determined from the measurement 

Why use MProbe UVVis system for OLED measurement 
  • Very thin layers (< 10 nm) are measured easily
  • Most organic materials have electronic transition/ absorption structure in the UV region. This makes it possible to measure optical dispersion even on thin layers.
  • Easily verify optical constants and thickness of the complex materials like Alq3
  • Simple transition/ switch between R&D and production systems. Using the same fimstacks and measurement approach. In-line  and/or in-situ measurement, typically,  using MProbe UVVisF version of the MProbe UVVis system  
OLED thickness measurement ELT

MPROBE UVVis:  measurement of ELT layer on ITO

MProbe 20 UVVis thin-film measurement system
Basic Specification  of MProbe 20 UVVis 
  • Wavelength range: 200-1000nm
  • Wavelength resolution: 2 nm (typical, depends on spectrometer slit)
  • Measured thickness range: 1nm -75 um
  • Precision: <0.01nm or 0.01%
  • Spot size  < 1mm (for smaller spot size see MProbe 40 UVVis system)
  • Light source lifetime: 2000hrs (for longer lifetime see MProbe UVVisF system)
Read more about MProbe UVVis
Privacy Settings
We use cookies to enhance your experience while using our website. If you are using our Services via a browser you can restrict, block or remove cookies through your web browser settings. We also use content and scripts from third parties that may use tracking technologies. You can selectively provide your consent below to allow such third party embeds. For complete information about the cookies we use, data we collect and how we process them, please check our Privacy Policy
Consent to display content from - Youtube
Consent to display content from - Vimeo
Google Maps
Consent to display content from - Google
Consent to display content from - Spotify
Sound Cloud
Consent to display content from - Sound
Get a Quote