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MProbe 20 UVVis thin-film measurement system

MPROBE 20 UVVis Thickness measurement system

MProbe20 UVViS  is  a desktop system for high precision measurement of  thickness and refractive index of thin films. It is especially useful in measuring thickness and optical constants of materials with absorption edge in UV range. For example, metal oxide like TiO2, ZnO, etc. Measuring very thin films (< 50nm) is another application where UV range gives advantage. MProbe 20 UVVis capabilities overlap with that of MProbe 20 Vis system. But in these two applications UVVis system has an advantage over Vis system. MProbe 20 UVVis system is primarily used for R&D applications. 

MProbe UVVis Brochure


  • Relaible measurement using automatic adjustsment of integration time 
  • Unmatched precision 
  • Fine adjustment of the focusing position with SH200A 
  • Materials: 500+ extended material database
  • Software: user friendly and easy to use. At the same time,  feature rich TFCompanion software can handle even most complex applications.No limit on number of layers, support for backside reflectance, surface roughness, dullness and much more. 
  •    Affordable: unmatched price/performance
MProbeUVVis thin film measurement system

MProbe UVVis/X measurement unit diagram

MProbe UVVis and MProbe UVVisX systems are using different versions of CMOS detectors. MProbe UVVisX(new system) has a more smooth spectrum with increased sensitivity in NIR range.  UV fibers has reduced transmission in the NIR range, so increase detector sensitivity helps balance the spectrum. Although, UVVis systems are, primarily, used in the UV (shorter wavlength), improved sensitivity in NIR makes the system a little more versatile.

MProbe UVVis and UVVisX thin-film thickness systems comparison

MProbe UVVis and UVVisX comparison in the UV range

MProbe UVVis and UVVisX thin-film thickness systems comparison

MProbe UVVis and UVVisX (new) comparison the NIR range 


  • Main unit (includes spectrometer, light source)
  • UVVis solarization resistant fiberoptics reflectance probe
  • SH200A sample stage
  • TFCompanion -RA software, USB dongle(license key), USB memory stick with softwar distribution,User Guide and other materials
  •  Calibration set: bare Si wafer  and black absorber
  • Test sample 200nm Si oxide 
  • USB and or LAN cable 
  • 24VDC power supply adapter (110/220V)


  • Wavelength range: 200nm-1000nm
  • Light source: 30W short arc De lamp and 20W Tungsten halogen lamp. Lifetime 2000hrs (both lamps)
  • F3 astigmatism corrected spectrometer with 2048 pixels CMOS detector. See more details 
  • Thickness range: 1nm -75µm
  • Wavelength resolution: < 2nm  (option <1nm)
  • Precision: <0.01nm or 0.01% 
  • Accuracy: <1nm or 0.2% (filmstack dependent)

  • Stability:< 0.02nm or 0.2% 
  • Spot size: <1mm
  • Sample size: up to 200 mm





–  MOD 

TCP-IP remote control (based on modbus protocol)

Software plugin to allow measurement control from the 3rd party software

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