Ariel spectrometer was specially designed and optimized for use in MProbe. The salient features of spectrometer are astigmatism correction (torroid mirror) and the use of  CMOS array detector.

• Astigmatism correction increases light collection ~ 4-5 times as compared to uncorrected design.stigmatism correction also helps reduce other aberrations – the result is uniform wavelength resolution across the spectrum. Typical spectrometer has reduced resolution at the ends of the spectrum. Thick film measurement is, typically, using the 700-1000nm portion of the spectrum. Uniform wavelength resolution increases measurable thickness from ~ 50µm to ~ 150µm.
• CMOS detector allows very fast data acquisition (down to 10µs).  
• Spectrometer is calibrated in a wide temperature range (typically, 14 to 45 deg. C). This means that it has no temperature drift (it is corrected in the firmware)

These are just couple of examples. You can read more details in the following link: Ariel Spectrometer

5W TH light source is notable for several things:

1. Lifetime 10,000 hrs
2. Constant- current driver (CC driver keeps the light stable and maintain the same spectral output as the lamp ages)
3. Easy replacement – no alignment  needed
4. No need for forced cooling
5. This low power lamp enables ~ 1ms measurement time on a typical Si wafer (or other sample with ~ 30% reflectivity)

SH200A sample stage makes thickness measurement easy. It has two important features:

1. Focusing lens (~ 65mm working distance). It gives measurement  spot < 1mm.  The working distance is optimized to have low sensitivity to tilt and decreased sensitivity to substrate thickness change.
2. Fine lens adjustment mechanism. It is important because  calibration is done with Si wafer or quartz plate. But measured  sample  substrate can  have a different thickness. The lens can be repositioned  to maintain the same distance to the sample as during the calibration. This is required for an accurate measurement..

TFCompanion is a full stack thin-film data analysis software that has simple and intuitive interface. It can be used by technician on production line and has all the sophisticated  features for use in University or R&D lab. It encapsulates many decades of experience measuring and analyzing thin film applications. You can read more about TFCompanion